EP2118031A2
Method for depositing a thin layer and product thus obtained
14 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7 Sheet 8 Sheet 9 Sheet 10 Sheet 11 Sheet 12 Sheet 13 Sheet 14
Every citation, both ways
| Document | Relation | Office | Cited during |
|---|---|---|---|
| US10822270B2 | Cited by | United States of America | Applicant |
| WO2012172266A1 | Cited by | World Intellectual Property Organization (WIPO) | Applicant |
| US2004005467A1 | Cites | United States of America | Examiner |
43 members in 17 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 0752550 | France | – | |
| 0752550 | France | A | |
| 2008050009 | France | W |
Members43
| Document | Office | Kind | |
|---|---|---|---|
| FR2911130A1 | France | A1 | |
| AU2008212701A1 | Australia | A1 | |
| CA2674085A1 | Canada | A1 | |
| WO2008096089A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO2008096089A3 | World Intellectual Property Organization (WIPO) | A3 | |
| MX2009007163A | Mexico | A | |
| KR20090101217A | Republic of Korea | A | |
| EP2118031A2This record | European Patent Office (EPO) | A2 | |
| FR2911130B1 | France | B1 | |
| CN101626990A | China | A | |
| EA200970668A1 | Eurasian Patent Organization (EAPO) | A1 | |
| US2010071810A1 | United States of America | A1 | |
| JP2010514666A | Japan | A | |
| EA017494B1 | Eurasian Patent Organization (EAPO) | B1 | |
| CN102887649A | China | A | |
| CN102898037A | China | A | |
| CN101626990B | China | B | |
| JP2013076170A | Japan | A | |
| AU2008212701B2 | Australia | B2 | |
| AU2013242798A1 | Australia | A1 | |
| BRPI0808458A2 | Brazil | A2 | |
| EP2118031B1 | European Patent Office (EPO) | B1 | |
| EP2792650A1 | European Patent Office (EPO) | A1 | |
| EP2792651A1 | European Patent Office (EPO) | A1 | |
| ES2512566T3 | Spain | T3 | |
| PT2118031E | Portugal | E | |
| DK2118031T3 | Denmark | T3 | |
| KR101469680B1 | Republic of Korea | B1 | |
| DE202008018514U1 | Germany | U1 | |
| PL2118031T3 | Poland | T3 | |
| AU2013242798B2 | Australia | B2 | |
| JP5718572B2 | Japan | B2 | |
| JP5718955B2 | Japan | B2 | |
| US9073781B2 | United States of America | B2 | |
| CA2674085C | Canada | C | |
| CN102898037B | China | B | |
| CN102887649B | China | B | |
| BRPI0808458B1 | Brazil | B1 | |
| MX370001B | Mexico | B | |
| EP2118031B2 | European Patent Office (EPO) | B2 | |
| DK2118031T4 | Denmark | T4 | |
| PL2118031T5 | Poland | T5 | |
| ES2512566T5 | Spain | T5 |
123 legal events, as 17 offices reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | Office | |
|---|---|---|---|
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Patent lapsed due to non-payment of maintenance feesLapsedMM4A | MM4A | SK | |
| Lapse because of not paying annual feesLapsedMM01 | MM01 | AT | |
| Patent ceasedCeasedPL | PL | CH | |
| Ep patent has lapsedLapsedEUG | EUG | SE | |
| Ep patent lapsedLapsedEBP | EBP | DK | |
| Lapsed, nullified, void or expired european patent that had effect in norwayExpiredMMEP | MMEP | NO | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Translation of an amended european patent specificationT5 | T5 | SK | |
| Amendment of european patent (b2) valid in norwayTB2 | TB2 | NO | |
| New agentNV | NV | CH | |
| Ep patent has been republished in amended form after opposition at epoOppositionRPEO | RPEO | SE | |
| Amended ep patent with danish claimsT4 | T4 | DK | |
| Translation for ep filed (entry of ep into country)FP | FP | NL | |
| Change of representativeR082 | R082 | DE | |
| Patent maintained in amended form27A | 27A | EP | |
| Designated contracting statesAK | AK | EP | |
| Epo decision maintaining patent in amended form now finalR102 | R102 | DE | |
| Maintained in amend formAELC | AELC | CH | |
| Patent maintained in amended formORIGINAL CODE: 0009272PUAH | PUAH | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: PATENT MAINTAINED AS AMENDEDSTAA | STAA | EP | |
| CorrectionTITREPK | PK | CH | |
| Appeal procedure closedAppealORIGINAL CODE: EPIDOSNNOA9OAPBU | APBU | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapse european patentLapsedMM4D | MM4D | LT | |
| Appeal reference modifiedAppealORIGINAL CODE: EPIDOSCREFNOAPAH | APAH | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Fee paymentPLFP | PLFP | FR | |
| Date of receipt of statement of grounds of appeal recordedAppealORIGINAL CODE: EPIDOSNNOA3OAPBQ | APBQ | EP | |
| Appeal reference modifiedAppealORIGINAL CODE: EPIDOSCREFNOAPAH | APAH | EP | |
| Appeal reference recordedAppealORIGINAL CODE: EPIDOSNREFNOAPBM | APBM | EP | |
| Date of receipt of notice of appeal recordedAppealORIGINAL CODE: EPIDOSNNOA2OAPBP | APBP | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Fee paymentPLFP | PLFP | FR | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Fee paymentPLFP | PLFP | FR | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Patent lapsedLapsedMM4A | MM4A | IE | |
| Reply of patent proprietor to notice(s) of opposition receivedOppositionORIGINAL CODE: EPIDOSNOBS3PLBB | PLBB | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Opposition filedOpposition26 | 26 | EP | |
| Notice of opposition and request to file observation + time limit sentOppositionORIGINAL CODE: EPIDOSNOBS2PLAX | PLAX | EP | |
| Opposition filedOpposition26 | 26 | EP | |
| Opposition filedOppositionORIGINAL CODE: 0009260PLBI | PLBI | EP | |
| Opposition filedOppositionORIGINAL CODE: 0009260PLBI | PLBI | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Opposition filed against patentOppositionR026 | R026 | DE | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Translation of european patent specification into slovakT3 | T3 | SK | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Translation of ep patentT3 | T3 | PL | |
| Entry of ep patent into national phase of norway [publ. of translation]T2 | T2 | NO | |
| Translation of granted ep patentGrantedTRGR | TRGR | SE | |
| Translation filed for an european patent granted for nl, confirming art. 52 par. 1 or 6 of the patents act 1995GrantedT3 | T3 | NL | |
| Ep patent with danish claimsT3 | T3 | DK | |
| Translation is availableAVAILABILITY OF NATIONAL TRANSLATIONSC4A | SC4A | PT | |
| Definitive protectionFG2A | FG2A | ES | |
| Ep patent valid in romaniaEPE | EPE | RO | |
| New agentNV | NV | CH | |
| Dpma publication of mentioned ep patent grantGrantedR096 | R096 | DE |
Showing 100 of 123
Numbers
- Publication
- 2118031
- Application
- 87504643
Titles3
- German
- VERFAHREN ZUR ABLAGERUNG EINER DÜNNSCHICHT UND DARAUS GEWONNENES PRODUKT
- English
- METHOD FOR DEPOSITING A THIN LAYER AND PRODUCT THUS OBTAINED
- French
- PROCEDE DE DEPOT DE COUCHE MINCE ET PRODUIT OBTENU
Classification
- CPC, 18
- C03C17/36
- C03C17/09
- C03C17/2456
- C03C17/3681
- C03C23/0025
- C03C2217/212
- C03C2217/256
- C03C2217/71
- C03C2217/944
- C03C2218/32
- C23C14/5806
- C23C14/5813
- C30B1/08
- C09K2323/00
- H10F77/244
- H10F71/138
- Y02E10/50
- Y02T50/60
- IPC, 8
- C03C17 09
- C03C17 245
- C03C17 36
- C03C23 00
- C30B1 08
- C23C14 58
- H01L31 0224
- H01L31 18
Designated states1
- Contracting states, 1
- Türkiye
