EP1583997A4
Photoresist removal
19 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7 Sheet 8 Sheet 9 Sheet 10 Sheet 11 Sheet 12 Sheet 13 Sheet 14 Sheet 15 Sheet 16 Sheet 17 Sheet 18 Sheet 19
Every citation, both ways
| Document | Relation | Office | Cited during |
|---|---|---|---|
| EP0128014A2 | Cites | European Patent Office (EPO) | Search report |
| EP1049141A1 | Cites | European Patent Office (EPO) | Search report |
| US2002077259A1 | Cites | United States of America | Search report |
| US6156661A | Cites | United States of America | Search report |
18 members in 8 offices
Priority claims5
| Document | Office | Kind | Date |
|---|---|---|---|
| 434971P | United States of America | – | |
| 43497102 | United States of America | P | |
| 389214 | United States of America | – | |
| 38921403 | United States of America | A | |
| 0340439 | United States of America | W |
Members18
| Document | Office | Kind | |
|---|---|---|---|
| CA2550522A1 | Canada | A1 | |
| WO2004059700A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU2003297347A1 | Australia | A1 | |
| AU2003297347A8 | Australia | A8 | |
| US2004180300A1 | United States of America | A1 | |
| WO2004059700A3 | World Intellectual Property Organization (WIPO) | A3 | |
| KR20050094409A | Republic of Korea | A | |
| EP1583997A2 | European Patent Office (EPO) | A2 | |
| CN1739064A | China | A | |
| JP2006515933A | Japan | A | |
| EP1583997A4This record | European Patent Office (EPO) | A4 | |
| US8236485B2 | United States of America | B2 | |
| KR101174911B1 | Republic of Korea | B1 | |
| US2012302483A1 | United States of America | A1 | |
| US8679734B2 | United States of America | B2 | |
| US2014213498A1 | United States of America | A1 | |
| US9256134B2 | United States of America | B2 | |
| US2016152926A1 | United States of America | A1 |
15 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application deemed to be withdrawnWithdrawn18D | 18D | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | |
| Supplementary search report drawn up and despatchedA4 | A4 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Request for extension of the european patent (deleted)DAX | DAX | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1583997
- Application
- 38141818
Titles3
- German
- PHOTORESISTENTFERNUNG
- English
- PHOTORESIST REMOVAL
- French
- ELIMINATION DE PHOTORESINE
Classification
- CPC, 23
- C11D3/30
- G03F7/42
- C11D7/06
- C11D7/3209
- C11D7/50
- G03F7/423
- Y10S438/906
- C11D3/044
- C11D3/3947
- C11D3/3955
- C11D3/3956
- C11D3/43
- C23G1/20
- G03F7/425
- C11D2111/22
- H10P70/15
- H10P50/287
- H10P50/283
- G03F7/32
- H10P70/23
- C11D1/72
- C11D7/3281
- C11D7/34
- IPC, 8
- G03C5 00
- B08B3 00
- G03F7 42
- C11D7 06
- C11D7 32
- C11D7 50
- C11D11 00
- H10P14 40
Designated states1
- Contracting states, 1
- Türkiye
