EP3710126A4
Method, system, and device for storage and delivery of process gas from a substrate
16 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7 Sheet 8 Sheet 9 Sheet 10 Sheet 11 Sheet 12 Sheet 13 Sheet 14 Sheet 15 Sheet 16
Every citation, both ways
| Document | Relation | Office | Cited during |
|---|---|---|---|
| US2007217967A1 | Cites | United States of America | Search report |
| US3514963A | Cites | United States of America | Search report |
| US4744221A | Cites | United States of America | Search report |
| US5985008A | Cites | United States of America | Search report |
| See also references of WO 2019099797A1 | Non-patent | – | Search report |
15 members in 7 offices
Priority claims7
| Document | Office | Kind | Date |
|---|---|---|---|
| 201762587759P | United States of America | – | |
| 201762587759 | United States of America | P | |
| 201862651589P | United States of America | – | |
| 201862651589 | United States of America | P | |
| 201862665168P | United States of America | – | |
| 201862665168 | United States of America | P | |
| 2018061478 | United States of America | W |
Members15
| Document | Office | Kind | |
|---|---|---|---|
| WO2019099797A1 | World Intellectual Property Organization (WIPO) | A1 | |
| TW201932177A | Taiwan Province of China | A | |
| SG11202004314VA | Singapore | A | |
| KR20200087227A | Republic of Korea | A | |
| US2020291517A1 | United States of America | A1 | |
| US2020291520A1 | United States of America | A1 | |
| EP3710126A1 | European Patent Office (EPO) | A1 | |
| US2020393086A1 | United States of America | A1 | |
| JP2021503371A | Japan | A | |
| EP3710126A4This record | European Patent Office (EPO) | A4 | |
| TWI791679B | Taiwan Province of China | B | |
| US11634815B2 | United States of America | B2 | |
| US11634816B2 | United States of America | B2 | |
| US11635170B2 | United States of America | B2 | |
| KR102785430B1 | Republic of Korea | B1 |
13 legal events, as 2 offices reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | Office | |
|---|---|---|---|
| First examination report despatched17Q | 17Q | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: EXAMINATION IS IN PROGRESSSTAA | STAA | EP | |
| Supplementary search report drawn up and despatchedA4 | A4 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Amendment of ipc main classPREVIOUS MAIN CLASS: B01D0005000000R079 | R079 | DE | |
| Request for validation of the european patent (deleted)DAV | DAV | EP | |
| Request for extension of the european patent (deleted)DAX | DAX | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting statesAK | AK | EP | |
| Request for extension of the european patentAX | AX | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: REQUEST FOR EXAMINATION WAS MADESTAA | STAA | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADESTAA | STAA | EP |
Numbers
- Publication
- 3710126
- Application
- 188777304
Titles3
- German
- VERFAHREN, SYSTEM UND VORRICHTUNG ZUR SPEICHERUNG UND ABGABE VON PROZESSGAS VON EINEM SUBSTRAT
- English
- METHOD, SYSTEM, AND DEVICE FOR STORAGE AND DELIVERY OF PROCESS GAS FROM A SUBSTRATE
- French
- PROCÉDÉ, SYSTÈME ET DISPOSITIF DE STOCKAGE ET DE DISTRIBUTION DE GAZ DE TRAITEMENT À PARTIR D'UN SUBSTRAT
Classification
- CPC, 18
- B01D3/346
- F17C11/00
- B01D5/00
- B01D3/10
- B01B1/005
- C23C16/45561
- C10J1/08
- H10W76/05
- H10W76/43
- B01D15/00
- B01D19/0005
- B01J20/261
- B01J20/28033
- B01J20/28047
- B01J20/28061
- B01J20/28064
- F17C2201/0109
- F17C2227/045
- IPC, 3
- F17C11 00
- B01F23 10
- H10W76 43
Designated states1
- Contracting states, 1
- Türkiye
