EP1598703A4
Acrylic polymer-containing gap filler forming composition for lithography
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 20 February 2024, 2.6 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
8 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7 Sheet 8
Every citation, both waysCites: the store holds 5 of 6
| Document | Relation | Office | Cited during |
|---|---|---|---|
| EP1315045A1 | Cites | European Patent Office (EPO) | Examiner |
| GB1496345A | Cites | United Kingdom | Search report |
| US2002110665A1 | Cites | United States of America | Search report |
| DE4236673A1 | Cites | Germany | Search report |
| GB939212A | Cites | United Kingdom | Search report |
| See also references of WO 2004074938A1 | Non-patent | – | Examiner |
13 members in 7 offices
Priority claims9
| Document | Office | Kind | Date |
|---|---|---|---|
| 2003044045 | Japan | A | |
| 2003044045 | Japan | A | |
| 2003044045 | Japan | – | |
| 2004001981 | Japan | W | |
| 2004001981 | Japan | W | |
| 2003044045 | – | – | – |
| JP20030044045 | – | – | – |
| JP2004001981 | – | – | – |
| WO2004JP01981 | – | – | – |
Members13
| Document | Office | Kind | |
|---|---|---|---|
| WO2004074938A1 | World Intellectual Property Organization (WIPO) | A1 | |
| TW200421038A | Taiwan Province of China | A | |
| KR20050109942A | Republic of Korea | A | |
| EP1598703A1 | European Patent Office (EPO) | A1 | |
| CN1751271A | China | A | |
| US2006068526A1 | United States of America | A1 | |
| EP1598703A4This record | European Patent Office (EPO) | A4 | |
| JPWO2004074938A1 | Japan | A1 | |
| JP4221610B2 | Japan | B2 | |
| TWI310484B | Taiwan Province of China | B | |
| CN100570483C | China | C | |
| US8007979B2 | United States of America | B2 | |
| KR101216401B1 | Republic of Korea | B1 |
24 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application deemed to be withdrawnWithdrawn18D | 18D | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | |
| Intention to grant announcedINTG | INTG | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP | GRAP | |
| First examination report despatched17Q | 17Q | |
| Request for extension of the european patent (deleted)DAX | DAX | |
| Designated contracting states (corrected)RBV | RBV | |
| Supplementary search report drawn up and despatchedA4 | A4 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1598703
- Publication, DOCDB
- 1598703
- Publication, EPODOC
- EP1598703
- Application
- 4713198
- Application, DOCDB
- 04713198
- Application, EPODOC
- EP20040713198
Titles3
- German
- EINE ZUSAMMENSETZUNG FÜR DIE LITHOGRAPHIE BILDENDER ACRYLPOLYMERHALTIGER LÜCKENFÜLLER
- English
- ACRYLIC POLYMER-CONTAINING GAP FILLER FORMING COMPOSITION FOR LITHOGRAPHY
- French
- COMPOSITION CONTENANT UN POLYMERE ACRYLIQUE POUR LA FORMATION DE CHARGES DE REMPLISSAGE DE CREUX, A UTILISER EN LITHOGRAPHIE
Classification
- CPC, 5
- G03F7/094
- G03F7/038
- Y10S430/109
- Y10S430/128
- G03F7/11
- IPC, 5
- G03F7 11
- H01L21 027
- C08L33 14
- G03F7 09
- G03F7 038
Designated states1
- Contracting states, 1
- Italy