EP3676418A4
Pecvd deposition system for deposition on selective side of the substrate
Abstract
This record has no abstract on file.
Term
11.9 yearsto projected expiry
Projected expiry 24 August 2038, counted from filing; an application has no term until it is granted.
- Priority
- Filed
- Published
- Today
- Projected expiry
13 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7 Sheet 8 Sheet 9 Sheet 10 Sheet 11 Sheet 12 Sheet 13
Every citation, both ways
| Document | Relation | Office | Cited during |
|---|---|---|---|
| US2015340225A1 | Cites | United States of America | Search report |
| US8147648B2 | Cites | United States of America | Search report |
| US9644271B1 | Cites | United States of America | Search report |
| See also references of WO 2019046134A1 | Non-patent | – | Search report |
42 members in 8 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 201715692300 | United States of America | – | |
| 201715692300 | United States of America | A | |
| 2018048029 | United States of America | W |
Members42
| Document | Office | Kind | |
|---|---|---|---|
| US2019062918A1 | United States of America | A1 | |
| WO2019046134A1 | World Intellectual Property Organization (WIPO) | A1 | |
| TW201930640A | Taiwan Province of China | A | |
| SG11202001651UA | Singapore | A | |
| SG11202001651UA | Singapore | A | |
| KR20200038317A | Republic of Korea | A | |
| CN111094620A | China | A | |
| EP3676418A1 | European Patent Office (EPO) | A1 | |
| JP2020532858A | Japan | A | |
| US10851457B2 | United States of America | B2 | |
| US2021108314A1 | United States of America | A1 | |
| EP3676418A4This record | European Patent Office (EPO) | A4 | |
| KR20210157435A | Republic of Korea | A | |
| KR20210157436A | Republic of Korea | A | |
| TWI762709B | Taiwan Province of China | B | |
| US2022162753A1 | United States of America | A1 | |
| US2022162754A1 | United States of America | A1 | |
| US2022162755A1 | United States of America | A1 | |
| TW202227663A | Taiwan Province of China | A | |
| CN111094620B | China | B | |
| US11441222B2 | United States of America | B2 | |
| CN115613010A | China | A | |
| KR102490169B1 | Republic of Korea | B1 | |
| KR102490171B1 | Republic of Korea | B1 | |
| KR102490172B1 | Republic of Korea | B1 | |
| KR20230015507A | Republic of Korea | A | |
| TWI800332B | Taiwan Province of China | B | |
| KR20230060549A | Republic of Korea | A | |
| JP7303796B2 | Japan | B2 | |
| KR20230107707A | Republic of Korea | A | |
| US11725283B2 | United States of America | B2 | |
| TW202342808A | Taiwan Province of China | A | |
| KR20230158133A | Republic of Korea | A | |
| US11851760B2 | United States of America | B2 | |
| TWI832722B | Taiwan Province of China | B | |
| TW202430708A | Taiwan Province of China | A | |
| US2024309507A1 | United States of America | A1 | |
| CN115613010B | China | B | |
| CN119615129A | China | A | |
| TWI879379B | Taiwan Province of China | B | |
| KR102805706B1 | Republic of Korea | B1 | |
| TW202538095A | Taiwan Province of China | A |
17 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Opt-out of the competence of the unified patent court (upc) registeredP01 | P01 | |
| Supplementary search report drawn up and despatchedA4 | A4 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Request for validation of the european patent (deleted)DAV | DAV | |
| Request for extension of the european patent (deleted)DAX | DAX | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: REQUEST FOR EXAMINATION WAS MADESTAA | STAA | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADESTAA | STAA |
Numbers
- Publication
- 3676418
- Application
- 188523153
Titles3
- German
- PECVD-ABSCHEIDUNGSSYSTEM ZUR ABSCHEIDUNG AUF DER SELEKTIVEN SEITE EINES SUBSTRATS
- English
- PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUBSTRATE
- French
- SYSTÈME DE DÉPÔT PAR PECVD POUR DÉPÔT SUR UN CÔTÉ CHOISI D'UN SUBSTRAT
Classification
- CPC, 23
- H10P72/0402
- C23C16/45597
- C23C16/45574
- C23C16/505
- C23C16/52
- C23C16/45565
- C23C16/45519
- H10P14/69433
- H10P14/69215
- H10P14/6686
- H10P14/6682
- H10P14/6336
- H10P72/7611
- H10P72/7621
- H10P72/7624
- C23C16/04
- C23C16/4585
- C23C16/45561
- C23C16/4408
- H10P14/24
- H10P14/3411
- H10P14/3456
- H10P72/0452
- IPC, 12
- C23C16 455
- C23C16 505
- C23C16 458
- C23C16 44
- C23C16 04
- H01L21 02
- H01L21 687
- H10P14 60
- H10P72 50
- H10P14 24
- H10P72 00
- H10P72 76
Designated states1
- Contracting states, 1
- Türkiye