EP1586386A4
Contaminant removing method and device, and exposure method and apparatus
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 25 November 2023, 2.8 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
9 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7 Sheet 8 Sheet 9
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| JP2001206737A | Cites | Japan | XAY | Search report | 1-4,8,11 |
| JP2002296403A | Cites | Japan | Y | Search report | 7,9-10,12-13,25,35,58,67 |
| JP2002336804A | Cites | Japan | A | Search report | 1,5,8,11-18,20,28,31,34,36-37,44,49-51,53-55,57,60-64,66,68-69 |
| US2003020893A1 | Cites | United States of America | AP | Search report | 1,11-17,21,25-26,28-30,35-36,38-42,44,50,54,58-64,66-69 |
| US6496257B1 | Cites | United States of America | XPY | Search report | 28-30,37 |
| WO9927568A1 | Cites | World Intellectual Property Organization (WIPO) | XY | Search report | 28-30,37 |
| JPH09298148A | Cites | Japan | XAYI | Search report | 14-16,20,23,36,44,46,54-55,60-63 |
| JPH10158035A | Cites | Japan | XAYI | Search report | 1,4,11,64-65 |
| JP10158035A | Cites | Japan | – | – | – |
| JP9298148A | Cites | Japan | – | – | – |
| See also references of WO 2004050266A1 | Non-patent | – | – | Search report | – |
23 members in 8 offices; this record represents the family
Priority claims5
| Document | Office | Kind | Date |
|---|---|---|---|
| 2002350944 | Japan | – | |
| 2002350944 | Japan | A | |
| 2003115098 | Japan | – | |
| 2003115098 | Japan | A | |
| 0314991 | Japan | W |
Members23
| Document | Office | Kind | |
|---|---|---|---|
| WO2004050266A1 | World Intellectual Property Organization (WIPO) | A1 | |
| AU2003284672A1 | Australia | A1 | |
| TW200415375A | Taiwan Province of China | A | |
| TWI226455B | Taiwan Province of China | B | |
| KR20050072497A | Republic of Korea | A | |
| EP1586386A1 | European Patent Office (EPO) | A1 | |
| US2005274898A1 | United States of America | A1 | |
| CN1720110A | China | A | |
| JPWO2004050266A1 | Japan | A1 | |
| JP2009027195A | Japan | A | |
| JP2009027196A | Japan | A | |
| CN101430423A | China | A | |
| CN101430424A | China | A | |
| JP4423559B2 | Japan | B2 | |
| EP1586386A4This record | European Patent Office (EPO) | A4 | |
| JP4591843B2 | Japan | B2 | |
| JP4591844B2 | Japan | B2 | |
| CN101430423B | China | B | |
| KR20110036104A | Republic of Korea | A | |
| CN1720110B | China | B | |
| KR101060983B1 | Republic of Korea | B1 | |
| KR101139266B1 | Republic of Korea | B1 | |
| US8920569B2 | United States of America | B2 |
11 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application deemed to be withdrawnWithdrawn18D | 18D | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | |
| Party data changed (applicant data changed or rights of an application transferred)RAP1 | RAP1 | |
| First examination report despatched17Q | 17Q | |
| Party data changed (applicant data changed or rights of an application transferred)RAP1 | RAP1 | |
| Supplementary search report drawn up and despatchedA4 | A4 | |
| Request for extension of the european patent (deleted)DAX | DAX | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1586386
- Application
- 37742004
Titles3
- German
- VERFAHREN UND VORRICHTUNG ZUR ENTFERNUNG VON VERUNREINIGUNGEN SOWIE BELICHTUNGSVERFAHREN UND -VORRICHTUNG
- English
- CONTAMINANT REMOVING METHOD AND DEVICE, AND EXPOSURE METHOD AND APPARATUS
- French
- PROCEDE ET DISPOSITIF D'ELIMINATION DE CONTAMINANTS ET PROCEDE ET APPAREIL D'EXPOSITION
Classification
- CPC, 9
- G02B27/0006
- B08B3/08
- G03F7/70916
- G03F7/70925
- G03F7/70975
- G03F7/70941
- G03F7/20
- G02B3/00
- G03F7/22
- IPC, 6
- G02B27 00
- G03F7 20
- B08B3 08
- G02B3 00
- G03F7 22
- H01L21 027
Designated states27
- Contracting states, 27
- Austria
- Belgium
- Bulgaria
- Switzerland
- Cyprus
- Czechia
- Germany
- Denmark
- Estonia
- Spain
- Finland
- France
- United Kingdom
- Greece
- Hungary
- Ireland
- Italy
- Liechtenstein
- Luxembourg
- Monaco
- Netherlands (Kingdom of the)
- Portugal
- Romania
- Sweden
and 3 moreShow fewer
- Slovenia
- Slovakia
- Türkiye