EP1510871A3

Lithographic apparatus and device manufacturing method

Abstract

A lithographic projection apparatus is disclosed for use with an immersion liquid positioned between the final element of the projection system and the substrate W. Several methods are disclosed for protecting components of the projection system, substrate table and a liquid confinement system. These include providing a protective coating (40) on the final element (20) of the projection system as well as providing sacrificial bodies upstream of the components. A two component final optical element of CaF2 is also disclosed.

EP1510871A3, drawing sheet 1 — Sheet 1 of 1

Term

Term ended

Projected expiry passed 17 August 2024, 2.1 years ago.

Parties

Owner: ASML Netherlands B.V.
Inventors: Loopstra, Erik Roelof, 5592 BA Heeze, Netherlands (Kingdom of the)
Dierichs, Marcel Mathijs Theodore Marie, 5914 WR Venlo, Netherlands (Kingdom of the)
Jasper, Johannes Christian Maria, 5507 RD Veldhoven, Netherlands (Kingdom of the)
Meijer, Hendricus Johanne Maria, 5506 CA Veldhoven, Netherlands (Kingdom of the)
and 5 more inventorsShow fewer
Mickan, Uwe, 5508 AJ Veldhoven, Netherlands (Kingdom of the)
Lipson, Matthew, Stamford, CT 06907, United States of America
Mulkens, Johannes Catharinus Hubertus, 5581 AB Waalre, Netherlands (Kingdom of the)
Uitterdijk, Tammo, 3732 GJ De Bilt, Netherlands (Kingdom of the)
Baselmans, Johannes Jacobus Matheus, 5688 GG Oirschot, Netherlands (Kingdom of the)

Examination

Agent: Leeming, John Gerard

Reach

Cites: 13 earlier patents⁠
Family: 42 members in 7 offices⁠US17JP10EP6SG3CN2KR2TW2

Classification

CPC: G03F7/70966G03F7/70341G03F7/70958G03F7/70983Y10S430/162
IPC: H01L21 027G02B1 10G03F7 20

1 sheet

Sheet 1

Every citation, both waysCites: the store holds 12 of 13

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
WO02093209A2	Cites	World Intellectual Property Organization (WIPO)	Y	Search report	20-22,24
WO03077034A2	Cites	World Intellectual Property Organization (WIPO)	PX	Search report	1,29
EP0605103A1	Cites	European Patent Office (EPO)	XY	Search report	1,29
EP1316849A2	Cites	European Patent Office (EPO)	Y	Search report	2-4
EP1420302A1	Cites	European Patent Office (EPO)	PX	Search report	14,15,17,18,30
EP1429190A2	Cites	European Patent Office (EPO)	PX	Search report	1,18,29
US2002163629A1	Cites	United States of America	Y	Search report	20-22,24
US2003137733A1	Cites	United States of America	A	Search report	21
WO2004053956A1	Cites	World Intellectual Property Organization (WIPO)	PX	Search report	1,29
WO2004053959A1	Cites	World Intellectual Property Organization (WIPO)	PX	Search report	1,29
DD224448A1	Cites	German Democratic Republic (until 1990)	X	Search report	14-17,30
US6466365B1	Cites	United States of America	A	Search report	1,4,5,8,11

42 members in 7 offices

This recordMember, by publication datePriority claim

Priority claims10

Priority claims
Document	Office	Kind	Date
03255377	European Patent Office (EPO)	A	2003-08-29
03255377	European Patent Office (EPO)	A	2003-08-29
03255377	European Patent Office (EPO)	–	2003-08-29
69801203	United States of America	A	2003-10-31
69801203	United States of America	A	2003-10-31
04254940	European Patent Office (EPO)	A	2004-08-17
03255377	–	–	–
EP20030255377	–	–	–
EP20040254940	–	–	–
US20030698012	–	–	–

