Nova Patents
EP2248099B1

Vao productivity suite

Abstract

This record has no abstract on file.

EP2248099B1, drawing sheet 1
Sheet 1 of 33

Term

2.4 yearsleft in the term

Expires 20 February 2029.

  1. Priority
  2. Filed
  3. Granted
  4. Today
  5. Expires

15 claims: 2 independent, 13 dependent

  1. 1
    A fabrication facility visualization and productivity system, comprising:a fabrication facility configuration module (2007, 2009, 2011) defined to virtually model physical systems (2002, 2004, 2006) and attributes of the fabrication facility to be monitored;a data acquisition module (2001, 2003, 2005) defined to interface with the physical systems (2002, 2004, 2006) of the fabrication facility and to gather operational data from the physical systems (2002, 2004, 2006);a visualizer module (2013) defined to collect and aggregate the operational data gathered from the physical systems (2002, 2004, 2006), and further defined to process the operational data into a format suitable for visual rendering;and a graphical user interface (2019) controlled by the visualizer module (2013) within which the processed operational data is displayed within a visual context of the fabrication facility, wherein the fabrication facility is a semiconductor fabrication facility;and the graphical user interface (2019) is configured, when rendered on a display device, to render a visual representation of a selected floor in the fabrication facility, characterized in that the fabrication facility productivity system further comprises: an analyzer module (2015) defined to analyze data collected by the visualizer module (2013) to resolve queries regarding fabrication facility performance, the analyzer module (2015) including a traffic congestion monitoring module defined to record, analyze, and report on vehicle density within a region of the fabrication facility, and further defined to identify precursors to congestion events and issue corresponding notifications to enable mitigation of pending congestion events;and an optimizer module (2017) defined to control systems within the fabrication facility in response to data collected by the visualizer module (2013), data generated by the analyzer module (2015), or a combination thereof, and further characterized in that the analyzer module comprises a traffic state analysis module configured to perform analyses of Quality of Service, QoS, metrics, to be used as triggers to direct the traffic congestion monitoring module to record traffic jams.
  2. 12
    A method for monitoring fabrication facility operations, comprising:acquiring operational data from different systems within a fabrication facility;aggregating the acquired operational data;and rendering the aggregated operational data in a graphical user interface (2019) within a visual context of the fabrication facility, wherein the fabrication facility is a semiconductor fabrication facility;and the graphical user interface (2019) when rendered on a display device renders a visual representation of a selected floor in the fabrication facility, the method being characterized by : analyzing operational data to resolve queries regarding fabrication facility performance;traffic congestion monitoring to record, analyze, and report on vehicle density within a region of the fabrication facility, identifying precursors to congestion events and issue corresponding notifications to enable mitigation of pending congestion events, and performing analyses of Quality of Service, QoS, metrics, to be used as triggers to direct a traffic congestion monitoring module to record traffic jams;and controlling systems within the fabrication facility in response to operational data, analysed data, or a combination thereof.
Independent claims2