EP2118031A2

Method for depositing a thin layer and product thus obtained

Abstract

This record has no abstract on file.

EP2118031A2, drawing sheet 1
Sheet 1 of 14

Term

1.3 yearsto projected expiry

Projected expiry 4 January 2028, counted from filing; an application has no term until it is granted.

  1. Priority
  2. Filed
  3. Published
  4. Today
  5. Projected expiry

14 sheets

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  14. Sheet 14