Semiconductor device with multi-layered wiring arrangement including reinforcing patterns, and production method for manufacturing such semiconductor device
Abstract
A semiconductor device includes a semiconductor substrate (10) having electronic elements produced therein, and an insulating underlayer (14) formed thereon, and a multi-layered wiring arrangement constructed on the insulating underlayer semiconductor substrate. The multi-layered wiring arrangement includes a first insulating interlayer structure (16) formed on the insulating underlayer, a second insulating interlayer structure (30), and a third insulating interlayer structure (44) formed on the first insulating interlayer structure. Each of the first, second and third insulating interlayer structures includes a low-k insulating layer (16B, 30B, 44B), and has a reinforcing element (28, 48) formed therein. The second insulating interlayer structure has a joint plug (30C) formed therein. The reinforcing elements of the first and third insulating interlayer structures are connected to each other through the joint plug.

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Projected expiry passed 5 November 2024, 1.9 years ago.
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1 sheet
Sheet 1
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| US2002017672A1 | Cites | United States of America | A | Search report | 1,15,17 |
| US2002179991A1 | Cites | United States of America | AD | Search report | 1,15,17 |
| US6100589A | Cites | United States of America | X | Search report | 1,4,5,13-17 |
| US6198170B1 | Cites | United States of America | A | Search report | 1,15,17 |
| US6297563B1 | Cites | United States of America | X | Search report | 1,3 |
| US6492735B1 | Cites | United States of America | X | Search report | 1-17 |
9 members in 4 offices; this record represents the family
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 2003377040 | Japan | – | |
| 2003377040 | Japan | A |
Members9
| Document | Office | Kind | |
|---|---|---|---|
| CN1614775A | China | A | |
| EP1530236A2 | European Patent Office (EPO) | A2 | |
| US2005101117A1 | United States of America | A1 | |
| JP2005142351A | Japan | A | |
| EP1530236A3This record | European Patent Office (EPO) | A3 | |
| US7199042B2 | United States of America | B2 | |
| CN100388476C | China | C | |
| CN101256988A | China | A | |
| CN101256988B | China | B |
11 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application deemed to be withdrawnWithdrawn18D | 18D | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | |
| First examination report despatched17Q | 17Q | |
| Designation fees paidAKX | AKX | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1530236
- Application
- 40263154
Titles3
- German
- Halbleiteranordnung mit einer Mehrschicht-Leiterstruktur und mit Verstärkungsmustern, und Herstellungsverfahren der Halbleiteranordnung
- English
- Semiconductor device with multi-layered wiring arrangement including reinforcing patterns, and production method for manufacturing such semiconductor device
- French
- Dispositif semi-conducteur avec une structure conductrice multi-couche comportant des motifs de renforcement, et méthode de production pour la fabrication d'un tel dispositif semi-conducteur
Classification
- CPC, 5
- H10W42/00
- H10W20/084
- H10W20/075
- H10W20/40
- H10W20/47
- IPC, 6
- H01L23 498
- H01L23 00
- H01L23 52
- H01L23 522
- H01L23 532
- H10P14 40
Designated states2
- Contracting states, 1
- Türkiye
- Extension states, 1
- Yugoslavia, later Serbia and Montenegro (until 2006)