EP1535313A4

Substrate processing apparatus

Abstract

This record has no abstract on file.

EP1535313A4, drawing sheet 1 — Sheet 1 of 33

Term

Term ended

Projected expiry passed 22 July 2023, 3.2 years ago.

33 sheets

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Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
US5417537A	Cites	United States of America	–	Search report	–
US5571325A	Cites	United States of America	–	Search report	–
US6271606B1	Cites	United States of America	–	Search report	–
JPH04275449A	Cites	Japan	A	Search report	1,10,20,40,43,55,63
JPH07176593A	Cites	Japan	YA	Search report	11,12,14,49,51,64,68
JPH07228344A	Cites	Japan	A	Search report	1,10,20,40,43,55,63
JPH08119409A	Cites	Japan	YA	Search report	9,17,18
JP8119409A	Cites	Japan	–	–	–
JP7176593A	Cites	Japan	–	–	–
JP4275449A	Cites	Japan	–	–	–
JP7228344A	Cites	Japan	–	–	–

61 members in 8 offices

This recordMember, by publication datePriority claim

Priority claims3

Priority claims
Document	Office	Kind	Date
397895P	United States of America	–	2002-07-22
39789502	United States of America	P	2002-07-22
0322881	United States of America	W	2003-07-22

Members61

Family members, oldest first
Document	Office	Kind
WO2004010476A2	World Intellectual Property Organization (WIPO)	A2	2004-01-29
AU2003259203A1	Australia	A1	2004-02-09
AU2003259203A8	Australia	A8	2004-02-09
TW200403183A	Taiwan Province of China	A	2004-03-01
WO2004010476A3	World Intellectual Property Organization (WIPO)	A3	2004-06-03
US2004151562A1	United States of America	A1	2004-08-05
KR20050035247A	Republic of Korea	A	2005-04-15
US2005105991A1	United States of America	A1	2005-05-19
EP1535313A2	European Patent Office (EPO)	A2	2005-06-01
JP2005534176A	Japan	A	2005-11-10
CN1759051A	China	A	2006-04-12
WO2006042273A1	World Intellectual Property Organization (WIPO)	A1	2006-04-20
US2006285945A1	United States of America	A1	2006-12-21
KR20070065423A	Republic of Korea	A	2007-06-22
EP1805792A1	European Patent Office (EPO)	A1	2007-07-11
US2007183871A1	United States of America	A1	2007-08-09
WO2007139896A2	World Intellectual Property Organization (WIPO)	A2	2007-12-06
CN101091241A	China	A	2007-12-19
WO2007139896A3	World Intellectual Property Organization (WIPO)	A3	2008-01-31
TW200818247A	Taiwan Province of China	A	2008-04-16
JP2008516457A	Japan	A	2008-05-15
TWI304391B	Taiwan Province of China	B	2008-12-21
KR20090025268A	Republic of Korea	A	2009-03-10
US2009162179A1	United States of America	A1	2009-06-25
EP1805792A4	European Patent Office (EPO)	A4	2009-07-08
US7575406B2	United States of America	B2	2009-08-18
JP2009538540A	Japan	A	2009-11-05
KR20100017469A	Republic of Korea	A	2010-02-16
KR100951680B1	Republic of Korea	B1	2010-04-07
EP1535313A4This record	European Patent Office (EPO)	A4	2010-05-26
WO2010077727A1	World Intellectual Property Organization (WIPO)	A1	2010-07-08
KR101028065B1	Republic of Korea	B1	2011-04-08
US7959395B2	United States of America	B2	2011-06-14
JP4712379B2	Japan	B2	2011-06-29
JP2011139086A	Japan	A	2011-07-14
US7988398B2	United States of America	B2	2011-08-02
CN101091241B	China	B	2011-08-03
KR20110098774A	Republic of Korea	A	2011-09-01
US2011232844A1	United States of America	A1	2011-09-29
US2011280693A1	United States of America	A1	2011-11-17
KR101110207B1	Republic of Korea	B1	2012-02-15
JP2012511812A	Japan	A	2012-05-24
JP5065900B2	Japan	B2	2012-11-07
US8371792B2	United States of America	B2	2013-02-12
US2013230369A1	United States of America	A1	2013-09-05
CN1759051B	China	B	2014-01-08
US8651789B2	United States of America	B2	2014-02-18
JP5492553B2	Japan	B2	2014-05-14
US2014161570A1	United States of America	A1	2014-06-12
KR101415708B1	Republic of Korea	B1	2014-07-04
JP5543934B2	Japan	B2	2014-07-09
US8827617B2	United States of America	B2	2014-09-09
US8960099B2	United States of America	B2	2015-02-24
JP2015043457A	Japan	A	2015-03-05
TWI486999B	Taiwan Province of China	B	2015-06-01
EP1805792B1	European Patent Office (EPO)	B1	2015-12-23
JP5941677B2	Japan	B2	2016-06-29
JP6017508B2	Japan	B2	2016-11-02
US9570330B2	United States of America	B2	2017-02-14
KR101729301B1	Republic of Korea	B1	2017-04-21
EP1535313B1	European Patent Office (EPO)	B1	2018-10-31

