EP1559135A4

Heater module of rapid thermal processing apparatus

Abstract

This record has no abstract on file.

EP1559135A4, drawing sheet 1 — Sheet 1 of 7

Term

Term ended

Projected expiry passed 21 July 2023, 3.2 years ago.

7 sheets

Sheet 1
Sheet 2
Sheet 3
Sheet 4
Sheet 5
Sheet 6
Sheet 7

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
US3836751A	Cites	United States of America	–	Search report	–
US5156820A	Cites	United States of America	–	Search report	–
JPH0860371A	Cites	Japan	X	Search report	1-13
JPH10233370A	Cites	Japan	X	Search report	1-13
JP8060371A	Cites	Japan	–	–	–
JP10233370A	Cites	Japan	–	–	–
See also references of WO 2004040636A1	Non-patent	–	–	Search report	–

11 members in 6 offices

This recordMember, by publication datePriority claim

Priority claims3

Priority claims
Document	Office	Kind	Date
2002067387	Republic of Korea	–	2002-11-01
20020067387	Republic of Korea	A	2002-11-01
0301439	Republic of Korea	W	2003-07-21

Members11

Family members, oldest first
Document	Office	Kind
KR20020090987A	Republic of Korea	A	2002-12-05
KR100377011B1	Republic of Korea	B1	2003-03-19
WO2004040636A1	World Intellectual Property Organization (WIPO)	A1	2004-05-13
US2004125593A1	United States of America	A1	2004-07-01
US6837589B2	United States of America	B2	2005-01-04
EP1559135A1	European Patent Office (EPO)	A1	2005-08-03
CN1695236A	China	A	2005-11-09
JP2006505123A	Japan	A	2006-02-09
CN100342504C	China	C	2007-10-10
EP1559135A4This record	European Patent Office (EPO)	A4	2007-12-12
JP4141441B2	Japan	B2	2008-08-27

9 legal events, as the office reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code
2011-01-12	Application deemed to be withdrawnWithdrawn18D	18D
2010-12-10	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA	STAA
2010-02-17	First examination report despatched17Q	17Q
2007-12-12	Supplementary search report drawn up and despatchedA4	A4
2007-12-12	Information provided on ipc code assigned before grantRIC1	RIC1
2007-12-12	Information provided on ipc code assigned before grantRIC1	RIC1
2005-08-03	Request for examination filed17P	17P
2005-08-03	Designated contracting statesAK	AK
2005-06-17	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI