EP1588796A3
High precision Z-theta stage
Abstract
A high precision z-theta stage having a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis comprises parallel spaced apart linear translation stages (12,13), a carriage (14) supported between the parallel translation stages, and a rotation stage (15) carried by the carriage between the parallel translation stages. Each brushless linear motor is connected to the carriage to apply translation forces in a horizontal plane intersecting the vertical center of gravity of the carriage.
Term
Term ended
Projected expiry passed 30 November 2024, 1.8 years ago.
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- Projected expiry
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1 sheet
Sheet 1
Every citation, both waysCites: the store holds 5 of 6
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| WO0189420A2 | Cites | World Intellectual Property Organization (WIPO) | A | Search report | 1-11 |
| EP0742072A2 | Cites | European Patent Office (EPO) | Y | Search report | 1-3,6,9-11 |
| EP1312439A1 | Cites | European Patent Office (EPO) | YA | Search report | 1-3,6,9-11 |
| US6159237A | Cites | United States of America | A | Search report | 1-11 |
| US6278079B1 | Cites | United States of America | A | Search report | 1-11 |
| PATENT ABSTRACTS OF JAPAN | Non-patent | – | – | Search report | – |
| PATENT ABSTRACTS OF JAPAN | Non-patent | – | – | Search report | – |
17 members in 6 offices
Priority claims5
| Document | Office | Kind | Date |
|---|---|---|---|
| 830979 | United States of America | – | |
| 83097904 | United States of America | A | |
| 83097904 | United States of America | A | |
| 830979 | – | – | – |
| US20040830979 | – | – | – |
Members17
| Document | Office | Kind | |
|---|---|---|---|
| EP1588796A2 | European Patent Office (EPO) | A2 | |
| US2005236910A1 | United States of America | A1 | |
| US2005236911A1 | United States of America | A1 | |
| US2005238452A1 | United States of America | A1 | |
| WO2005109612A2 | World Intellectual Property Organization (WIPO) | A2 | |
| US2006017330A1 | United States of America | A1 | |
| US7038334B2 | United States of America | B2 | |
| WO2005109612A3 | World Intellectual Property Organization (WIPO) | A3 | |
| US7084533B2 | United States of America | B2 | |
| US7105956B2 | United States of America | B2 | |
| EP1588796A3This record | European Patent Office (EPO) | A3 | |
| CN1943095A | China | A | |
| EP1588796B1 | European Patent Office (EPO) | B1 | |
| JP2007533477A | Japan | A | |
| DE602004010232D1 | Germany | D1 | |
| DE602004010232T2 | Germany | T2 | |
| US7420298B2 | United States of America | B2 |
63 legal events, as 5 offices reported them to INPADOC
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| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Patent expiredExpiredMK9A | MK9A | IE | |
| Expiry of rightR071 | R071 | DE | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Patent ceasedCeasedPL | PL | CH | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
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| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Gb: european patent ceased through non-payment of renewal feeCeasedGBPC | GBPC | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
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| No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE | PLBE | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA | STAA | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
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| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents actLapsedNLV1 | NLV1 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| New agentNV | NV | CH | |
| Corresponds to:REF | REF | EP | |
| European patent takes effect as a national patent in ch/liEP | EP | CH | |
| European patents granted designating irelandGrantedFG4D | FG4D | IE | |
| Designated contracting statesAK | AK | EP | |
| European patent grantedGrantedFG4D | FG4D | GB | |
| (expected) grantORIGINAL CODE: 0009210GRAA | GRAA | EP | |
| Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS | GRAS | EP | |
| Designation fees paidAKX | AKX | EP | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP | GRAP | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Designated contracting statesAK | AK | EP | |
| Request for extension of the european patentAX | AX | EP | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting statesAK | AK | EP | |
| Request for extension of the european patentAX | AX | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP |
Numbers
- Publication
- 1588796
- Publication, DOCDB
- 1588796
- Publication, EPODOC
- EP1588796
- Application
- 4078251
- Application, DOCDB
- 04078251
- Application, EPODOC
- EP20040078251
Titles3
- German
- Hochpräzisionshaltevorrichtung
- English
- High precision Z-theta stage
- French
- Dispositif de support en précision élévée
Classification
- CPC, 8
- B23Q5/28
- A61F2/90
- A61F2240/001
- B23Q1/267
- B23Q1/4876
- Y10T409/309576
- Y10T29/53261
- Y10T74/1476
- IPC, 11
- B23Q3 00
- B23Q37 00
- B23Q5 00
- B23Q5 22
- A61F2 00
- A61F2 90
- B23Q1 01
- B23Q1 26
- B23Q1 48
- B23Q5 28
- B23Q7 00
Designated states2
- Contracting states, 1
- Türkiye
- Extension states, 1
- Yugoslavia, later Serbia and Montenegro (until 2006)