63 legal events, as 8 offices reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code	Office
2023-07-22	Expiry of rightR071	R071	DE
2023-06-21	Opt-out of the competence of the unified patent court (upc) registeredP01	P01	EP
2022-10-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2022-07-15	Change of applicant/patenteeR081	R081	DE
2022-07-13	Change of applicant/patenteeR081	R081	DE
2021-07-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2021-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-06-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-05-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-05-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-05-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-05-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-05-01	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-04-16	Lapsed because of non-payment of the annual feeLapsedMM	MM	BE
2020-03-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-03-25	Gb: european patent ceased through non-payment of renewal feeCeasedGBPC	GBPC	EP
2020-02-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-02-28	Patent ceasedCeasedPL	PL	CH
2019-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-10-09	No opposition filedOpposition26N	26N	EP
2019-09-06	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2019-09-06	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2019-08-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-08-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-08-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-08-01	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2019-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-04-15	Deletion acc. to par. 5 (withdrawal of the translation of the ep patent)MK05	MK05	AT
2019-03-06	Patent invalid in the netherlands as no translation has been filedMP	MP	NL
2018-11-29	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2018-11-28	European patents granted designating irelandGrantedFG4D	FG4D	IE
2018-11-15	Reference to at number (ep patent validated in austria)REF	REF	AT
2018-10-31	Designated contracting statesAK	AK	EP
2018-10-31	European patent takes effect as a national patent in ch/liEP	EP	CH
2018-10-31	European patent grantedGrantedFG4D	FG4D	GB
2018-10-22	Change of applicant/patenteeR081	R081	DE
2018-09-28	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2018-09-28	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE PATENT HAS BEEN GRANTEDSTAA	STAA	EP
2018-09-26	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2018-06-13	Intention to grant announcedINTG	INTG	EP
2018-05-14	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2018-05-14	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: GRANT OF PATENT IS INTENDEDSTAA	STAA	EP
2018-05-02	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2018-05-02	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2018-03-29	Amendment of ipc main classPREVIOUS MAIN CLASS: H01L0021000000R079	R079	DE
2010-10-13	First examination report despatched17Q	17Q	EP
2010-05-26	Supplementary search report drawn up and despatchedA4	A4	EP
2005-11-09	Request for extension of the european patent (deleted)DAX	DAX	EP
2005-06-01	Request for examination filed17P	17P	EP
2005-06-01	Designated contracting statesAK	AK	EP
2005-06-01	Request for extension of the european patentAX	AX	EP
2005-04-15	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP

Substrate processing apparatus

Abstract

Term

Priority claims3

Members61

Over the term

Events

Numbers

Titles3

Classification

Designated states1