EP1534874A4

Continuous chemical vapor deposition process and process furnace

Abstract

This record has no abstract on file.

EP1534874A4, drawing sheet 1
Sheet 1 of 2

Term

Term ended

Projected expiry passed 17 July 2023, 3.2 years ago.

  1. Priority
  2. Filed
  3. Published
  4. Projected expiry
  5. Today

2 sheets

  1. Sheet 1
  2. Sheet 2