EP1585604A2

Industrial microdeposition system including masking to reduce the impact of droplet alignment and droplet volume tolerances and errors

Abstract

A microdeposition system microdeposits droplets of fluid material to define a feature pattern on a substrate. The feature pattern for the substrate is defined. A mask is created for the feature pattern that reduces a density of defects that occur due to a malfunctioning nozzle of the microdeposition head. The droplets of fluid material are microdeposited onto the substrate based on the mask to define sub-features of the feature pattern. One of the nozzles of the microdeposition head is assigned to each of the sub-features in the feature pattern. The nozzles may be assigned randomly or using other functions. The assigned nozzles in the mask are assigned to one of a plurality of passes of the microdeposition head.

Term

Term ended

Projected expiry passed 27 November 2022, 3.8 years ago.

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Citations
DocumentRelationOfficeCited during
EP0863004A2CitesEuropean Patent Office (EPO)Search report
EP0863478A2CitesEuropean Patent Office (EPO)Search report
EP0880303A1CitesEuropean Patent Office (EPO)Search report