Nova Patents
EP4589271A2

Optical system for reference switching

Abstract

Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non-simultaneous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

EP4589271A2, drawing sheet 1
Sheet 1 of 53

Term

10.6 yearsto projected expiry

Projected expiry 13 April 2037, counted from filing; an application has no term until it is granted.

  1. Priority and filed
  2. Published
  3. Today
  4. Projected expiry

15 claims: 2 independent, 13 dependent

  1. 1
    A system for determining properties of a sample, the system comprising:one or more light sources that emit light;a detector array comprising detector pixels;an illumination optic;a first optics unit, comprising: a first substrate;and a first plurality of collection optics on the first substrate;a second optics unit, comprising: a second substrate;and a second plurality of collection optics on the second substrate;and one or more multiplexers configured to combine the light received from the one or more light sources, wherein: the illumination optic receives the light and directs the light toward the sample;the first plurality of collection optics receive at least a portion of the light that is reflected from the sample;each optic of the first plurality of collection optics transmits a portion of the light to a respective one of the second plurality of collection optics;and each optic of the second plurality of collection optics transmits a portion of the light to a respective detector pixel of the detector array.
  2. 12
    A method for determining properties of a sample, comprising:emitting light using one or more light sources;combining the light emitted by the one or more light sources using one or more multiplexers;directing the light toward the sample using an illumination optic;receiving at least a portion of a return of the light at a first optics unit, the first optics unit, comprising: a first substrate;a first plurality of collection optics disposed on the first substrate;redirecting the light using the first plurality of collection optics and towards a second optics unit, the second optics unit, comprising: a second substrate;a second plurality of collection optics on the second substrate, wherein: each optic of the first plurality of collection optics transmits a portion of the light to a respective one of the second plurality of collection optics;and each optic of the second plurality of collection optics transmits a portion of the light to a respective detector pixel of a detector array comprising detector pixels;and detecting light using the detector array.