EP3553823A1

Method and apparatus for integrated optoelectronic modules with via holes interconnects

Abstract

A method of fabricating monolithically-integrated optoelectronic modules (100) comprising at least two series-interconnected optoelectronic components (104, 106), comprising the steps of: cutting at least one continuous back-contact groove (121) into a back-contact layer (120), wherein cutting the at least one continuous back-contact groove (121) forms at least one first and at least one second back-contact component (122, 124, 126, 128) that are electrically disconnected from each other; cutting at least one continuous front-contact groove (151) into a front-contact layer (150) to form at least one first and at least one second front-contact components (154, 156, 158) that are electrically disconnected from each other, and wherein at least a portion of the at least one first or the at least one second front-contact components (154, 156, 158) overlap with the at least one second or first back contact components (122, 124, 126, 128), respectively; forming at least one semiconductive layer (130, 140) that comprises at least one semiconductive optoelectronically active layer (130), wherein a portion of the at least one semiconductive layer is disposed between the front-contact layer (150) and the back-contact layer (120), and the semiconductive optoelectronically active layer (130) comprises a CIGS-type ABC2 material, where A comprises copper, B comprises indium and gallium, and C comprises selenium; and drilling at least one cell-to-cell via hole (155), wherein the drilling the at least one cell-to-cell via hole (155) and the cutting the at least one continuous front-contact groove (151) are performed after the front contact layer (150), the semiconductive layer (130, 140) and the back contact layer (120) are formed, and wherein heat provided in the drilling process causes: a removal of a portion of the front-contact layer (150) and a portion of the at least one semiconductive layer (130, 140) to form the cell-to-cell via hole (155), wherein a portion of the back contact layer (120) is exposed in the formed cell-to-cell via hole (155); and a permanent change in the chemical composition of the surface of the semiconductive layer(s) in the cell-to-cell via hole (155), wherein an electrically conductive permanently metalized copper-rich CIGS-type ABC2 material forms on the surface (134, 136) of the cell-to-cell via hole (155) during the removal of the portion of the at least one semiconductive layer (130, 140), and thereby forming an electrically conductive path on the surface of the via hole (155), between at least one of the first front-contact components (154, 156) and at least one second back-contact component (124, 126), thereby forming the at least two series-interconnected optoelectronic components (104, 106).

EP3553823A1, drawing sheet 1
Sheet 1 of 6

Term

Projected expiry 27 May 2031.

  1. Priority
  2. Filed
  3. Published
  4. Today
  5. Projected expiry

15 claims: 10 independent, 5 dependent

  1. 1
    A method of fabricating monolithically-integrated optoelectronic modules (100) comprising at least two series-interconnected optoelectronic components (104, 106), comprising the steps of:cutting at least one continuous back-contact groove (121) into a back-contact layer (120), wherein cutting the at least one continuous back-contact groove (121) forms at least one first and at least one second back-contact component (122, 124, 126, 128) that are electrically disconnected from each other;cutting at least one continuous front-contact groove (151) into a front-contact layer (150) to form at least one first and at least one second front-contact components (154, 156, 158) that are electrically disconnected from each other, and wherein at least a portion of the at least one first or the at least one second front-contact components (154, 156, 158) overlap with the at least one second or first back contact components (122, 124, 126, 128), respectively;forming at least one semiconductive layer (130, 140) that comprises at least one semiconductive optoelectronically active layer (130), wherein a portion of the at least one semiconductive layer is disposed between the front-contact layer (150) and the back-contact layer (120), and the semiconductive optoelectronically active layer (130) comprises a CIGS-type ABC 2 material, where A comprises copper, B comprises indium and gallium, and C comprises selenium;and drilling at least one cell-to-cell via hole (155), wherein the drilling the at least one cell-to-cell via hole (155) and the cutting the at least one continuous front-contact groove (151) are performed after the front contact layer (150), the semiconductive layer (130, 140) and the back contact layer (120) are formed, and wherein heat provided in the drilling process causes: a removal of a portion of the front-contact layer (150) and a portion of the at least one semiconductive layer (130, 140) to form the cell-to-cell via hole (155), wherein a portion of the back contact layer (120) is exposed in the formed cell-to-cell via hole (155);and a permanent change in the chemical composition of the surface of the semiconductive layer(s) in the cell-to-cell via hole (155), wherein an electrically conductive permanently metalized copper-rich CIGS-type ABC 2 material forms on the surface (134, 136) of the cell-to-cell via hole (155) during the removal of the portion of the at least one semiconductive layer (130, 140), and thereby forming an electrically conductive path on the surface of the via hole (155), between at least one of the first front-contact components (154, 156) and at least one second back-contact component (124, 126), thereby forming the at least two series-interconnected optoelectronic components (104, 106).
  2. 2
    The method according to Claim 1, wherein the at least one cell-to-cell via hole (155) extends through the at least one first back-contact component (124) or the at least one second back-contact component (126).
  3. 3
    The method according to any of the preceding claims, further comprising a step of placing at least one electrical conductor that forms a busbar (182, 188) using at least one conductive adhesive component (172, 178) so that an electrical path is established between the busbar (182, 188) and at least one of the first or second back-contact components (122, 128), the electrically conductive permanently metalized copper-rich CIGS-type ABC 2 material (136), and/or the first or second front-contact components (154, 156).
  4. 4
    The method according to any of the preceding claims, further comprising depositing at least one metalized grid component (164, 166, 168) made of at least one metalized trace onto the first and the second front-contact components (154, 156, 158), wherein the metalized grid component (164, 166, 168) extends from the at least one cell-to-cell via hole (155, 157).
  5. 5
    The method according to any of the preceding claims, further comprising filling the at least one cell-to-cell via hole (153, 155, 157) with an electrically conductive material.
  6. 6
    The method according to any of the preceding claims, wherein the drilling the at least one cell-to-cell via hole (155) and the cutting the at least one continuous front-contact groove (151) are performed during the same step.
  7. 8
    A monolithically-integrated optoelectronic module (100) produced or producible with a method according to any of the preceding claims.
  8. 9
    Equipment for fabricating monolithically-integrated optoelectronic modules (100) suited to carry out a method according to any of the preceding claims 1 to 7.
  9. 10
    A monolithically-integrated optoelectronic module (100), comprising:a front contact layer (150) comprising at least one first and at least one second electrically conductive front-contact components (152, 154, 156, 158), the first and second front-contact components being electrically isolated from each other by a front-contact groove (151);a semiconductive layer (130, 140) comprising at least one semiconductive optoelectronically active layer (130), wherein the at least one semiconductive optoelectronically active layer (130) comprises a CIGS-type ABC 2 material, wherein A comprises copper, B comprises indium and gallium, and C comprises selenium;a back-contact layer (120) comprising at least one first and at least one second electrically conductive back-contact components (122, 124, 126, 128), wherein the first and the second back-contact components are electrically isolated from each other by a back-contact groove (121);at least two series-interconnected optoelectronic components (104, 106, 108), wherein each of the at least two series-interconnected optoelectronic components comprise a first optoelectronic component (104) and a second optoelectronic component (106) that each comprise at least a portion of the semiconductive layer (130, 140), at least a portion of the first or the second front-contact component (154, 156) and at least a portion of the first or the second back-contact component (124, 126), wherein the monolithically-integrated optoelectronic module further comprises at least one via hole (155) passing through at least a portion of a first front-contact component (154, 156) and at least one semiconductive optoelectronically active layer (130), thereby exposing a portion of at least one second back-contact component (124, 126), and wherein the surface (134, 136) of the at least one via hole (155) at the level of the at least one semiconductive optoelectronically active layer (130) comprises permanently metalized copper-rich CIGS-type ABC 2 material formed when the at least one via hole (155) is formed, and the permanently metalized copper-rich CIGS-type ABC 2 material forms an electrically conductive path between the first front-contact component (154, 156) and the at least one second back-contact component (124, 126), on the surface (134, 136) of the at least one via hole (155), thereby forming a series-interconnection between a first optoelectronic component (104) and a second optoelectronic component (106) .
  10. 11
    A monolithically-integrated optoelectronic module (100), comprising a plurality of series-interconnected optoelectronic components (104, 106, 108) that comprise a first optoelectronic component (104) and a second optoelectronic component (106), wherein the first and the second optoelectronic components each comprise:at least a portion of a first and a second electrically conductive front-contact component (152, 154, 156, 158), wherein the first and the second front-contact components each comprise portions of a front-contact layer (150) that are electrically isolated from each other by a front-contact groove (151);at least a portion of a first and a second electrically conductive back-contact component (122, 124, 126, 128), wherein the first and the second back-contact components each comprise portions of a back-contact layer (120) that are electrically isolated from each other by a back-contact groove (121);at least a portion of a semiconductive layer (130, 140) comprising at least one semiconductive optoelectronically active layer (130), wherein the at least one semiconductive active layer (130) comprises a CIGS-type ABC 2 material, wherein A comprises copper, B comprises indium and gallium, and C comprises selenium, and the semiconductive layer (130, 140) is disposed between the front-contact layer (150) and the back-contact layer (120) ;and at least one via hole (155) passing through at least a portion of a first front-contact component (154, 156) and at least_a portion of the at least one semiconductive optoelectronically active layer (130), and exposing a portion of the back-contact layer (120), wherein the surface (134, 136) of the via hole (155) at the level of the at least one semiconductive optoelectronically active layer (130) comprises a permanently metalized copper-rich CIGS-type ABC 2 material formed during the via hole forming process, and the permanently metalized copper-rich CIGS-type ABC 2 material forming an electrically conductive path between a first front-contact component (154, 156) and a second back-contact component (124, 126), thereby forming a series-interconnection between the first optoelectronic component (104) and the second optoelectronic component (106).
  11. 12
    The monolithically-integrated optoelectronic module (100) according to claims 10 or 11, wherein the at least one via hole (155) extends through the at least one second back-contact component (124, 126).
  12. 13
    The monolithically-integrated optoelectronic module (100) according to any of the claims 10 to 12, wherein the at least one via hole (155) comprises a plurality of via holes that are positioned in at least one row parallel to a back-contact groove (121) such that the at least one row is at a distance of at least 5 micrometers from the back-contact groove (121).
  13. 14
    The monolithically-integrated optoelectronic module (100) according to any of the claims 10 to 13, wherein the at least one via hole (155) comprises a line segment located at a distance of at least 50 micrometers from a front-contact groove (151), and such that at least one second back-contact component (124, 126) comprises a finger-shaped extension passing under the first front-contact component and reaching the via hole (155) so that at least one series-interconnection is formed.
  14. 15
    Photovoltaic module or panel comprising a monolithically-integrated optoelectronic module (100) according to any of the claims 8 or 10 to 14.
Independent claims14