EP1590307A4
Methods for transferring supercritical fluids in microelectronic and other industrial processes
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 8 December 2023, 2.8 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
7 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7
Every citation, both ways
| Document | Relation | Office | Cited during |
|---|---|---|---|
| WO03057377A1 | Cites | World Intellectual Property Organization (WIPO) | Search report |
| US5370742A | Cites | United States of America | Search report |
34 members in 7 offices
Priority claims5
| Document | Office | Kind | Date |
|---|---|---|---|
| 442867P | United States of America | – | |
| 44286703 | United States of America | P | |
| 448474 | United States of America | – | |
| 44847403 | United States of America | A | |
| 0340155 | United States of America | W |
Members34
| Document | Office | Kind | |
|---|---|---|---|
| US2002112740A1 | United States of America | A1 | |
| US2002112746A1 | United States of America | A1 | |
| US2002112747A1 | United States of America | A1 | |
| WO02066176A1 | World Intellectual Property Organization (WIPO) | A1 | |
| US2002179126A1 | United States of America | A1 | |
| US6562146B1 | United States of America | B1 | |
| US6596093B2 | United States of America | B2 | |
| US6602351B2 | United States of America | B2 | |
| US6613157B2 | United States of America | B2 | |
| KR20030075185A | Republic of Korea | A | |
| US6641678B2 | United States of America | B2 | |
| EP1368136A1 | European Patent Office (EPO) | A1 | |
| US2004020518A1 | United States of America | A1 | |
| US2004146636A1 | United States of America | A1 | |
| WO2004070071A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO2004070776A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU2003294557A1 | Australia | A1 | |
| AU2003294557A8 | Australia | A8 | |
| AU2003299658A1 | Australia | A1 | |
| AU2003299658A8 | Australia | A8 | |
| JP2004527110A | Japan | A | |
| WO2004070071A3 | World Intellectual Property Organization (WIPO) | A3 | |
| WO2004070776A3 | World Intellectual Property Organization (WIPO) | A3 | |
| US6905555B2 | United States of America | B2 | |
| CN1628000A | China | A | |
| KR20050097514A | Republic of Korea | A | |
| EP1368136A4 | European Patent Office (EPO) | A4 | |
| EP1590307A2 | European Patent Office (EPO) | A2 | |
| US6989172B2 | United States of America | B2 | |
| US2006035014A1 | United States of America | A1 | |
| CN1741973A | China | A | |
| JP2006513582A | Japan | A | |
| US7592035B2 | United States of America | B2 | |
| EP1590307A4This record | European Patent Office (EPO) | A4 |
17 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application withdrawnWithdrawn18W | 18W | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION HAS BEEN WITHDRAWNSTAA | STAA | |
| Supplementary search report drawn up and despatchedA4 | A4 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Request for extension of the european patent (deleted)DAX | DAX | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1590307
- Application
- 37999422
Titles3
- German
- VERFAHREN ZUR ÜBERTRAGUNG ÜBERKRITISCHER FLÜSSIGKEITEN BEI MIKROELEKTRONISCHEN UND ANDEREN INDUSTRIELLEN PROZESSEN
- English
- METHODS FOR TRANSFERRING SUPERCRITICAL FLUIDS IN MICROELECTRONIC AND OTHER INDUSTRIAL PROCESSES
- French
- PROCEDES DE TRANSFERT DE FLUIDES SUPERCRITIQUES DANS DES PROCEDES MICRO-ELECTRONIQUES ET D'AUTRES PROCEDES INDUSTRIELS
Classification
- CPC, 11
- B08B7/0021
- B08B5/00
- B05D1/18
- B05D2401/90
- Y10T137/0324
- H10P70/234
- H10P70/80
- H10P72/0406
- H10P72/0402
- C03C23/00
- B08B3/00
- IPC, 10
- C03C23 00
- B08B3 00
- B08B5 00
- H01L21 00
- H01L21 02
- B05D1 18
- B08B7 00
- B81B3 00
- B81C1 00
- H10P95 00
Designated states1
- Contracting states, 1
- Türkiye