Nova Patents
EP2933839A3

Germanium-based quantum well devices

Abstract

A quantum well transistor has a germanium quantum well channel region. A silicon-containing etch stop layer provides easy placement of a gate dielectric close to the channel. A group III-V barrier layer adds strain to the channel. Graded silicon germanium layers above and below the channel region improve performance. Multiple gate dielectric materials allow use of a high-k value gate dielectric.

EP2933839A3, drawing sheet 1
Sheet 1 of 1

Term

Projected expiry 9 December 2030.

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