Method of making a high-voltage field-effect transistor
Abstract
A lateral, high-voltage, FET having a low on-resistance and a buried conduction layer comprises a P-type buried layer region within an N-well formed in a P-type substrate. The P-type buried layer region is connected to a drain electrode by a first P-type drain diffusion region that is disposed in the N-well region. The P-type buried layer region is also connected to a second P-type drain diffusion region that extends down from the surface at one end of the PMOS gate region. A P-type source diffusion region, which connects to the source electrode, defines the other end of the gate region.

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Projected expiry passed 24 January 2022, 4.7 years ago.
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1 sheet
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Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| WO0046851A1 | Cites | World Intellectual Property Organization (WIPO) | DA | Search report | 1-22 |
| EP0114435A1 | Cites | European Patent Office (EPO) | X | Search report | 1-22 |
| GB2309336A | Cites | United Kingdom | X | Search report | 1-22 |
29 members in 3 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 769649 | United States of America | – | |
| 76964901 | United States of America | A | |
| 02250483 | European Patent Office (EPO) | A |
Members29
| Document | Office | Kind | |
|---|---|---|---|
| US6424007B1 | United States of America | B1 | |
| US2002096691A1 | United States of America | A1 | |
| EP1227523A2 | European Patent Office (EPO) | A2 | |
| US6465291B1 | United States of America | B1 | |
| US2002149052A1 | United States of America | A1 | |
| US2002153560A1 | United States of America | A1 | |
| US2002153561A1 | United States of America | A1 | |
| JP2002319675A | Japan | A | |
| US6501130B2 | United States of America | B2 | |
| US6504209B2 | United States of America | B2 | |
| US2003062548A1 | United States of America | A1 | |
| US6563171B2 | United States of America | B2 | |
| US2003178646A1 | United States of America | A1 | |
| US2004036115A1 | United States of America | A1 | |
| US6730585B2 | United States of America | B2 | |
| US6818490B2 | United States of America | B2 | |
| JP2005026710A | Japan | A | |
| JP2005026711A | Japan | A | |
| EP1521298A2 | European Patent Office (EPO) | A2 | |
| EP1524701A2 | European Patent Office (EPO) | A2 | |
| JP2006019759A | Japan | A | |
| EP1227523A3 | European Patent Office (EPO) | A3 | |
| EP1521298A3This record | European Patent Office (EPO) | A3 | |
| EP1524701A3 | European Patent Office (EPO) | A3 | |
| JP2010103557A | Japan | A | |
| JP4512459B2 | Japan | B2 | |
| JP4512460B2 | Japan | B2 | |
| JP4512534B2 | Japan | B2 | |
| JP4663028B2 | Japan | B2 |
20 legal events, as the office reported them to INPADOC
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| Application deemed to be withdrawnWithdrawn18D | 18D | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | |
| First examination report despatched17Q | 17Q | |
| Designation fees paidAKX | AKX | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
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| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | |
| Party data changed (applicant data changed or rights of an application transferred)RAP3 | RAP3 | |
| Divisional application: reference to earlier applicationAC | AC | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1521298
- Application
- 40299596
Titles3
- German
- Verfahren zur Herstellung eines Hochspannungsfeldeffekttransistors
- English
- Method of making a high-voltage field-effect transistor
- French
- Méthode de fabrication d'un transistor à effet de champ à haute tension
Classification
- CPC, 11
- H10D62/151
- H10D84/0133
- H10D84/038
- H10D84/013
- H10D84/0172
- H10D84/017
- H10D84/85
- H10D62/111
- H10D64/111
- H10D30/0221
- H10D30/603
- IPC, 11
- H01L29 78
- H01L29 06
- H01L29 08
- H01L27 092
- H01L21 336
- H01L21 8238
- H01L29 40
- H01L21 337
- H01L21 8234
- H01L29 417
- H01L29 808
Designated states26
- Contracting states, 20
- Austria
- Belgium
- Switzerland
- Cyprus
- Germany
- Denmark
- Spain
- Finland
- France
- United Kingdom
- Greece
- Ireland
- Italy
- Liechtenstein
- Luxembourg
- Monaco
- Netherlands (Kingdom of the)
- Portugal
- Sweden
- Türkiye
- Extension states, 6
- Albania
- Lithuania
- Latvia
- North Macedonia
- Romania
- Slovenia