EP2017368A3

Precursor Compositions And Methods

Abstract

Compositions including an amido-group-containing vapor deposition precursor and a stabilizing additive are provided. Such compositions have improved thermal stability and increased volatility as compared to the amido-group-containing vapor deposition precursor itself. These compositions are useful in the deposition of thin films, such as by atomic layer deposition.

Term

1.8 yearsto projected expiry

Projected expiry 11 July 2028, counted from filing; an application has no term until it is granted.

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
EP1640475A2	Cites	European Patent Office (EPO)	A	Search report	1,7
WO2006021850A2	Cites	World Intellectual Property Organization (WIPO)	A	Search report	1,7
WO2007005088A2	Cites	World Intellectual Property Organization (WIPO)	A	Search report	1,7
WO2007015436A1	Cites	World Intellectual Property Organization (WIPO)	A	Search report	1,7
WO2008128141A2	Cites	World Intellectual Property Organization (WIPO)	E	Search report	1-10
US6984591B1	Cites	United States of America	A	Search report	1,7

15 members in 7 offices; this record represents the family

This recordMember, by publication datePriority claim

Priority claims4

Priority claims
Document	Office	Kind	Date
959349P	United States of America	–	2007-07-13
95934907	United States of America	P	2007-07-13
74373	United States of America	–	2008-03-03
7437308	United States of America	A	2008-03-03

Members15

Family members, oldest first
Document	Office	Kind
US2009017208A1	United States of America	A1	2009-01-15
KR20090007245A	Republic of Korea	A	2009-01-16
EP2017368A2	European Patent Office (EPO)	A2	2009-01-21
SG149764A1	Singapore	A1	2009-02-27
TW200909440A	Taiwan Province of China	A	2009-03-01
JP2009079290A	Japan	A	2009-04-16
CN101440477A	China	A	2009-05-27
EP2017368A3This record	European Patent Office (EPO)	A3	2011-01-19
US2011287184A1	United States of America	A1	2011-11-24
CN101440477B	China	B	2012-01-11
US8142847B2	United States of America	B2	2012-03-27
TWI374943B	Taiwan Province of China	B	2012-10-21
JP5339580B2	Japan	B2	2013-11-13
KR101498499B1	Republic of Korea	B1	2015-03-04
EP2017368B1	European Patent Office (EPO)	B1	2019-10-16

28 legal events, as 3 offices reported them to INPADOC

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Events

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	Event	Code	Office
2021-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2021-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2021-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2021-02-02	Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal feeWithdrawnR119	R119	DE
2020-09-23	No opposition filedOpposition26N	26N	EP
2020-08-21	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2020-08-21	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2020-07-17	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2019-11-13	European patents granted designating irelandGrantedFG4D	FG4D	IE
2019-11-07	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2019-10-16	Designated contracting statesAK	AK	EP
2019-09-13	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2019-09-13	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE PATENT HAS BEEN GRANTEDSTAA	STAA	EP
2019-07-30	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2019-05-15	Intention to grant announcedINTG	INTG	EP
2019-04-22	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2019-04-22	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: GRANT OF PATENT IS INTENDEDSTAA	STAA	EP
2011-09-21	Designation fees paidAKX	AKX	EP
2011-01-26	First examination report despatched17Q	17Q	EP
2011-01-19	Designated contracting statesAK	AK	EP
2011-01-19	Request for extension of the european patentAX	AX	EP
2011-01-19	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2011-01-19	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2010-12-17	Search report despatchedORIGINAL CODE: 0009013PUAL	PUAL	EP
2009-01-21	Request for examination filed17P	17P	EP
2009-01-21	Designated contracting statesAK	AK	EP
2009-01-21	Request for extension of the european patentAX	AX	EP
2008-12-19	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP

Precursor Compositions And Methods

Abstract

Term

Priority claims4

Members15

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