Semiconductor wafer processing to increase the usable planar surface area
Abstract
The invention provides a method for increasing the usable surface area of a semiconductor wafer having a substantially planar surface and a thickness dimension at right angles to said substantially planar surface, the method including the steps of selecting a strip thickness for division of the wafer into a plurality of strips, selecting a technique for cutting the wafer into the strips at an angle to the substantially planar surface, in which the combined strip thickness and width of wafer removed by the cutting is less than the thickness of the wafer, cutting the wafer into strips using the selected technique and separating the strips from each other.

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Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| EP0718873A2 | Cites | European Patent Office (EPO) | X | Search report | 15,16 |
| GB1383165A | Cites | United Kingdom | X | Search report | 1,4,7,8 |
| US3985579A | Cites | United States of America | A | Search report | 1-14 |
| US4409423A | Cites | United States of America | A | Search report | 1-3,14 |
| US5116464A | Cites | United States of America | X | Search report | 15,16 |
| US5904548A | Cites | United States of America | A | Search report | 1,6 |
| WO9824119A1 | Cites | World Intellectual Property Organization (WIPO) | A | Search report | 15-18 |
| LAURELL T ET AL: "Improvements of silicon integrated GOx micro enzyme reactors by the use of porous silicon as a surface enlarging matrix", ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY, 1996. BRIDGING DISCIPLINES FOR BIOMEDICINE., 18TH ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE AMSTERDAM, NETHERLANDS 31 OCT.-3 NOV. 1996, NEW YORK, NY, USA,IEEE, US, vol. 1, 31 October 1996 (1996-10-31), pages 262 - 263, XP010262548, ISBN: 0-7803-3811-1 | Non-patent | – | – | Search report | – |
| CHIEN F S-S ET AL: "Nanometer-scale conversion of Si3N4 to SiOx", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 76, no. 3, 17 January 2000 (2000-01-17), pages 360 - 362, XP012025706, ISSN: 0003-6951 | Non-patent | – | – | Search report | – |
74 members in 12 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| PR174800 | Australia | – | |
| PR174800 | Australia | A | |
| 01998992 | European Patent Office (EPO) | A |
Members74
| Document | Office | Kind | |
|---|---|---|---|
| AUPR174800A0 | Australia | A0 | |
| CA2432300A1 | Canada | A1 | |
| CA2727641A1 | Canada | A1 | |
| CA2727658A1 | Canada | A1 | |
| CA2728973A1 | Canada | A1 | |
| WO0245143A1 | World Intellectual Property Organization (WIPO) | A1 | |
| AU2034802A | Australia | A | |
| CA2467112A1 | Canada | A1 | |
| WO03047004A1 | World Intellectual Property Organization (WIPO) | A1 | |
| AU2002342438A1 | Australia | A1 | |
| KR20030062416A | Republic of Korea | A | |
| EP1342259A1 | European Patent Office (EPO) | A1 | |
| IL156166A0 | Israel | A0 | |
| US2004097012A1 | United States of America | A1 | |
| TW200409222A | Taiwan Province of China | A | |
| KR20040068928A | Republic of Korea | A | |
| JP2004526298A | Japan | A | |
| EP1461834A1 | European Patent Office (EPO) | A1 | |
| ZA200304155B | South Africa | B | |
| CN1592952A | China | A | |
| JP2005510884A | Japan | A | |
| CN1613155A | China | A | |
| US2005104163A1 | United States of America | A1 | |
| EP1575087A2 | European Patent Office (EPO) | A2 | |
| IL162190A0 | Israel | A0 | |
| US2005272225A1 | United States of America | A1 | |
| EP1575087A3This record | European Patent Office (EPO) | A3 | |
| ZA200405144B | South Africa | B | |
| EP1342259A4 | European Patent Office (EPO) | A4 | |
| AU2007202916A1 | Australia | A1 | |
| AU2002220348B2 | Australia | B2 | |
| AU2007202917A1 | Australia | A1 | |
| KR20080021812A | Republic of Korea | A | |
| KR20080022218A | Republic of Korea | A | |
| CN100394553C | China | C | |
| CN101286449A | China | A | |
| CN101299410A | China | A | |
| KR100883997B1 | Republic of Korea | B1 | |
| AU2002342438B2 | Australia | B2 | |
| CN101373713A | China | A | |
| AU2002342438C1 | Australia | C1 | |
| US7595543B2 | United States of America | B2 | |
| AU2009251067A1 | Australia | A1 | |
| AU2009251069A1 | Australia | A1 | |
| JP4416399B2 | Japan | B2 | |
| CN1613155B | China | B | |
| EP1461834A4 | European Patent Office (EPO) | A4 | |
| CA2467112C | Canada | C | |
| JP4530662B2 | Japan | B2 | |
| TWI330384B | Taiwan Province of China | B | |
| MY142148A | Malaysia | A | |
| US2010258161A1 | United States of America | A1 | |
| US2010267218A1 | United States of America | A1 | |
| US2010269899A1 | United States of America | A1 | |
| US7828983B2 | United States of America | B2 | |
| EP2267789A2 | European Patent Office (EPO) | A2 | |
| EP2267790A2 | European Patent Office (EPO) | A2 | |
| IL162190A | Israel | A | |
| EP2273556A2 | European Patent Office (EPO) | A2 | |
| US7875794B2 | United States of America | B2 | |
| CA2432300C | Canada | C | |
| CN101286449B | China | B | |
| MY144264A | Malaysia | A | |
| KR101081477B1 | Republic of Korea | B1 | |
| KR101081478B1 | Republic of Korea | B1 | |
| EP2267789A3 | European Patent Office (EPO) | A3 | |
| EP2267790A3 | European Patent Office (EPO) | A3 | |
| EP2273556A3 | European Patent Office (EPO) | A3 | |
| AU2009251067B2 | Australia | B2 | |
| CN101299410B | China | B | |
| AU2013201557A1 | Australia | A1 | |
| CN101373713B | China | B | |
| US9583668B2 | United States of America | B2 | |
| EP1575087B1 | European Patent Office (EPO) | B1 |
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Numbers
- Publication
- 1575087
- Application
- 50760990
Titles3
- German
- Halbleiter-wafer-verarbeitung zur Vergrösserung des benutzbaren planaren Oberflächeninhalts
- English
- Semiconductor wafer processing to increase the usable planar surface area
- French
- Tratement d'une tranche semi-conducteurs permettant d'augmenter l'etendue de la surface plane utile
Classification
- CPC, 11
- H10F71/121
- H10P50/00
- Y02E10/52
- Y02E10/547
- Y02P70/50
- H10F77/147
- H10F19/902
- H10F77/488
- H10F10/14
- H10F71/137
- H10F71/00
- IPC, 18
- H01L21 78
- H01L21 301
- B23K101 40
- H01L21 308
- H01L21 306
- B23K
- H10D62 10
- H01L
- H01L21 00
- H01L21 46
- H01L21 4763
- H01L21 50
- H01L31 0236
- H01L31 05
- H01L31 052
- H01L31 054
- H01L31 068
- H01L31 18
Designated states1
- Contracting states, 1
- Türkiye