IL246289B

Substrate holder, support table for a lithographic apparatus, lithographic apparatus and device manufacturing method

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

15 members in 8 offices

This recordMember, by publication datePriority claim

Priority claims3

Priority claims
Document	Office	Kind	Date
141517367	European Patent Office (EPO)	–	2014-01-20
14151736	European Patent Office (EPO)	A	2014-01-20
2014075163	European Patent Office (EPO)	W	2014-11-20

Members15

Family members, oldest first
Document	Office	Kind
NL2013835A	Netherlands (Kingdom of the)	A	2015-07-21
WO2015106860A1	World Intellectual Property Organization (WIPO)	A1	2015-07-23
TW201533838A	Taiwan Province of China	A	2015-09-01
IL246289A0	Israel	A0	2016-07-31
KR20160104722A	Republic of Korea	A	2016-09-05
CN105934715A	China	A	2016-09-07
US2016334710A1	United States of America	A1	2016-11-17
JP2017505458A	Japan	A	2017-02-16
TWI576956B	Taiwan Province of China	B	2017-04-01
JP6262866B2	Japan	B2	2018-01-17
US9939736B2	United States of America	B2	2018-04-10
KR101885750B1	Republic of Korea	B1	2018-08-06
CN105934715B	China	B	2019-01-01
IL246289A	Israel	A	2021-04-29
IL246289BThis record	Israel	B	2021-04-29

2 legal events, as the office reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code
2021-10-31	Patent renewedKB	KB
2021-08-31	Patent grantedGrantedFF	FF