EP1528433A3

Lithographic apparatus

Abstract

Liquid is supplied to a reservoir (10) between the final element of the projection system (PS) and the substrate by an inlet (21,22). An overflow removes the liquid above a given level. The overflow is arranged above the inlet and thus the liquid is constantly refreshed and the pressure in the liquid remains substantially constant.

EP1528433A3, drawing sheet 1 — Sheet 1 of 1

Term

Term ended

Projected expiry passed 26 October 2024, 1.9 years ago.

Parties

Owner: ASML Netherlands B.V.
Inventors: Hoogendam, Christiaan Alexander, 5509 NC Veldhoven, Netherlands (Kingdom of the)
Streefkerk, Bob, 5038 PE Tilburg, Netherlands (Kingdom of the)
Mulkens, Johannes Catharinus Hubertus, 5581 AB Waalre, Netherlands (Kingdom of the)
Bijlaart, Erik Theodorus Maria, 5247 XM Rosmalen, Netherlands (Kingdom of the)
and 6 more inventorsShow fewer
Kolesnychenko, Aleksey Yurievich, 5701 EE Helmond, Netherlands (Kingdom of the)
Loopstra, Erik Roelof, 5591 BA Heeze, Netherlands (Kingdom of the)
Mertens, J.J.S.M., 5525 BC Duizel, Netherlands (Kingdom of the)
Slaghekke, Bernardus Antonius, 5502 PB Veldhhoven, Netherlands (Kingdom of the)
Tinnemans, P.A.J., 5527 GR Hapert, Netherlands (Kingdom of the)
Van Santen, Helmar, 1018 BB Amsterdam, Netherlands (Kingdom of the)

Examination

Agent: Leeming, John Gerard

Reach

Cites: 9 earlier patents, 2 other works⁠
Family: 39 members in 6 offices⁠US18JP8EP7CN2KR2TW2

Classification

CPC: G03F7/70808G03F7/70341G03F7/70866
IPC: B05C11 00G03B27 42G03F7 20G03B27 52H01L21 00H01L21 027

1 sheet

Sheet 1

Every citation, both waysCites: the store holds 8 of 9

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
EP0605103A1	Cites	European Patent Office (EPO)	X	Search report	15-18,20,26,27
EP0834773A2	Cites	European Patent Office (EPO)	XA	Search report	1,3-8,11,12
EP1420302A1	Cites	European Patent Office (EPO)	PX	Search report	1,11,12
EP1482372A1	Cites	European Patent Office (EPO)	E	Search report	26,27,29
EP1494079A1	Cites	European Patent Office (EPO)	E	Search report	15-20,26,27,29
WO2004055803A1	Cites	World Intellectual Property Organization (WIPO)	PX	Search report	1
WO2005015315A2	Cites	World Intellectual Property Organization (WIPO)	E	Search report	26,29
WO9949504A1	Cites	World Intellectual Property Organization (WIPO)	DXA	Search report	1,3-8,11,12
PATENT ABSTRACTS OF JAPAN vol. 0124, no. 20 (E - 679) 8 November 1988 (1988-11-08)	Non-patent	–	–	Search report	–
PATENT ABSTRACTS OF JAPAN vol. 2003, no. 12 5 December 2003 (2003-12-05)	Non-patent	–	–	Search report	–

39 members in 6 offices

This recordMember, by publication datePriority claim

Priority claims6

Priority claims
Document	Office	Kind	Date
03256820	European Patent Office (EPO)	A	2003-10-28
03256820	European Patent Office (EPO)	–	2003-10-28
04256585	European Patent Office (EPO)	A	2004-10-26
03256820	–	–	–
EP20030256820	–	–	–
EP20040256585	–	–	–

Members39

Family members, oldest first
Document	Office	Kind
KR20050040764A	Republic of Korea	A	2005-05-03
CN1612053A	China	A	2005-05-04
EP1528433A2	European Patent Office (EPO)	A2	2005-05-04
EP1528433A3This record	European Patent Office (EPO)	A3	2005-05-18
JP2005167211A	Japan	A	2005-06-23
TW200525290A	Taiwan Province of China	A	2005-08-01
US2005263068A1	United States of America	A1	2005-12-01
TWI263116B	Taiwan Province of China	B	2006-10-01
KR100733124B1	Republic of Korea	B1	2007-06-27
US7411653B2	United States of America	B2	2008-08-12
JP2008199069A	Japan	A	2008-08-28
JP4174043B2	Japan	B2	2008-10-29
US2008278696A1	United States of America	A1	2008-11-13
CN100480861C	China	C	2009-04-22
JP2009182359A	Japan	A	2009-08-13
JP4347398B2	Japan	B2	2009-10-21
JP2010206225A	Japan	A	2010-09-16
EP2267536A1	European Patent Office (EPO)	A1	2010-12-29
EP2267537A1	European Patent Office (EPO)	A1	2010-12-29
US7868998B2	United States of America	B2	2011-01-11
US2011090473A1	United States of America	A1	2011-04-21
US2011157570A1	United States of America	A1	2011-06-30
JP4838333B2	Japan	B2	2011-12-14
US2012013869A1	United States of America	A1	2012-01-19
US2012257178A1	United States of America	A1	2012-10-11
JP5216812B2	Japan	B2	2013-06-19
US8542343B2	United States of America	B2	2013-09-24
US8542344B2	United States of America	B2	2013-09-24
US8638418B2	United States of America	B2	2014-01-28
US8860923B2	United States of America	B2	2014-10-14
US2014375972A1	United States of America	A1	2014-12-25
US9482962B2	United States of America	B2	2016-11-01
US2017045830A1	United States of America	A1	2017-02-16
EP2267536B1	European Patent Office (EPO)	B1	2017-04-19
EP2267537B1	European Patent Office (EPO)	B1	2017-09-13
EP1528433B1	European Patent Office (EPO)	B1	2019-03-06
US10248034B2	United States of America	B2	2019-04-02
US2019227444A1	United States of America	A1	2019-07-25
US10527955B2	United States of America	B2	2020-01-07

29 legal events, as 4 offices reported them to INPADOC

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Events

Legal events, newest first
	Event	Code	Office
2024-10-26	Expiry of rightR071	R071	DE
2024-01-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2023-06-14	Opt-out of the competence of the unified patent court (upc) registeredP01	P01	EP
2020-10-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-10-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-09-02	Gb: european patent ceased through non-payment of renewal feeCeasedGBPC	GBPC	EP
2020-02-12	No opposition filedOpposition26N	26N	EP
2020-01-10	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2020-01-10	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2019-12-09	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2019-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-08-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-07-10	Patent invalid in the netherlands as no translation has been filedMP	MP	NL
2019-03-28	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2019-03-06	Designated contracting statesAK	AK	EP
2019-03-06	European patent grantedGrantedFG4D	FG4D	GB
2019-02-13	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2019-02-01	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2019-01-29	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2018-11-28	Intention to grant announcedINTG	INTG	EP
2018-11-04	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2006-02-08	Designation fees paidAKX	AKX	EP
2005-12-14	Request for examination filed17P	17P	EP
2005-05-18	Designated contracting statesAK	AK	EP
2005-05-18	Request for extension of the european patentAX	AX	EP
2005-05-04	Designated contracting statesAK	AK	EP
2005-05-04	Request for extension of the european patentAX	AX	EP
2005-04-01	Search report despatchedORIGINAL CODE: 0009013PUAL	PUAL	EP
2005-03-18	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP