EP3063784A4

Devices, systems and methods for manufacturing through-substrate vias and front-side structures

Abstract

This record has no abstract on file.

Term

8.1 yearsto projected expiry

Projected expiry 30 October 2034, counted from filing; an application has no term until it is granted.

Every citation, both ways

Citations
Document	Relation	Office	Cited during
US2009315154A1	Cites	United States of America	Search report
US2012319291A1	Cites	United States of America	Search report
US2013252416A1	Cites	United States of America	Search report
US8076234B1	Cites	United States of America	Search report
US8497202B1	Cites	United States of America	Examiner
JPH11195706A	Cites	Japan	Search report
See also references of WO 2015066263A1	Non-patent	–	Search report

185 members in 11 offices

This recordMember, by publication datePriority claim1 more office is in the list below

Priority claims3

Priority claims
Document	Office	Kind	Date
201314068837	United States of America	–	2013-10-31
201314068837	United States of America	A	2013-10-31
2014063039	United States of America	W	2014-10-30

Members185

Family members, oldest first
Document	Office	Kind
CN102745193A	China	A	2012-10-24
US2012271512A1	United States of America	A1	2012-10-25
US2012271515A1	United States of America	A1	2012-10-25
US2012271522A1	United States of America	A1	2012-10-25
DE102012205416A1	Germany	A1	2013-06-27
US2013268160A1	United States of America	A1	2013-10-10
US2014046545A1	United States of America	A1	2014-02-13
US2014052337A1	United States of America	A1	2014-02-20
US2014058614A1	United States of America	A1	2014-02-27
US2014058622A1	United States of America	A1	2014-02-27
US2014058655A1	United States of America	A1	2014-02-27
US2014058668A1	United States of America	A1	2014-02-27
US2014133170A1	United States of America	A1	2014-05-15
US8755984B2	United States of America	B2	2014-06-17
US2014172232A1	United States of America	A1	2014-06-19
US2014188344A1	United States of America	A1	2014-07-03
US2014188346A1	United States of America	A1	2014-07-03
US2014210456A1	United States of America	A1	2014-07-31
CN103963781A	China	A	2014-08-06
DE102014201841A1	Germany	A1	2014-08-07
US2014218506A1	United States of America	A1	2014-08-07
US2014222288A1	United States of America	A1	2014-08-07
US8825328B2	United States of America	B2	2014-09-02
US2014249691A1	United States of America	A1	2014-09-04
US2014249723A1	United States of America	A1	2014-09-04
US2014267688A1	United States of America	A1	2014-09-18
US2014267689A1	United States of America	A1	2014-09-18
US2014277942A1	United States of America	A1	2014-09-18
CN104057953A	China	A	2014-09-24
DE102014204924A1	Germany	A1	2014-09-25
US2014288769A1	United States of America	A1	2014-09-25
US2014288777A1	United States of America	A1	2014-09-25
US2014297128A1	United States of America	A1	2014-10-02
US2014297129A1	United States of America	A1	2014-10-02
US2014303847A1	United States of America	A1	2014-10-09
US2014303849A1	United States of America	A1	2014-10-09
US2014309887A1	United States of America	A1	2014-10-16
US2014309888A1	United States of America	A1	2014-10-16
US2014324295A1	United States of America	A1	2014-10-30
US2014358417A1	United States of America	A1	2014-12-04
US2014358424A1	United States of America	A1	2014-12-04
US2014358429A1	United States of America	A1	2014-12-04
US8909426B2	United States of America	B2	2014-12-09
US2014379217A1	United States of America	A1	2014-12-25
US2014379219A1	United States of America	A1	2014-12-25
US8930140B2	United States of America	B2	2015-01-06
DE102014222032A1	Germany	A1	2015-04-30
DE102014222034A1	Germany	A1	2015-04-30
DE102014222048A1	Germany	A1	2015-04-30
US2015115445A1	United States of America	A1	2015-04-30
US2015120141A1	United States of America	A1	2015-04-30
CN104590116A	China	A	2015-05-06
CN104590158A	China	A	2015-05-06
CN104590372A	China	A	2015-05-06
WO2015066263A1	World Intellectual Property Organization (WIPO)	A1	2015-05-07
US9037350B2	United States of America	B2	2015-05-19
US2015138340A1	United States of America	A1	2015-05-21
US9039035B1	United States of America	B1	2015-05-26
US2015158527A1	United States of America	A1	2015-06-11
US2015197281A1	United States of America	A1	2015-07-16
US2015197282A1	United States of America	A1	2015-07-16
US2015203156A1	United States of America	A1	2015-07-23
US2015210317A1	United States of America	A1	2015-07-30
TW201530693A	Taiwan Province of China	A	2015-08-01
US9102271B2	United States of America	B2	2015-08-11
US9102272B2	United States of America	B2	2015-08-11
DE102015204006A1	Germany	A1	2015-09-10
DE102015203969A1	Germany	A1	2015-09-24
DE102015103972A1	Germany	A1	2015-10-08
CN104972850A	China	A	2015-10-14
DE102015206265A1	Germany	A1	2015-10-15
US9164955B2	United States of America	B2	2015-10-20
DE102015206768A1	Germany	A1	2015-10-22
MX2015005544A	Mexico	A	2015-11-12
US9187124B2	United States of America	B2	2015-11-17
DE102015208658A1	Germany	A1	2015-11-19
CN105083202A	China	A	2015-11-25
DE102015108268A1	Germany	A1	2015-12-03
DE102015209784A1	Germany	A1	2015-12-03
US2015344067A1	United States of America	A1	2015-12-03
DE102015108938A1	Germany	A1	2015-12-17
DE102015109537A1	Germany	A1	2015-12-24
US2015367886A1	United States of America	A1	2015-12-24
DE102015109320A1	Germany	A1	2015-12-31
US9229452B2	United States of America	B2	2016-01-05
DE102015110697A1	Germany	A1	2016-01-07
US9238483B2	United States of America	B2	2016-01-19
RU2573691C1	Russian Federation	C1	2016-01-27
RU2574042C1	Russian Federation	C1	2016-01-27
US9248858B2	United States of America	B2	2016-02-02
US2016039456A1	United States of America	A1	2016-02-11
DE102015112605A1	Germany	A1	2016-02-18
DE102015113251A1	Germany	A1	2016-02-18
DE102015215573A1	Germany	A1	2016-02-18
CN105371811A	China	A	2016-03-02
DE102015114565A1	Germany	A1	2016-03-10
US9283892B2	United States of America	B2	2016-03-15
US9290202B2	United States of America	B2	2016-03-22
US9290203B2	United States of America	B2	2016-03-22
US9290204B2	United States of America	B2	2016-03-22

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Events

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	Event	Code	Office
2026-01-15	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-09	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-08	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-12-12	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2025-11-28	Amendment of ipc main classPREVIOUS MAIN CLASS: H01L0021768000R079	R079	DE
2025-01-23	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-01-17	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2024-09-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2024-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-06-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-11-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-10-05	No opposition filedOpposition26N	26N	EP
2022-09-02	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2022-09-02	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2022-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-28	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2022-06-23	Lapsed because of non-payment of the annual feeLapsedMM	MM	BE
2022-06-01	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-06-01	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-06-01	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-06-01	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-06-01	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-06-01	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-06-01	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-06-01	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-06-01	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-06-01	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-05-31	Patent ceasedCeasedPL	PL	CH
2022-04-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-04-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-04-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-04-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-04-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-03-15	Deletion acc. to par. 5 (withdrawal of the translation of the ep patent)MK05	MK05	AT
2022-03-02	Patent invalid in the netherlands as no translation has been filedMP	MP	NL
2022-02-25	Invalidation of extension of european patentsMG9D	MG9D	LT
2021-11-24	European patents granted designating irelandGrantedFG4D	FG4D	IE
2021-11-18	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2021-11-15	Reference to at number (ep patent validated in austria)REF	REF	AT
2021-10-29	European patent takes effect as a national patent in ch/liEP	EP	CH
2021-10-27	Designated contracting statesAK	AK	EP
2021-10-27	European patent grantedGrantedFG4D	FG4D	GB
2021-10-13	Party data changed (applicant data changed or rights of an application transferred)RAP3	RAP3	EP
2021-09-24	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2021-09-24	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE PATENT HAS BEEN GRANTEDSTAA	STAA	EP
2021-09-17	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2021-06-02	Intention to grant announcedINTG	INTG	EP
2021-05-06	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2021-05-06	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: GRANT OF PATENT IS INTENDEDSTAA	STAA	EP
2021-05-05	Intention to grant announced (deleted)INTC	INTC	EP
2021-03-26	Information related to disapproval of communication of intention to grant by the applicant or resumption of examination proceedings by the epo deletedORIGINAL CODE: EPIDOSDIGR1GRAJ	GRAJ	EP
2021-03-26	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: EXAMINATION IS IN PROGRESSSTAA	STAA	EP
2020-12-09	Intention to grant announcedINTG	INTG	EP
2020-11-12	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2020-11-12	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: GRANT OF PATENT IS INTENDEDSTAA	STAA	EP
2020-03-18	First examination report despatched17Q	17Q	EP
2020-02-14	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: EXAMINATION IS IN PROGRESSSTAA	STAA	EP
2017-06-14	Supplementary search report drawn up and despatchedA4	A4	EP
2017-06-14	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2017-06-14	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2017-05-10	Amendment of ipc main classPREVIOUS MAIN CLASS: H01L0021600000R079	R079	DE
2017-02-08	Request for extension of the european patent (deleted)DAX	DAX	EP
2016-09-07	Request for examination filed17P	17P	EP
2016-09-07	Designated contracting statesAK	AK	EP
2016-09-07	Request for extension of the european patentAX	AX	EP
2016-08-05	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP

Devices, systems and methods for manufacturing through-substrate vias and front-side structures

Abstract

Term

Priority claims3

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Designated states1