EP1586008A4

Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same

Abstract

This record has no abstract on file.

EP1586008A4, drawing sheet 1 — Sheet 1 of 29

Term

Term ended

Projected expiry passed 22 January 2024, 2.7 years ago.

29 sheets

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Sheet 2
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Sheet 29

Every citation, both waysCites: the store holds 3 of 4

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
US2003138706A1	Cites	United States of America	XP	Search report	1-149
US5310623A	Cites	United States of America	X	Search report	61-73,121-133
US6335151B1	Cites	United States of America	X	Search report	61-73,121-133
HENKE W ET AL: "Simulation and process design of gray-tone lithography for the fabrication of arbitrarily shaped surfaces", JAPANESE JOURNAL OF APPLIED PHYSICS, PART 1 (REGULAR PAPERS & SHORT NOTES) JAPAN, vol. 33, no. 12B, December 1994 (1994-12-01), pages 6809 - 6815, XP002409096, ISSN: 0021-4922	Non-patent	–	–	Search report	–

13 members in 7 offices

This recordMember, by publication datePriority claim

Priority claims9

Priority claims
Document	Office	Kind	Date
349629	United States of America	–	2003-01-23
34962903	United States of America	A	2003-01-23
34962903	United States of America	A	2003-01-23
2004001752	United States of America	W	2004-01-22
2004001752	United States of America	W	2004-01-22
349629	–	–	–
US20030349629	–	–	–
US2004001752	–	–	–
WO2004US01752	–	–	–

Members13

Family members, oldest first
Document	Office	Kind
WO2004066358A2	World Intellectual Property Organization (WIPO)	A2	2004-08-05
WO2004066358A3	World Intellectual Property Organization (WIPO)	A3	2004-11-11
US6828068B2	United States of America	B2	2004-12-07
TW200502706A	Taiwan Province of China	A	2005-01-16
US2005118515A1	United States of America	A1	2005-06-02
KR20050095857A	Republic of Korea	A	2005-10-04
EP1586008A2	European Patent Office (EPO)	A2	2005-10-19
CN1705915A	China	A	2005-12-07
JP2006516751A	Japan	A	2006-07-06
US7074530B2	United States of America	B2	2006-07-11
US2006210891A1	United States of America	A1	2006-09-21
EP1586008A4This record	European Patent Office (EPO)	A4	2007-01-31
US7473500B2	United States of America	B2	2009-01-06

11 legal events, as the office reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code
2008-12-10	Application deemed to be withdrawnWithdrawn18D	18D
2008-11-13	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA	STAA
2008-10-10	Information related to observations by third parties deletedORIGINAL CODE: EPIDOSDTIPATPAB	TPAB
2008-10-10	Observations by third partiesORIGINAL CODE: EPIDOSNTIPATPAC	TPAC
2008-02-13	First examination report despatched17Q	17Q
2007-01-31	Supplementary search report drawn up and despatchedA4	A4
2007-01-17	Information provided on ipc code assigned before grantRIC1	RIC1
2005-10-19	Request for examination filed17P	17P
2005-10-19	Designated contracting statesAK	AK
2005-10-19	Request for extension of the european patentAX	AX
2005-09-02	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI