EP1577709A3

Illumination apparatus exposure apparatus and device manufacturing method

Abstract

An illumination apparatus for illuminating a mask (200) having a pattern, using light from a light source (102), includes a generating section (140-152) for generating an effective light source distribution for a modified illumination to the mask, a polarization setting section (110) for setting a predetermined polarization state in plural areas in the effective light source distribution, and an adjusting section (160) for commonly controlling a polarization state of each area.

EP1577709A3, drawing sheet 1 — Sheet 1 of 1

Term

Term ended

Projected expiry passed 17 March 2025, 1.5 years ago.

1 sheet

Sheet 1

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
EP0764858A2	Cites	European Patent Office (EPO)	X	Search report	1,13-15
EP1130470A2	Cites	European Patent Office (EPO)	A	Search report	1-17
DE3523641C1	Cites	Germany	A	Search report	1-17
US5559583A	Cites	United States of America	X	Search report	1,13-15
US5673103A	Cites	United States of America	X	Search report	1-4,13-16
WO9711411A1	Cites	World Intellectual Property Organization (WIPO)	X	Search report	1,13-15
JPH0653120A	Cites	Japan	DX	Search report	1,13-15

12 members in 5 offices

This recordMember, by publication datePriority claim

Priority claims5

Priority claims
Document	Office	Kind	Date
2004078065	Japan	A	2004-03-18
2004078065	Japan	A	2004-03-18
2004078065	Japan	–	2004-03-18
2004078065	–	–	–
JP20040078065	–	–	–

Members12

Family members, oldest first
Document	Office	Kind
EP1577709A2	European Patent Office (EPO)	A2	2005-09-21
US2005206871A1	United States of America	A1	2005-09-22
JP2005268489A	Japan	A	2005-09-29
TW200537256A	Taiwan Province of China	A	2005-11-16
KR20060044393A	Republic of Korea	A	2006-05-16
US7130025B2	United States of America	B2	2006-10-31
US2006250600A1	United States of America	A1	2006-11-09
EP1577709A3This record	European Patent Office (EPO)	A3	2007-01-17
KR100674045B1	Republic of Korea	B1	2007-01-25
US7239375B2	United States of America	B2	2007-07-03
TWI307453B	Taiwan Province of China	B	2009-03-11
JP4497968B2	Japan	B2	2010-07-07

11 legal events, as the office reported them to INPADOC

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Events

Legal events, newest first
	Event	Code
2014-06-18	Application withdrawnWithdrawn18W	18W
2014-05-16	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION HAS BEEN WITHDRAWNSTAA	STAA
2007-10-10	First examination report despatched17Q	17Q
2007-09-19	Designation fees paidAKX	AKX
2007-08-29	Request for examination filed17P	17P
2007-01-17	Designated contracting statesAK	AK
2007-01-17	Request for extension of the european patentAX	AX
2006-12-15	Search report despatchedORIGINAL CODE: 0009013PUAL	PUAL
2005-09-21	Designated contracting statesAK	AK
2005-09-21	Request for extension of the european patentAX	AX
2005-08-05	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI