EP1535143A4
Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 20 March 2023, 3.5 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
7 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| WO0033355A2 | Cites | World Intellectual Property Organization (WIPO) | – | Search report | – |
| JP2000255710A | Cites | Japan | – | Examiner | – |
| DE3825401A1 | Cites | Germany | – | Search report | – |
| US6134482A | Cites | United States of America | – | Search report | – |
| JPH09315521A | Cites | Japan | X | Search report | 1-7,13-16,19-20,25-26 |
| JP9315521A | Cites | Japan | – | – | – |
| See also references of WO 2004001582A1 | Non-patent | – | – | Examiner | – |
84 members in 8 offices
Priority claims5
| Document | Office | Kind | Date |
|---|---|---|---|
| 389993P | United States of America | – | |
| 38999302 | United States of America | P | |
| 417993P | United States of America | – | |
| 41799302 | United States of America | P | |
| 0308528 | United States of America | W |
Members84
| Document | Office | Kind | |
|---|---|---|---|
| US2003235486A1 | United States of America | A1 | |
| WO2004001582A1 | World Intellectual Property Organization (WIPO) | A1 | |
| TW200403181A | Taiwan Province of China | A | |
| WO2004034438A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU2003284051A1 | Australia | A1 | |
| AU2003284051A8 | Australia | A8 | |
| US2004126208A1 | United States of America | A1 | |
| TW200415095A | Taiwan Province of China | A | |
| KR20050010944A | Republic of Korea | A | |
| EP1535143A1 | European Patent Office (EPO) | A1 | |
| KR20050072758A | Republic of Korea | A | |
| CN1662874A | China | A | |
| EP1573778A2 | European Patent Office (EPO) | A2 | |
| JP2005530361A | Japan | A | |
| WO2004034438A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1573778A3 | European Patent Office (EPO) | A3 | |
| JP2006515256A | Japan | A | |
| CN1849251A | China | A | |
| US7165927B2 | United States of America | B2 | |
| US2007092359A1 | United States of America | A1 | |
| US2007110547A1 | United States of America | A1 | |
| TWI286989B | Taiwan Province of China | B | |
| WO2008048483A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO2008048483A3 | World Intellectual Property Organization (WIPO) | A3 | |
| KR20080089666A | Republic of Korea | A | |
| TWI302902B | Taiwan Province of China | B | |
| TW200902403A | Taiwan Province of China | A | |
| KR100880291B1 | Republic of Korea | B1 | |
| KR100882376B1 | Republic of Korea | B1 | |
| CN100520706C | China | C | |
| CN101648642A | China | A | |
| JP2010507229A | Japan | A | |
| KR20100040746A | Republic of Korea | A | |
| EP1535143A4This record | European Patent Office (EPO) | A4 | |
| US2010174405A1 | United States of America | A1 | |
| US7771153B2 | United States of America | B2 | |
| JP4626302B2 | Japan | B2 | |
| JP2011166176A | Japan | A | |
| EP1573778A4 | European Patent Office (EPO) | A4 | |
| JP4831521B2 | Japan | B2 | |
| JP2012015565A | Japan | A | |
| KR20120026129A | Republic of Korea | A | |
| CN1849251B | China | B | |
| CN101648642B | China | B | |
| US8197172B2 | United States of America | B2 | |
| KR20120112800A | Republic of Korea | A | |
| US2012288348A1 | United States of America | A1 | |
| JP2013051447A | Japan | A | |
| KR20130049838A | Republic of Korea | A | |
| EP1573778B1 | European Patent Office (EPO) | B1 | |
| KR20130061774A | Republic of Korea | A | |
| EP2615625A1 | European Patent Office (EPO) | A1 | |
| KR101323337B1 | Republic of Korea | B1 | |
| JP5333997B2 | Japan | B2 | |
| KR20130139383A | Republic of Korea | A | |
| JP5435414B2 | Japan | B2 | |
| JP2014064045A | Japan | A | |
| EP2615625B1 | European Patent Office (EPO) | B1 | |
| US2014119857A1 | United States of America | A1 | |
| KR20140076639A | Republic of Korea | A | |
| KR20140085603A | Republic of Korea | A | |
| KR101446511B1 | Republic of Korea | B1 | |
| EP2790210A2 | European Patent Office (EPO) | A2 | |
| KR101458520B1 | Republic of Korea | B1 | |
| KR101475662B1 | Republic of Korea | B1 | |
| EP2790210A3 | European Patent Office (EPO) | A3 | |
| KR101510614B1 | Republic of Korea | B1 | |
| JP2015079997A | Japan | A | |
| KR101515775B1 | Republic of Korea | B1 | |
| KR101544699B1 | Republic of Korea | B1 | |
| JP5796886B2 | Japan | B2 | |
| JP5796892B2 | Japan | B2 | |
| US2015303087A1 | United States of America | A1 | |
| US2015303088A1 | United States of America | A1 | |
| US2015303089A1 | United States of America | A1 | |
| JP5892479B2 | Japan | B2 | |
| US9620397B2 | United States of America | B2 | |
| EP2615625B2 | European Patent Office (EPO) | B2 | |
| JP6256706B2 | Japan | B2 | |
| US9881823B2 | United States of America | B2 | |
| US10141212B2 | United States of America | B2 | |
| US10147627B2 | United States of America | B2 | |
| US10381251B2 | United States of America | B2 | |
| US10957569B2 | United States of America | B2 |
9 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application withdrawnWithdrawn18W | 18W | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION HAS BEEN WITHDRAWNSTAA | STAA | |
| First examination report despatched17Q | 17Q | |
| Party data changed (applicant data changed or rights of an application transferred)RAP1 | RAP1 | |
| Supplementary search report drawn up and despatchedA4 | A4 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1535143
- Application
- 37610128
Titles3
- German
- AUTOMATISIERTES MATERIALHANDHABUNGSSYSTEM ZUR HALBLEITERHERSTELLUNG AUF DER BASIS EINER KOMBINATION VERTIKALER KAROUSSELLS UND OVERHEAD-HEBEZEUGEN
- English
- AUTOMATED MATERIAL HANDLING SYSTEM FOR SEMICONDUCTOR MANUFACTURING BASED ON A COMBINATION OF VERTICAL CAROUSELS AND OVERHEAD HOISTS
- French
- SYSTEME DE MANUTENTION AUTOMATISEE DE MATERIAUX DESTINE A LA MANUTENTION DE SEMI-CONDUCTEURS, UTILISANT UNE COMBINAISON DE CARROUSELS VERTICAUX ET DE PALANS AERIENS
Classification
- CPC, 6
- H10P72/3221
- H10P72/50
- H10P72/3222
- H10P72/3404
- G06F7/00
- B65G1/0457
- IPC, 4
- H01L21 00
- B65G1 00
- B65G1 127
- H01L21 677
Designated states27
- Contracting states, 27
- Austria
- Belgium
- Bulgaria
- Switzerland
- Cyprus
- Czechia
- Germany
- Denmark
- Estonia
- Spain
- Finland
- France
- United Kingdom
- Greece
- Hungary
- Ireland
- Italy
- Liechtenstein
- Luxembourg
- Monaco
- Netherlands (Kingdom of the)
- Portugal
- Romania
- Sweden
and 3 moreShow fewer
- Slovenia
- Slovakia
- Türkiye