EP1936680A3

Interconnection element based on carbon nanotubes

Abstract

The present invention relates to an element for interconnecting at least two conductors of a microelectronic circuit, comprising: a first conductor (210), said lower conductor; a dielectric layer (230) located on said first conductor; a second conductor (220), said upper conductor, on said dielectric layer; - A cavity (240) in the dielectric layer opening on the one hand on the lower conductor and on the other hand on the upper conductor. The upper conductor (220) forms a bridge over the lower conductor (210) and the cavity (240) forms at the level where it opens on the upper conductor two vents (243) on either side of the latter.

EP1936680A3, drawing sheet 1
Sheet 1 of 3

Term

1.2 yearsto projected expiry

Projected expiry 18 December 2027, counted from filing; an application has no term until it is granted.

  1. Priority
  2. Filed
  3. Published
  4. Today
  5. Projected expiry

3 sheets

  1. Sheet 1
  2. Sheet 2
  3. Sheet 3