Carbon containing sputter target alloy compositions
Abstract
The invention provides a sputter target material. The sputter target material comprises an alloy system comprising Cr-C, Cr-M-C or Cr-M1-M2-C, wherein C comprises at least 0.5 and as much as 20 atomic percent; M comprises at least 0.5 and as much as 20 atomic percent and is an element selected from the group consisting of Ti, V, Y, Zr, Nb, Mo, Hf, Ta, and W; M1 comprises at least 0.5 and as much as 20 atomic percent and is an element selected from the group consisting of Ti, V, Zr, Nb, Mo, Hf, Ta, and W, and M2 comprises at least 0.5 and as much as 10 atomic percent and is an element selected from the group consisting of Li, Mg, Al, Sc, Mn, Y, and Te. A magnetic recording medium comprising a substrate and at least an underlayer comprising the sputter target material of the invention also is provided. A method of manufacturing a sputter target material further provided. The method can employ powder materials comprising a combination of elements can include a chromium alloy, a carbide or carbon containing master alloy.

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Every citation, both waysCites: the store holds 4 of 5
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| US2004214049A1 | Cites | United States of America | A | Search report | 1-22 |
| US3846084A | Cites | United States of America | XY | Search report | 1-3 |
| US5342571A | Cites | United States of America | YA | Search report | 13-15,19-21 |
| US6740397B1 | Cites | United States of America | YA | Search report | 7-9 |
| KUNRATH A.O, UPADHYA K. ET AL: "Systhesis and application of composite TIC-CR3C2 targets", SURFACE AND COATINGS TECHNOLOGY, vol. 94-95, 1997, pages 237 - 241, XP002400711 | Non-patent | – | – | Search report | – |
| DATABASE INSPEC [online] THE INSTITUTION OF ELECTRICAL ENGINEERS, STEVENAGE, GB; 1 May 2002 (2002-05-01), PEREKRESTOV V I ET AL: "Formation of a multilayer relaxation composite at the soda-lime-glass-TiC interface during ion sputtering of Cr-C-Ti composite target", XP002400744, Database accession no. 7872918 | Non-patent | – | – | Search report | – |
16 members in 8 offices
Priority claims5
| Document | Office | Kind | Date |
|---|---|---|---|
| 995112 | United States of America | – | |
| 99511204 | United States of America | A | |
| 99511204 | United States of America | A | |
| 995112 | – | – | – |
| US20040995112 | – | – | – |
Members16
| Document | Office | Kind | |
|---|---|---|---|
| US2006110626A1 | United States of America | A1 | |
| KR20060057999A | Republic of Korea | A | |
| EP1662018A2 | European Patent Office (EPO) | A2 | |
| JP2006144117A | Japan | A | |
| TW200619408A | Taiwan Province of China | A | |
| SG122875A1 | Singapore | A1 | |
| CN1807679A | China | A | |
| EP1662018A3This record | European Patent Office (EPO) | A3 | |
| CZ2005539A3 | Czechia | A3 | |
| KR20070012880A | Republic of Korea | A | |
| EP1780300A2 | European Patent Office (EPO) | A2 | |
| KR100731832B1 | Republic of Korea | B1 | |
| SG131953A1 | Singapore | A1 | |
| TWI288784B | Taiwan Province of China | B | |
| KR100774608B1 | Republic of Korea | B1 | |
| EP1780300A3 | European Patent Office (EPO) | A3 |
15 legal events, as 2 offices reported them to INPADOC
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| Event | Code | Office | |
|---|---|---|---|
| Applications withdrawn, deemed to be withdrawn, or refused after publication in hong kongWithdrawnWD | WD | HK | |
| Application deemed to be withdrawnWithdrawn18D | 18D | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | EP | |
| Designation fees paidAKX | AKX | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting statesAK | AK | EP | |
| Request for extension of the european patentAX | AX | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | EP | |
| Requests to designate patent in hong kongDE | DE | HK | |
| Designated contracting statesAK | AK | EP | |
| Request for extension of the european patentAX | AX | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP |
Numbers
- Publication
- 1662018
- Publication, DOCDB
- 1662018
- Publication, EPODOC
- EP1662018
- Application
- 5255241
- Application, DOCDB
- 05255241
- Application, EPODOC
- EP20050255241
Titles3
- German
- Kohlenstoff enthaltende Sputter-Targetlegierungszusammensetzungen
- English
- Carbon containing sputter target alloy compositions
- French
- Composition d'une alliage pour une cible de pulverisation comprenant du carbone
Classification
- CPC, 11
- C22C27/06
- C23C14/3414
- B32B15/01
- B32B15/017
- C23C14/14
- G11B5/8404
- G11B5/851
- H01F10/005
- H01F41/183
- G11B5/7368
- G11B5/73
- IPC, 3
- C23C14 34
- C22C27 06
- G11B5 00
Designated states2
- Contracting states, 1
- Türkiye
- Extension states, 1
- Yugoslavia, later Serbia and Montenegro (until 2006)