IL249468B
Inspection apparatus, inspection method and device manufacturing method
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Published
- Today
14 members in 7 offices
Priority claims9
| Document | Office | Kind | Date |
|---|---|---|---|
| 14176391 | European Patent Office (EPO) | A | |
| 14176391 | European Patent Office (EPO) | A | |
| 141763912 | European Patent Office (EPO) | – | |
| 2015063828 | European Patent Office (EPO) | W | |
| 2015063828 | European Patent Office (EPO) | W | |
| 141763912 | – | – | – |
| EP20140176391 | – | – | – |
| PCTEP2015063828 | – | – | – |
| WO2015EP63828 | – | – | – |
Members14
| Document | Office | Kind | |
|---|---|---|---|
| US2016011523A1 | United States of America | A1 | |
| WO2016005167A1 | World Intellectual Property Organization (WIPO) | A1 | |
| TW201606450A | Taiwan Province of China | A | |
| NL2014994A | Netherlands (Kingdom of the) | A | |
| KR20170016006A | Republic of Korea | A | |
| IL249468A0 | Israel | A0 | |
| IL249468D0 | Israel | D0 | |
| TWI572992B | Taiwan Province of China | B | |
| CN106662824A | China | A | |
| US9753379B2 | United States of America | B2 | |
| CN106662824B | China | B | |
| KR101948912B1 | Republic of Korea | B1 | |
| IL249468A | Israel | A | |
| IL249468BThis record | Israel | B |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Patent grantedGrantedFF | FF |
Numbers
- Publication
- 249468
- Publication, DOCDB
- 249468
- Publication, EPODOC
- IL249468
- Application
- 249468
- Application, DOCDB
- 24946816
- Application, EPODOC
- IL20160249468
Titles2
- English
- INSPECTION APPARATUS, INSPECTION METHOD AND DEVICE MANUFACTURING METHOD
- Hebrew
- מכשיר בדיקה, שיטת בדיקה ושיטה להכנת התקן
Classification
- CPC, 9
- G03F7/70625
- G03F7/70491
- G03F7/70633
- G01J3/2823
- G01J3/45
- G01N21/4788
- G01N21/956
- G01N2201/06113
- G03F7/706847
- IPC, 6
- G01N21 956
- G03F7 20
- G01J3 28
- G01J3 45
- G06F
- G01N21 47