EP1522090A4
Thermal processing system and configurable vertical chamber
18 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7 Sheet 8 Sheet 9 Sheet 10 Sheet 11 Sheet 12 Sheet 13 Sheet 14 Sheet 15 Sheet 16 Sheet 17 Sheet 18
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| EP0164928A2 | Cites | European Patent Office (EPO) | X | Search report | 28 |
| EP0308946A2 | Cites | European Patent Office (EPO) | X | Search report | 23,25,27-29 |
| EP0385382A2 | Cites | European Patent Office (EPO) | A | Search report | 1-7 |
| EP0603391A1 | Cites | European Patent Office (EPO) | A | Search report | 1-7 |
| US2001047764A1 | Cites | United States of America | – | Search report | – |
| US2003186517A1 | Cites | United States of America | – | Search report | – |
| US4401689A | Cites | United States of America | – | Search report | – |
| US4745088A | Cites | United States of America | – | Search report | – |
| US4989540A | Cites | United States of America | – | Search report | – |
| US5127365A | Cites | United States of America | – | Search report | – |
| US5246500A | Cites | United States of America | – | Search report | – |
| US5383984A | Cites | United States of America | – | Search report | – |
| US5498292A | Cites | United States of America | – | Search report | – |
| US5618349A | Cites | United States of America | – | Search report | – |
| US5654230A | Cites | United States of America | – | Search report | – |
| US5709543A | Cites | United States of America | – | Search report | – |
| US6204194B1 | Cites | United States of America | – | Search report | – |
| WO9936587A1 | Cites | World Intellectual Property Organization (WIPO) | X | Search report | 28 |
| EP0603391A | Cites | European Patent Office (EPO) | – | – | – |
| EP0385382A | Cites | European Patent Office (EPO) | – | – | – |
| EP0308946A | Cites | European Patent Office (EPO) | – | – | – |
| EP0164928A | Cites | European Patent Office (EPO) | – | – | – |
| WO9936587A | Cites | World Intellectual Property Organization (WIPO) | – | – | – |
| PATENT ABSTRACTS OF JAPAN vol. 1997, no. 10 31 October 1997 (1997-10-31) | Non-patent | – | – | Search report | – |
| PATENT ABSTRACTS OF JAPAN vol. 2000, no. 14 5 March 2001 (2001-03-05) | Non-patent | – | – | Search report | – |
50 members in 7 offices
Priority claims14
| Document | Office | Kind | Date |
|---|---|---|---|
| 396536P | United States of America | – | |
| 39653602 | United States of America | P | |
| 39653602 | United States of America | P | |
| 428526P | United States of America | – | |
| 42852602 | United States of America | P | |
| 42852602 | United States of America | P | |
| 0321575 | United States of America | W | |
| 0321575 | United States of America | W | |
| 396536P | – | – | – |
| 428526P | – | – | – |
| US20020396536P | – | – | – |
| US20020428526P | – | – | – |
| US2003021575 | – | – | – |
| WO2003US21575 | – | – | – |
Members50
| Document | Office | Kind | |
|---|---|---|---|
| WO2004007105A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2004007318A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO2004007800A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2004008008A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO2004008052A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO2004008054A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2004008491A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO2004008493A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO2004008494A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU2003249028A1 | Australia | A1 | |
| AU2003249029A1 | Australia | A1 | |
| AU2003249029A8 | Australia | A8 | |
| AU2003249030A1 | Australia | A1 | |
| AU2003249030A8 | Australia | A8 | |
| AU2003253873A1 | Australia | A1 | |
| AU2003253874A1 | Australia | A1 | |
| AU2003253874A8 | Australia | A8 | |
| AU2003253907A1 | Australia | A1 | |
| AU2003253907A8 | Australia | A8 | |
| AU2003256486A1 | Australia | A1 | |
| AU2003256486A8 | Australia | A8 | |
| AU2003256487A1 | Australia | A1 | |
| AU2003259104A1 | Australia | A1 | |
| AU2003259104A8 | Australia | A8 | |
| TW200405401A | Taiwan Province of China | A | |
| TW200406818A | Taiwan Province of China | A | |
| WO2004008052A3 | World Intellectual Property Organization (WIPO) | A3 | |
| WO2004008493A3 | World Intellectual Property Organization (WIPO) | A3 | |
| TW200409176A | Taiwan Province of China | A | |
| WO2004008491A3 | World Intellectual Property Organization (WIPO) | A3 | |
| TW200411717A | Taiwan Province of China | A | |
| TW200411960A | Taiwan Province of China | A | |
| WO2004008493A9 | World Intellectual Property Organization (WIPO) | A9 | |
| WO2004007318A3 | World Intellectual Property Organization (WIPO) | A3 | |
| TW200416773A | Taiwan Province of China | A | |
| TW200416774A | Taiwan Province of China | A | |
| TW200416775A | Taiwan Province of China | A | |
| TW200419890A | Taiwan Province of China | A | |
| WO2004008008A3 | World Intellectual Property Organization (WIPO) | A3 | |
| WO2004007800A9 | World Intellectual Property Organization (WIPO) | A9 | |
| WO2004008054A9 | World Intellectual Property Organization (WIPO) | A9 | |
| EP1522090A2 | European Patent Office (EPO) | A2 | |
| WO2004008494A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1540258A1 | European Patent Office (EPO) | A1 | |
| CN1643322A | China | A | |
| JP2005533232A | Japan | A | |
| JP2005533378A | Japan | A | |
| EP1522090A4This record | European Patent Office (EPO) | A4 | |
| US2006083495A1 | United States of America | A1 | |
| US2007243317A1 | United States of America | A1 |
24 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application deemed to be withdrawnWithdrawn18D | 18D | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | |
| First examination report despatched17Q | 17Q | |
| First examination report despatched17Q | 17Q | |
| Supplementary search report drawn up and despatchedA4 | A4 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Request for extension of the european patent (deleted)DAX | DAX | |
| Designated contracting states (corrected)RBV | RBV | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1522090
- Publication, DOCDB
- 1522090
- Publication, EPODOC
- EP1522090
- Application
- 3764437
- Application, DOCDB
- 03764437
- Application, EPODOC
- EP20030764437
Titles3
- German
- THERMISCHES VERARBEITUNGSSYSTEM UND KONFIGURIERBARE VERTIKALKAMMER
- English
- THERMAL PROCESSING SYSTEM AND CONFIGURABLE VERTICAL CHAMBER
- French
- SYSTEME DE TRAITEMENT THERMIQUE ET CHAMBRE VERTICALE CONFIGURABLE
Classification
- CPC, 10
- C23C16/46
- C23C16/4401
- C23C16/4409
- C23C16/4412
- C23C16/45578
- C23C16/54
- H10P72/0402
- H10P72/0434
- H10P72/3406
- H10P72/3408
- IPC, 21
- F27B5 14
- F27D11 00
- C23C16 00
- C23F1 02
- F26B19 00
- F26B3 30
- H01L21 00
- H01L21 22
- C23C16 44
- C23C16 455
- C23C16 46
- C23C16 54
- F27B5 18
- F27D11 02
- H01L21 02
- H01L21 205
- H01L21 324
- H01L21 677
- H05B3 00
- H05B3 06
- H05B3 66
Designated states1
- Contracting states, 1
- Netherlands (Kingdom of the)
