Interconnection element based on carbon nanotubes
Abstract
The present invention relates to an element for interconnecting at least two conductors of a microelectronic circuit, comprising: a first conductor (210), said lower conductor; a dielectric layer (230) located on said first conductor; a second conductor (220), said upper conductor, on said dielectric layer; - A cavity (240) in the dielectric layer opening on the one hand on the lower conductor and on the other hand on the upper conductor. The upper conductor (220) forms a bridge over the lower conductor (210) and the cavity (240) forms at the level where it opens on the upper conductor two vents (243) on either side of the latter.

Term
1.2 yearsto projected expiry
Projected expiry 18 December 2027, counted from filing; an application has no term until it is granted.
- Priority
- Filed
- Published
- Today
- Projected expiry
3 sheets
Sheet 1 Sheet 2 Sheet 3
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| EP0259614A1 | Cites | European Patent Office (EPO) | XA | Search report | 1,20 |
| EP1361608A2 | Cites | European Patent Office (EPO) | A | Search report | 1-30 |
| US2003021966A1 | Cites | United States of America | XA | Search report | 1,20 |
| US2005104056A1 | Cites | United States of America | A | Search report | 1-30 |
| US2005142933A1 | Cites | United States of America | A | Search report | 1-30 |
| US2006220067A1 | Cites | United States of America | XA | Search report | 1-4,20-27 |
| US2006278901A1 | Cites | United States of America | A | Search report | 1-30 |
9 members in 4 offices; this record represents the family
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 0655839 | France | – | |
| 0655839 | France | A |
Members9
| Document | Office | Kind | |
|---|---|---|---|
| EP1936680A2 | European Patent Office (EPO) | A2 | |
| US2008150152A1 | United States of America | A1 | |
| FR2910706A1 | France | A1 | |
| EP1936680A3This record | European Patent Office (EPO) | A3 | |
| JP2008166756A | Japan | A | |
| FR2910706B1 | France | B1 | |
| EP1936680B1 | European Patent Office (EPO) | B1 | |
| US8598708B2 | United States of America | B2 | |
| JP5414987B2 | Japan | B2 |
76 legal events, as 8 offices reported them to INPADOC
Over the term
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| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
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| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Gb: european patent ceased through non-payment of renewal feeCeasedGBPC | GBPC | EP | |
| Lapsed because of non-payment of the annual feeLapsedMM | MM | NL | |
| Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal feeWithdrawnR119 | R119 | DE | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
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| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
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| No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE | PLBE | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA | STAA | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
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| Deletion acc. to par. 5 (withdrawal of the translation of the ep patent)MK05 | MK05 | AT | |
| Translation files for an european patent granted for nl, confirming art. 52 par. 1 or 6 of the patents act 1995GrantedT3 | T3 | NL | |
| Dpma publication of mentioned ep patent grantGrantedR096 | R096 | DE | |
| European patents granted designating irelandGrantedLANGUAGE OF EP DOCUMENT: FRENCHFG4D | FG4D | IE | |
| Designated contracting statesAK | AK | EP | |
| European patent takes effect as a national patent in ch/liEP | EP | CH | |
| European patent grantedGrantedNOT ENGLISHFG4D | FG4D | GB | |
| Reference to at number (ep patent enters austrian national phase)REF | REF | AT | |
| (expected) grantORIGINAL CODE: 0009210GRAA | GRAA | EP | |
| Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS | GRAS | EP | |
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| Party data changed (applicant data changed or rights of an application transferred)RAP1 | RAP1 | EP | |
| Designation fees paidAKX | AKX | EP | |
| First examination report despatched17Q | 17Q | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting statesAK | AK | EP | |
| Request for extension of the european patentAX | AX | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Designated contracting statesAK | AK | EP | |
| Request for extension of the european patentAX | AX | EP | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP |
Numbers
- Publication
- 1936680
- Application
- 71234678
Titles3
- German
- Interconnect-Element auf der Basis von Kohlenstoff-Nanokanälen
- English
- Interconnection element based on carbon nanotubes
- French
- Elément d'interconnexiion à Base de nanotubes de carbone
Classification
- CPC, 6
- H10W20/056
- H10W20/072
- H10W20/46
- H10W20/42
- H10W20/4462
- H10W20/0554
- IPC, 3
- H01L23 532
- H01L21 768
- H01L23 522
Designated states37
- Contracting states, 32
- Austria
- Belgium
- Bulgaria
- Switzerland
- Cyprus
- Czechia
- Germany
- Denmark
- Estonia
- Spain
- Finland
- France
- United Kingdom
- Greece
- Hungary
- Ireland
- Iceland
- Italy
- Liechtenstein
- Lithuania
- Luxembourg
- Latvia
- Monaco
- Malta
and 8 moreShow fewer
- Netherlands (Kingdom of the)
- Poland
- Portugal
- Romania
- Sweden
- Slovenia
- Slovakia
- Türkiye
- Extension states, 5
- Albania
- Bosnia and Herzegovina
- Croatia
- North Macedonia
- Serbia