EP2139054A3

Memory device and method of manufacturing the same

Abstract

Provided are a memory device formed using one or more source materials not containing hydrogen as a constituent element and a method of manufacturing the memory device. One or more source materials are SiCl4, Si2CL6, Si(NO2)4, Si(N2O2)2, SiF4, SiF6 or Si(CNO)4.

EP2139054A3, drawing sheet 1 — Sheet 1 of 1

Term

Projected expiry 24 June 2029.

1 sheet

Sheet 1

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
WO2007010746A1	Cites	World Intellectual Property Organization (WIPO)	A	Search report	1-15
US6709991B1	Cites	United States of America	X	Search report	1,6,9

6 members in 4 offices; this record represents the family

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
Document	Office	Kind	Date
20080060225	Republic of Korea	–	2008-06-25
20080060225	Republic of Korea	A	2008-06-25

Members6

Family members, oldest first
Document	Office	Kind
EP2139054A2	European Patent Office (EPO)	A2	2009-12-30
KR20100002205A	Republic of Korea	A	2010-01-06
JP2010010685A	Japan	A	2010-01-14
US2010006810A1	United States of America	A1	2010-01-14
EP2139054A3This record	European Patent Office (EPO)	A3	2011-08-31
US8034680B2	United States of America	B2	2011-10-11

11 legal events, as the office reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code
2014-01-15	Application deemed to be withdrawnWithdrawn18D	18D
2013-12-13	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA	STAA
2013-03-12	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP
2012-09-26	Party data changed (applicant data changed or rights of an application transferred)RAP1	RAP1
2012-08-08	First examination report despatched17Q	17Q
2012-04-11	Request for examination filed17P	17P
2011-08-31	Designated contracting statesAK	AK
2011-08-31	Information provided on ipc code assigned before grantRIC1	RIC1
2011-07-29	Search report despatchedORIGINAL CODE: 0009013PUAL	PUAL
2009-12-30	Designated contracting statesAK	AK
2009-11-27	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI