EP1547133A4

Mim capacitor structures and fabrication methods in dual-damascene structures

Abstract

This record has no abstract on file.

EP1547133A4, drawing sheet 1 — Sheet 1 of 6

Term

Term ended

Projected expiry passed 23 September 2023, 3 years ago.

6 sheets

Sheet 1
Sheet 2
Sheet 3
Sheet 4
Sheet 5
Sheet 6

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
EP1020905A1	Cites	European Patent Office (EPO)	XA	Search report	13-15,28
KR20020055887A	Cites	Republic of Korea	–	Search report	–
US2002185671A1	Cites	United States of America	–	Search report	–
US6271084B1	Cites	United States of America	–	Search report	–
US6320244B1	Cites	United States of America	–	Search report	–
US6436787B1	Cites	United States of America	–	Search report	–
EP1020905A	Cites	European Patent Office (EPO)	–	–	–
See also references of WO 2004027834A2	Non-patent	–	–	Search report	–

16 members in 7 offices

This recordMember, by publication datePriority claim

Priority claims3

Priority claims
Document	Office	Kind	Date
252476	United States of America	–	2002-09-23
25247602	United States of America	A	2002-09-23
0329942	United States of America	W	2003-09-23

Members16

Family members, oldest first
Document	Office	Kind
US2004056324A1	United States of America	A1	2004-03-25
WO2004027834A2	World Intellectual Property Organization (WIPO)	A2	2004-04-01
AU2003272647A1	Australia	A1	2004-04-08
AU2003272647A8	Australia	A8	2004-04-08
EP1408536A2	European Patent Office (EPO)	A2	2004-04-14
WO2004027834A3	World Intellectual Property Organization (WIPO)	A3	2004-07-01
US6794262B2	United States of America	B2	2004-09-21
KR20050053682A	Republic of Korea	A	2005-06-08
EP1547133A2	European Patent Office (EPO)	A2	2005-06-29
CN1685475A	China	A	2005-10-19
JP2006500772A	Japan	A	2006-01-05
CN100365765C	China	C	2008-01-30
KR100819150B1	Republic of Korea	B1	2008-04-02
EP1547133A4This record	European Patent Office (EPO)	A4	2008-11-26
JP4636598B2	Japan	B2	2011-02-23
EP1547133B1	European Patent Office (EPO)	B1	2013-04-03

62 legal events, as 8 offices reported them to INPADOC

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Events

Legal events, newest first
	Event	Code	Office
2020-10-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-09-02	Gb: european patent ceased through non-payment of renewal feeCeasedGBPC	GBPC	EP
2020-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-04-01	Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal feeWithdrawnR119	R119	DE
2018-11-30	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2018-10-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2015-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2015-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2015-06-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-08-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-07-02	Patent lapsedLapsedMM4A	MM4A	IE
2014-06-27	Notification of lapseLapsedST	ST	FR
2014-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-04-30	Patent ceasedCeasedPL	PL	CH
2014-04-17	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2014-03-12	No opposition filedOpposition26N	26N	EP
2014-02-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-02-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-02-07	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2014-02-07	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2014-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-11-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-11-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-09-18	Discontinued in the netherlands as no translation has been filedVDEP	VDEP	NL
2013-08-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-08-15	Deletion acc. to par. 5 (withdrawal of the translation of the ep patent)MK05	MK05	AT
2013-05-29	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2013-05-08	European patents granted designating irelandGrantedFG4D	FG4D	IE
2013-04-15	European patent takes effect as a national patent in ch/liEP	EP	CH
2013-04-15	Reference to at number (ep patent enters austrian national phase)REF	REF	AT
2013-04-03	Designated contracting statesAK	AK	EP
2013-04-03	European patent grantedGrantedFG4D	FG4D	GB
2013-03-01	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2013-02-25	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2012-12-04	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2012-06-27	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2012-06-27	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2012-05-24	Amendment of ipc main classPREVIOUS MAIN CLASS: H01L0021200000R079	R079	DE
2011-11-30	Title (correction)METHOD OF FORMING MIM CAPACITORS IN DUAL-DAMASCENE STRUCTURESRTI1	RTI1	EP
2009-03-11	First examination report despatched17Q	17Q	EP
2008-11-26	Supplementary search report drawn up and despatchedA4	A4	EP
2008-11-26	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2008-11-26	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2006-01-11	Request for extension of the european patent (deleted)DAX	DAX	EP
2005-06-29	Request for examination filed17P	17P	EP
2005-06-29	Designated contracting statesAK	AK	EP
2005-06-29	Request for extension of the european patentAX	AX	EP
2005-05-13	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP

Mim capacitor structures and fabrication methods in dual-damascene structures

Abstract

Term

Priority claims3

Members16

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Events

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Titles3

Classification

Designated states1