EP2249583A3

Miniature silicon condenser microphone and method for producing same

Abstract

A silicon condenser microphone package is disclosed. The silicon condenser microphone package comprises a transducer unit, a substrate, and a cover. The substrate includes an upper surface having a recess formed therein. The transducer unit is attached to the upper surface of the substrate and overlaps at least a portion of the recess wherein a back volume of the transducer unit is formed between the transducer unit and the substrate. The cover is placed over the transducer unit and includes an aperture.

EP2249583A3, drawing sheet 1
Sheet 1 of 1

Term

Term ended

Projected expiry passed 22 October 2021, 4.9 years ago.

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1 sheet

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