EP1865544A4

Plasma doping method and apparatus

Abstract

This record has no abstract on file.

Term ended

Projected expiry passed 30 March 2026, 0.5 years ago.

Owner: PANASONIC CORP
Applicants: Panasonic Corporation
Inventors: SASAKI, Yuichiro c/o Ultimate Junction Technologies Inc., Osaka 570-8501, Japan
OKUMURA, Tomohiro c/o Matsushita Electric Industrial Co., Ltd., Chuo-ku, Osaka-shi, Osaka 540-6207, Japan
OKASHITA, Katsumi c/o Ultimate Junction Technologies Inc., Osaka 570-8501, Japan
ITO, Hiroyuki c/o Ultimate Junction Technologies Inc., Osaka 570-8501, Japan
and 1 more inventorsShow fewer
MIZUNO, Bunji c/o Ultimate Junction Technologies Inc., Osaka 570-8501, Japan

16 sheets

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
JP2000054150A	Cites	Japan	–	Search report	–
WO2005020306A1	Cites	World Intellectual Property Organization (WIPO)	–	Search report	–
US6128084A	Cites	United States of America	–	Search report	–
JPH11330185A	Cites	Japan	X	Search report	19,20,22
JP11330185A	Cites	Japan	–	–	–
MIZUNO B ET AL: "Plasma doping", SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, 2004. PROCEEDINGS. 7TH INTERNATIONAL CONFERENCE ON BEIJING, CHINA 18-21 OCT. 2004, PISCATAWAY, NJ, USA,IEEE, US LNKD- DOI:10.1109/ICSICT.2004.1435040, vol. 1, 18 October 2004 (2004-10-18), pages 423 - 427, XP010805410, ISBN: 978-0-7803-8511-5	Non-patent	–	–	Search report	–
See also references of WO 2006106858A1	Non-patent	–	–	Search report	–

7 members in 6 offices; this record represents the family

This recordMember, by publication datePriority claim

Priority claims
Document	Office	Kind	Date
2005104160	Japan	–	2005-03-31
2005104160	Japan	A	2005-03-31
2006306721	Japan	W	2006-03-30

Family members, oldest first
Document	Office	Kind
WO2006106858A1	World Intellectual Property Organization (WIPO)	A1	2006-10-12
KR20070115907A	Republic of Korea	A	2007-12-06
EP1865544A1	European Patent Office (EPO)	A1	2007-12-12
CN101151711A	China	A	2008-03-26
JPWO2006106858A1	Japan	A1	2008-09-11
US2009035878A1	United States of America	A1	2009-02-05
EP1865544A4This record	European Patent Office (EPO)	A4	2010-12-22

12 legal events, as the office reported them to INPADOC

Point at a mark for the event

Legal events, newest first
	Event	Code
2012-02-01	Application deemed to be withdrawnWithdrawn18D	18D
2011-12-30	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA	STAA
2010-12-22	Supplementary search report drawn up and despatchedA4	A4
2010-12-22	Information provided on ipc code assigned before grantRIC1	RIC1
2010-12-22	Information provided on ipc code assigned before grantRIC1	RIC1
2010-12-22	Information provided on ipc code assigned before grantRIC1	RIC1
2008-11-19	Party data changed (applicant data changed or rights of an application transferred)RAP1	RAP1
2008-07-09	Request for extension of the european patent (deleted)DAX	DAX
2008-07-09	Designated contracting states (corrected)RBV	RBV
2007-12-12	Request for examination filed17P	17P
2007-12-12	Designated contracting statesAK	AK
2007-11-09	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI