EP1580579A3

Beam homogenizer and laser irradiation apparatus

Abstract

Since the arrangement of the optical elements in the optical system is limited because of their characteristic, designing the optical system for forming the desired laser beam is difficult. An object of the present invention is to design the optical system having the desired function without being affected by the limit in the arrangement of the optical elements. Consequently, an off-axis cylindrical lens array is used as a cylindrical lens array acting on a long-side direction of the beam.

EP1580579A3, drawing sheet 1 — Sheet 1 of 2

Term

Term ended

Projected expiry passed 21 March 2025, 1.5 years ago.

2 sheets

Sheet 1
Sheet 2

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
EP1003207A2	Cites	European Patent Office (EPO)	XA	Search report	3,4,7,8,11,12,15,16,19,20,23,24,26,27,30,32,33,36,38,39,42,44,45,48,50,51,54,56,57,59,61,62
EP1031870A2	Cites	European Patent Office (EPO)	YA	Search report	5,6,9,10,13,14,17,18,21,22,24,25,28,29,34,35,40,41,46,47,52,53,57,58,62,63
DE19623749A1	Cites	Germany	A	Search report	1,2
US2002191301A1	Cites	United States of America	A	Search report	1-63
US5083199A	Cites	United States of America	XA	Search report	1
US5923475A	Cites	United States of America	XA	Search report	3,7,11,26,32,38
US6064528A	Cites	United States of America	A	Search report	1-63
US6212011B1	Cites	United States of America	XA	Search report	1
US6246524B1	Cites	United States of America	XYA	Search report	3,4,7,8,11,12,15,16,19,20,23,26,27,30-33,36-39,42-45,48-51,54-57,59,60
US6700709B1	Cites	United States of America	A	Search report	1-63
OZAKI Y ET AL: "CYLINDRICAL FLY'S EYE LENS FOR INTENSITY REDISTRIBUTION OF AN EXCIMER LASER BEAM", APPLIED OPTICS, OSA, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC, US, vol. 28, no. 1, January 1989 (1989-01-01), pages 106 - 110, XP000037678, ISSN: 0003-6935	Non-patent	–	–	Search report	–

11 members in 4 offices; this record represents the family

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
Document	Office	Kind	Date
2004088037	Japan	–	2004-03-24
2004088037	Japan	A	2004-03-24

Members11

Family members, oldest first
Document	Office	Kind
EP1580579A2	European Patent Office (EPO)	A2	2005-09-28
US2005213218A1	United States of America	A1	2005-09-29
JP2005311340A	Japan	A	2005-11-04
CN1740845A	China	A	2006-03-01
EP1580579A3This record	European Patent Office (EPO)	A3	2007-06-13
US7486856B2	United States of America	B2	2009-02-03
CN1740845B	China	B	2010-09-01
CN101866024A	China	A	2010-10-20
JP5078231B2	Japan	B2	2012-11-21
CN101866024B	China	B	2013-03-27
EP1580579B1	European Patent Office (EPO)	B1	2019-06-26

49 legal events, as 4 offices reported them to INPADOC

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	Event	Code	Office
2021-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2021-03-31	Gb: european patent ceased through non-payment of renewal feeCeasedGBPC	GBPC	EP
2021-01-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2021-01-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-10-01	Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal feeWithdrawnR119	R119	DE
2020-08-05	No opposition filedOpposition26N	26N	EP
2020-07-03	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2020-07-03	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2020-06-03	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2020-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-10-30	Patent invalid in the netherlands as no translation has been filedMP	MP	NL
2019-07-11	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2019-06-26	Designated contracting statesAK	AK	EP
2019-06-26	European patent grantedGrantedFG4D	FG4D	GB
2019-05-24	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2019-05-24	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE PATENT HAS BEEN GRANTEDSTAA	STAA	EP
2019-05-22	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2019-02-20	Intention to grant announcedINTG	INTG	EP
2019-02-13	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2019-02-13	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2019-02-13	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2019-02-13	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2019-01-23	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2019-01-17	Information related to disapproval of communication of intention to grant by the applicant or resumption of examination proceedings by the epo deletedORIGINAL CODE: EPIDOSDIGR1GRAJ	GRAJ	EP
2018-10-31	Intention to grant announcedINTG	INTG	EP
2018-10-10	Intention to grant announced (deleted)INTC	INTC	EP
2018-10-03	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2018-10-03	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: GRANT OF PATENT IS INTENDEDSTAA	STAA	EP
2018-09-07	Information related to disapproval of communication of intention to grant by the applicant or resumption of examination proceedings by the epo deletedORIGINAL CODE: EPIDOSDIGR1GRAJ	GRAJ	EP
2018-09-07	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: EXAMINATION IS IN PROGRESSSTAA	STAA	EP
2018-06-06	Intention to grant announcedINTG	INTG	EP
2018-05-13	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2018-05-13	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: GRANT OF PATENT IS INTENDEDSTAA	STAA	EP
2018-05-02	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2018-05-02	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2018-05-02	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2018-05-02	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2018-03-28	Amendment of ipc main classPREVIOUS MAIN CLASS: G02B0003000000R079	R079	DE
2016-12-09	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: EXAMINATION IS IN PROGRESSSTAA	STAA	EP
2010-11-10	First examination report despatched17Q	17Q	EP
2008-02-20	Designation fees paidAKX	AKX	EP
2007-12-12	Request for examination filed17P	17P	EP
2007-06-13	Designated contracting statesAK	AK	EP
2007-06-13	Request for extension of the european patentAX	AX	EP
2007-05-11	Search report despatchedORIGINAL CODE: 0009013PUAL	PUAL	EP
2005-09-28	Designated contracting statesAK	AK	EP
2005-09-28	Request for extension of the european patentAX	AX	EP
2005-08-12	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP

Beam homogenizer and laser irradiation apparatus

Abstract

Term

Priority claims2

Members11

Over the term

Events

Numbers

Titles3

Classification

Designated states2