EP2575164A3

3d integrated electronic device structure including increased thermal dissipation capabilities

Abstract

A microelectronic device structure including increased thermal dissipation capabilities. The structure including a three-dimensional (3D) integrated chip assembly that is flip chip bonded to a substrate. The chip assembly including a device substrate including an active device disposed thereon. A cap layer is phsyically bonded to the device substrate to at least partially define a hermetic seal about the active device. The microelectronic device structure provides a plurality of heat dissipation paths therethrough to dissipate heat generated therein.

EP2575164A3, drawing sheet 1
Sheet 1 of 1

Term

Projected expiry 21 September 2032.

  1. Priority
  2. Filed
  3. Published
  4. Today
  5. Projected expiry

1 sheet

  1. Sheet 1