IL240009B - 193nm laser and inspection system

21 members in 8 offices

This recordMember, by publication datePriority claim

Priority claims
Document	Office	Kind	Date
201361756209	United States of America	P	2013-01-24
201414158615	United States of America	A	2014-01-17
2014012902	United States of America	W	2014-01-24

Family members, oldest first
Document	Office	Kind
US2014204963A1	United States of America	A1	2014-07-24
WO2014116922A1	World Intellectual Property Organization (WIPO)	A1	2014-07-31
TW201448384A	Taiwan Province of China	A	2014-12-16
US8929406B2	United States of America	B2	2015-01-06
US2015155680A1	United States of America	A1	2015-06-04
IL240009A0	Israel	A0	2015-09-24
KR20150109472A	Republic of Korea	A	2015-10-01
EP2949015A1	European Patent Office (EPO)	A1	2015-12-02
CN105191026A	China	A	2015-12-23
JP2016508620A	Japan	A	2016-03-22
US9318869B2	United States of America	B2	2016-04-19
EP2949015A4	European Patent Office (EPO)	A4	2016-09-07
TWI590549B	Taiwan Province of China	B	2017-07-01
EP2949015B1	European Patent Office (EPO)	B1	2018-08-01
CN105191026B	China	B	2018-08-28
IL240009A	Israel	A	2018-08-30
IL240009BThis record	Israel	B	2018-08-30
JP6479683B2	Japan	B2	2019-03-06
JP2019095801A	Japan	A	2019-06-20
KR102169060B1	Republic of Korea	B1	2020-10-22
JP6790144B2	Japan	B2	2020-11-25

2 legal events, as the office reported them to INPADOC

Point at a mark for the event

Legal events, newest first
	Event	Code
2018-12-31	Patent grantedGrantedFF	FF
2018-12-31	Patent renewedKB	KB

CPC, 14: H01S3/0092
H01S3/1083
G01N21/9501
H01S3/0078
G01N21/956
G01N2021/95676
G02F2201/16
G02F1/3534
G02F1/39
G02F1/3536
G02F1/3507
H01S3/067
H01S3/0602
G01N21/84
Filled: the office’s first classification

193nm laser and inspection system