EP1543451A4

Method and system for context-specific mask writing

Abstract

This record has no abstract on file.

EP1543451A4, drawing sheet 1 — Sheet 1 of 6

Term

Term ended

Projected expiry passed 14 July 2023, 3.2 years ago.

6 sheets

Sheet 1
Sheet 2
Sheet 3
Sheet 4
Sheet 5
Sheet 6

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
WO0184237A2	Cites	World Intellectual Property Organization (WIPO)	X	Search report	1-36
WO0198830A2	Cites	World Intellectual Property Organization (WIPO)	X	Search report	1-36
WO0229491A1	Cites	World Intellectual Property Organization (WIPO)	X	Search report	1-36
US5792581A	Cites	United States of America	X	Search report	1-36
US5994009A	Cites	United States of America	X	Search report	1-36
US6180293B1	Cites	United States of America	X	Search report	1-36
OTTO O W ET AL: "INTEGRATING PROXIMITY EFFECTS CORRECTIONS WITH PHOTOMASK DATA PREPARATION", OPTICAL / LASER MICROLITHOGRAPHY 8. SANTA CLARA, FEB. 22 - 24, 1995; [PROCEEDINGS OF SPIE. OPTICAL / LASER MICROLITHOGRAPHY], BELLINGHAM, SPIE, US, vol. VOL. 2440, 22 February 1995 (1995-02-22), pages 184 - 191, XP000988729, ISBN: 978-0-8194-1788-6	Non-patent	–	–	Search report	–

13 members in 5 offices

This recordMember, by publication datePriority claim

Priority claims3

Priority claims
Document	Office	Kind	Date
395415P	United States of America	–	2002-07-12
39541502	United States of America	P	2002-07-12
0321996	United States of America	W	2003-07-14

Members13

Family members, oldest first
Document	Office	Kind
WO2004008246A2	World Intellectual Property Organization (WIPO)	A2	2004-01-22
AU2003256531A1	Australia	A1	2004-02-02
AU2003256531A8	Australia	A8	2004-02-02
US2004107412A1	United States of America	A1	2004-06-03
WO2004008246A3	World Intellectual Property Organization (WIPO)	A3	2004-07-15
EP1543451A2	European Patent Office (EPO)	A2	2005-06-22
US2005216877A1	United States of America	A1	2005-09-29
JP2005533283A	Japan	A	2005-11-04
US7249342B2	United States of America	B2	2007-07-24
US2007266364A1	United States of America	A1	2007-11-15
US7302672B2	United States of America	B2	2007-11-27
US7784016B2	United States of America	B2	2010-08-24
EP1543451A4This record	European Patent Office (EPO)	A4	2010-11-17

9 legal events, as the office reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code
2013-04-24	Application deemed to be withdrawnWithdrawn18D	18D
2013-03-22	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA	STAA
2011-03-16	First examination report despatched17Q	17Q
2010-11-17	Supplementary search report drawn up and despatchedA4	A4
2005-11-02	Request for extension of the european patent (deleted)DAX	DAX
2005-06-22	Request for examination filed17P	17P
2005-06-22	Designated contracting statesAK	AK
2005-06-22	Request for extension of the european patentAX	AX
2005-05-06	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI