EP1570232A4
Apparatus and methods for detecting overlay errors using scatterometry
Abstract
This record has no abstract on file.
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19 sheets
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Every citation, both waysCites: the store holds 2 of 3
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| WO0225723A2 | Cites | World Intellectual Property Organization (WIPO) | X | Search report | 1,4-41,43-45,47-57,60-96,98-100,102-111 |
| WO0225723A | Cites | World Intellectual Property Organization (WIPO) | – | – | – |
| "PHASE-SENSITIVE OVERLAY ANALYSIS SPECTROMETRY", IBM TECHNICAL DISCLOSURE BULLETIN, IBM CORP. NEW YORK, US, vol. 32, no. 10A, 1 March 1990 (1990-03-01), pages 170 - 174, XP002003938, ISSN: 0018-8689 | Non-patent | – | – | Search report | – |
| See also references of WO 2004053426A1 | Non-patent | – | – | Search report | – |
119 members in 8 offices
Priority claims29
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| US20030504093P | – | – | – |
| WO2003US38784 | – | – | – |
Members119
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Numbers
- Publication
- 1570232
- Publication, DOCDB
- 1570232
- Publication, EPODOC
- EP1570232
- Application
- 3796723
- Application, DOCDB
- 03796723
- Application, EPODOC
- EP20030796723
Titles3
- German
- VORRICHTUNGEN UND VERFAHREN ZUM ERKENNEN VON OVERLAY-FEHLERN DURCH VERWENDUNG VON STREUMESSUNGEN
- English
- APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- French
- APPAREIL ET PROCEDES POUR DETECTER LES ERREURS DE SUPERPOSITION PAR DIFFUSIOMETRIE
Classification
- CPC, 4
- G03F9/7088
- G03F7/70633
- G03F9/7049
- G03F9/7084
- IPC, 3
- G03F7 20
- G03F9 00
- G01B11 00
Designated states1
- Contracting states, 1
- Türkiye