Nova Patents
EP2321963A2

Scanned beam overlay projection

Abstract

This record has no abstract on file.

Term

2.8 yearsto projected expiry

Projected expiry 2 July 2029, counted from filing; an application has no term until it is granted.

  1. Priority and filed
  2. Published
  3. Today
  4. Projected expiry

10 members in 5 offices

This recordMember, by publication date

Members10

Family members, oldest first
DocumentOfficeKind
US2010026960A1United States of AmericaA1
WO2010014345A2World Intellectual Property Organization (WIPO)A2
WO2010014345A3World Intellectual Property Organization (WIPO)A3
EP2321963A2This recordEuropean Patent Office (EPO)A2
US7954953B2United States of AmericaB2
CN102113316AChinaA
JP2011530209AJapanA
EP2321963A4European Patent Office (EPO)A4
JP5395173B2JapanB2
EP2321963B1European Patent Office (EPO)B1