EP1565932A4
Method for producing and testing a corrosion-resistant channel in a silicon device
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 17 November 2023, 2.9 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
7 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7
Every citation, both ways
| Document | Relation | Office | Cited during |
|---|---|---|---|
| US2002066957A1 | Cites | United States of America | Search report |
| US4325984A | Cites | United States of America | Search report |
| US5302241A | Cites | United States of America | Search report |
| US5854134A | Cites | United States of America | Search report |
| US6129331A | Cites | United States of America | Search report |
| US6149123A | Cites | United States of America | Search report |
| US6197388B1 | Cites | United States of America | Search report |
| US6325886B1 | Cites | United States of America | Search report |
| PATENT ABSTRACTS OF JAPAN vol. 015, no. 351 (E - 1108) 5 September 1991 (1991-09-05) | Non-patent | – | Search report |
15 members in 6 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 298847 | United States of America | – | |
| 29884702 | United States of America | A | |
| 0336669 | United States of America | W |
Members15
| Document | Office | Kind | |
|---|---|---|---|
| US2004096992A1 | United States of America | A1 | |
| WO2004047148A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO2004047148A3 | World Intellectual Property Organization (WIPO) | A3 | |
| US2005026312A1 | United States of America | A1 | |
| US6869818B2 | United States of America | B2 | |
| EP1565932A2 | European Patent Office (EPO) | A2 | |
| CN1711623A | China | A | |
| JP2006506239A | Japan | A | |
| EP1565932A4This record | European Patent Office (EPO) | A4 | |
| US7125739B2 | United States of America | B2 | |
| CN100351995C | China | C | |
| EP1565932B1 | European Patent Office (EPO) | B1 | |
| DE60319014D1 | Germany | D1 | |
| DE60319014T2 | Germany | T2 | |
| JP4482912B2 | Japan | B2 |
26 legal events, as 3 offices reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | Office | |
|---|---|---|---|
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Patent expired after termination of 20 yearsExpiredPE20 | PE20 | GB | |
| Expiry of rightR071 | R071 | DE | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| No opposition filedOpposition26N | 26N | EP | |
| No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE | PLBE | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA | STAA | EP | |
| Corresponds to:REF | REF | EP | |
| Designated contracting statesAK | AK | EP | |
| European patent grantedGrantedFG4D | FG4D | GB | |
| (expected) grantORIGINAL CODE: 0009210GRAA | GRAA | EP | |
| Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS | GRAS | EP | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP | GRAP | EP | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | EP | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | EP | |
| First examination report despatched17Q | 17Q | EP | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | EP | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | EP | |
| Supplementary search report drawn up and despatchedA4 | A4 | EP | |
| Party data changed (applicant data changed or rights of an application transferred)RAP1 | RAP1 | EP | |
| Designated contracting states (corrected)RBV | RBV | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting statesAK | AK | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP |
Numbers
- Publication
- 1565932
- Application
- 37867694
Titles3
- German
- VERFAHREN ZUR HERSTELLUNG UND PRÜFUNG EINES KORROSIONSBESTÄNDIGEN KANALS IN EINEM SILIZIUMBAUELEMENT
- English
- METHOD FOR PRODUCING AND TESTING A CORROSION-RESISTANT CHANNEL IN A SILICON DEVICE
- French
- PROCEDE DE PRODUCTION ET DE VERIFICATION D'UN CANAL RESISTANT A LA CORROSION DANS UN DISPOSITIF EN SILICIUM
Classification
- CPC, 15
- H10P74/23
- B81B7/0012
- B81B2201/054
- B81B2201/058
- B81C99/0045
- B81C2203/038
- F16K99/0001
- F16K99/0015
- F16K99/0034
- F16K99/0036
- F16K99/0059
- F16K2099/0074
- H10P70/273
- H10P74/235
- H10P74/277
- IPC, 8
- H01L21 00
- H01L21 44
- B81B7 00
- B81C99 00
- F16K99 00
- H01L21 02
- H01L21 66
- H10W46 00
Designated states1
- Contracting states, 1
- United Kingdom