EP1568985A3
Apparatus for surface inspection and method and apparatus for inspecting substrate
Abstract
A target object has its surface condition inspected by having its image taken from above while being irradiated by red, green and blue light beams at different elevation angles. An inspection area is set on the image and a direction is extracted on the image in which a change appears in the color phase according to the arrangement of the light sources and this extracted direction is compared with a preliminarily registered standard direction to judge the surface condition from the result of this comparison.
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Projected expiry passed 15 February 2025, 1.6 years ago.
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1 sheet
Sheet 1
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| EP0385474A2 | Cites | European Patent Office (EPO) | X | Search report | 1-12 |
| EP0413817A1 | Cites | European Patent Office (EPO) | X | Search report | 1-12 |
| EP0452905A1 | Cites | European Patent Office (EPO) | X | Search report | 1-12 |
| EP1333275A2 | Cites | European Patent Office (EPO) | X | Search report | 1-12 |
| US2003099393A1 | Cites | United States of America | X | Search report | 1-12 |
| DE3540288A1 | Cites | Germany | X | Search report | 1-12 |
| US5039868A | Cites | United States of America | X | Search report | 1-12 |
| US5064291A | Cites | United States of America | X | Search report | 1-12 |
| US5822449A | Cites | United States of America | X | Search report | 1-12 |
| US6023663A | Cites | United States of America | X | Search report | 1-12 |
| WO9920093A1 | Cites | World Intellectual Property Organization (WIPO) | X | Search report | 1-12 |
| JPH02190750A | Cites | Japan | X | Search report | 1-12 |
| JPH03142303A | Cites | Japan | X | Search report | 1-12 |
| JPS62127617A | Cites | Japan | X | Search report | 1-12 |
| CAPSON D W ET AL: "A tiered-color illumination approach for machine inspection of solder joints", IEEE TRANSACTIONS ON PATTERN ANALYSIS AND MACHINE INTELLIGENCE, IEEE SERVICE CENTER, LOS ALAMITOS, CA, US, vol. 10, no. 3, 1 May 1988 (1988-05-01), pages 387 - 393, XP002243987, ISSN: 0162-8828, DOI: 10.1109/34.3902 | Non-patent | – | – | Search report | – |
| "MULTIPLE-IMAGE VISION INSPECTION PROCESS", IBM TECHNICAL DISCLOSURE BULLETIN, INTERNATIONAL BUSINESS MACHINES CORP. (THORNWOOD), US, vol. 30, no. 4, 1 September 1987 (1987-09-01), pages 1647 - 1649, XP000021763, ISSN: 0018-8689 | Non-patent | – | – | Search report | – |
9 members in 4 offices; this record represents the family
Priority claims4
| Document | Office | Kind | Date |
|---|---|---|---|
| 2004052800 | Japan | – | |
| 2004052800 | Japan | A | |
| 2005032845 | Japan | – | |
| 2005032845 | Japan | A |
Members9
| Document | Office | Kind | |
|---|---|---|---|
| CN1661323A | China | A | |
| EP1568985A2 | European Patent Office (EPO) | A2 | |
| US2005190361A1 | United States of America | A1 | |
| JP2005274558A | Japan | A | |
| JP2006322951A | Japan | A | |
| JP3867724B2 | Japan | B2 | |
| CN1322307C | China | C | |
| US7505149B2 | United States of America | B2 | |
| EP1568985A3This record | European Patent Office (EPO) | A3 |
26 legal events, as the office reported them to INPADOC
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| Designation fees paidAKX | AKX | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
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Numbers
- Publication
- 1568985
- Application
- 50031640
Titles3
- German
- Vorrichtung zur Untersuchung von Oberflächen und Verfahren und Vorrichtung zur Untersuchung von Substraten.
- English
- Apparatus for surface inspection and method and apparatus for inspecting substrate
- French
- Appareil d'inspection de surfaces et appareil et procédé d'inspection de substrats.
Classification
- CPC, 6
- G01R31/309
- G01N21/95684
- G06T7/0004
- G06T2207/10024
- G06T2207/30152
- G06T7/90
- IPC, 7
- G01N21 00
- G01R31 309
- G01R31 308
- G01B11 24
- G01N21 88
- G01N21 956
- H05K3 34
Designated states36
- Contracting states, 30
- Austria
- Belgium
- Bulgaria
- Switzerland
- Cyprus
- Czechia
- Germany
- Denmark
- Estonia
- Spain
- Finland
- France
- United Kingdom
- Greece
- Hungary
- Ireland
- Iceland
- Italy
- Liechtenstein
- Lithuania
- Luxembourg
- Monaco
- Netherlands (Kingdom of the)
- Poland
and 6 moreShow fewer
- Portugal
- Romania
- Sweden
- Slovenia
- Slovakia
- Türkiye
- Extension states, 6
- Albania
- Bosnia and Herzegovina
- Croatia
- Latvia
- North Macedonia
- Yugoslavia, later Serbia and Montenegro (until 2006)