Members42

Family members, oldest first
Document	Office	Kind
EP1510871A2	European Patent Office (EPO)	A2	2005-03-02
KR20050021872A	Republic of Korea	A	2005-03-07
CN1591197A	China	A	2005-03-09
JP2005079589A	Japan	A	2005-03-24
SG109610A1	Singapore	A1	2005-03-30
EP1510871A3This record	European Patent Office (EPO)	A3	2005-04-06
JP2005093997A	Japan	A	2005-04-07
US2005094116A1	United States of America	A1	2005-05-05
US2005094119A1	United States of America	A1	2005-05-05
TW200519529A	Taiwan Province of China	A	2005-06-16
US6954256B2	United States of America	B2	2005-10-11
US2006007421A1	United States of America	A1	2006-01-12
TWI254189B	Taiwan Province of China	B	2006-05-01
US7113259B2	United States of America	B2	2006-09-26
KR100659259B1	Republic of Korea	B1	2006-12-19
JP2007165934A	Japan	A	2007-06-28
JP3946212B2	Japan	B2	2007-07-18
US2007201012A1	United States of America	A1	2007-08-30
SG136134A1	Singapore	A1	2007-10-29
JP2009016871A	Japan	A	2009-01-22
CN100495213C	China	C	2009-06-03
JP2010153923A	Japan	A	2010-07-08
JP4586032B2	Japan	B2	2010-11-24
EP2261740A2	European Patent Office (EPO)	A2	2010-12-15
EP2261740A3	European Patent Office (EPO)	A3	2011-04-27
SG173309A1	Singapore	A1	2011-08-29
US2012013868A1	United States of America	A1	2012-01-19
EP1510871B1	European Patent Office (EPO)	B1	2012-04-04
US8208123B2	United States of America	B2	2012-06-26
US8208124B2	United States of America	B2	2012-06-26
JP2012151513A	Japan	A	2012-08-09
JP5170790B2	Japan	B2	2013-03-27
JP5414839B2	Japan	B2	2014-02-12
US2014071420A1	United States of America	A1	2014-03-13
EP2261740B1	European Patent Office (EPO)	B1	2014-07-09
US8804097B2	United States of America	B2	2014-08-12
US2014347642A1	United States of America	A1	2014-11-27
US9442388B2	United States of America	B2	2016-09-13
US9606448B2	United States of America	B2	2017-03-28
US2017160650A1	United States of America	A1	2017-06-08
US10146142B2	United States of America	B2	2018-12-04
US2019086819A1	United States of America	A1	2019-03-21

31 legal events, as 5 offices reported them to INPADOC

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Events

Legal events, newest first
	Event	Code	Office
2020-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-03-03	Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal feeWithdrawnR119	R119	DE
2018-10-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2018-10-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2018-08-27	Fee paymentPLFP	PLFP	FR
2017-08-22	Fee paymentPLFP	PLFP	FR
2016-08-22	Fee paymentPLFP	PLFP	FR
2013-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-05-02	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2013-04-24	Gb: european patent ceased through non-payment of renewal feeCeasedGBPC	GBPC	EP
2013-03-13	No opposition filedOpposition26N	26N	EP
2013-02-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-02-08	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2013-02-08	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2013-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-07-25	Discontinued in the netherlands as no translation has been filedVDEP	VDEP	NL
2012-05-31	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2012-04-04	Designated contracting statesAK	AK	EP
2012-04-04	European patent grantedGrantedFG4D	FG4D	GB
2012-03-02	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2012-02-25	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2011-11-11	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2005-12-28	Designation fees paidAKX	AKX	EP
2005-11-09	Request for examination filed17P	17P	EP
2005-04-06	Designated contracting statesAK	AK	EP
2005-04-06	Request for extension of the european patentAX	AX	EP
2005-03-02	Designated contracting statesAK	AK	EP
2005-03-02	Request for extension of the european patentAX	AX	EP
2005-02-18	Search report despatchedORIGINAL CODE: 0009013PUAL	PUAL	EP
2005-01-14	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP