EP2014142A2
Dual plasma beam sources and method
Abstract
This record has no abstract on file.
Term
Projected expiry 19 April 2027.
- Priority
- Filed
- Published
- Today
- Projected expiry
Every citation, both ways
| Document | Relation | Office | Cited during |
|---|---|---|---|
| CN109729633A | Cited by | China | Search report |
| WO2004027825A2 | Cites | World Intellectual Property Organization (WIPO) | Search report |
| US5718815A | Cites | United States of America | Search report |
| US5803973A | Cites | United States of America | Examiner |
| US6444945B1 | Cites | United States of America | Examiner |
21 members in 6 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 379349 | United States of America | – | |
| 37934906 | United States of America | A | |
| 2007009625 | United States of America | W |
Members21
| Document | Office | Kind | |
|---|---|---|---|
| WO2004027825A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU2003299015A1 | Australia | A1 | |
| AU2003299015A8 | Australia | A8 | |
| WO2004027825A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1554412A2 | European Patent Office (EPO) | A2 | |
| JP2006500740A | Japan | A | |
| US2006152162A1 | United States of America | A1 | |
| US2006177599A1 | United States of America | A1 | |
| WO2007124032A2 | World Intellectual Property Organization (WIPO) | A2 | |
| US7327089B2 | United States of America | B2 | |
| US7411352B2 | United States of America | B2 | |
| WO2007124032A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP2014142A2This record | European Patent Office (EPO) | A2 | |
| KR20090023352A | Republic of Korea | A | |
| JP2009534797A | Japan | A | |
| EP1554412A4 | European Patent Office (EPO) | A4 | |
| EP2014142A4 | European Patent Office (EPO) | A4 | |
| JP2012124168A | Japan | A | |
| JP5160730B2 | Japan | B2 | |
| EP1554412B1 | European Patent Office (EPO) | B1 | |
| JP5642721B2 | Japan | B2 |
15 legal events, as 2 offices reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | Office | |
|---|---|---|---|
| Application refused18R | 18R | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION HAS BEEN REFUSEDSTAA | STAA | EP | |
| Refusal decision now finalR003 | R003 | DE | |
| Request for extension of the european patent (deleted)DAX | DAX | EP | |
| First examination report despatched17Q | 17Q | EP | |
| Supplementary search report drawn up and despatchedA4 | A4 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Deferred search report published (corrected)R17D | R17D | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting statesAK | AK | EP | |
| Request for extension of the european patentAX | AX | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP |
Numbers
- Publication
- 2014142
- Application
- 77557726
Titles3
- German
- ZWEIFACHE PLASMASTRAHLQUELLEN UND VERFAHREN
- English
- DUAL PLASMA BEAM SOURCES AND METHOD
- French
- DOUBLE SOURCE DE FAISCEAU PLASMA ET PROCÉDÉ ASSOCIÉ
Classification
- CPC, 4
- C23C14/32
- H05H1/46
- C23C16/513
- H01J37/3266
- IPC, 6
- H05H1 24
- H01J7 24
- C23C16 00
- H05H1 46
- C23C14 32
- C23C16 513
Designated states37
- Contracting states, 32
- Austria
- Belgium
- Bulgaria
- Switzerland
- Cyprus
- Czechia
- Germany
- Denmark
- Estonia
- Spain
- Finland
- France
- United Kingdom
- Greece
- Hungary
- Ireland
- Iceland
- Italy
- Liechtenstein
- Lithuania
- Luxembourg
- Latvia
- Monaco
- Malta
and 8 moreShow fewer
- Netherlands (Kingdom of the)
- Poland
- Portugal
- Romania
- Sweden
- Slovenia
- Slovakia
- Türkiye
- Extension states, 5
- Albania
- Bosnia and Herzegovina
- Croatia
- North Macedonia
- Serbia