IL210697A0
Lithographic apparatus and device manufacturing method
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Published
- Today
12 members in 7 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 30605210 | United States of America | P |
Members12
| Document | Office | Kind | |
|---|---|---|---|
| IL210697A0This record | Israel | A0 | |
| NL2005997A | Netherlands (Kingdom of the) | A | |
| CN102163002A | China | A | |
| KR20110095831A | Republic of Korea | A | |
| US2011205520A1 | United States of America | A1 | |
| JP2011176309A | Japan | A | |
| TW201142528A | Taiwan Province of China | A | |
| KR101227641B1 | Republic of Korea | B1 | |
| JP5443405B2 | Japan | B2 | |
| TWI448829B | Taiwan Province of China | B | |
| US8947643B2 | United States of America | B2 | |
| CN102163002B | China | B |
Numbers
- Application
- 21069711
Titles
- English
- LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Classification
- CPC, 5
- G03F7/70516
- H10P76/2041
- G03F7/70616
- G03F7/2063
- G03F7/70775