EP1502284A4
A method of fabricating vertical devices using a metal support film
14 sheets
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Every citation, both waysCites: the store holds 3 of 4
| Document | Relation | Office | Cited during |
|---|---|---|---|
| EP1451853A1 | Cites | European Patent Office (EPO) | Search report |
| DE19945007A1 | Cites | Germany | Search report |
| DE20009283U1 | Cites | Germany | Search report |
| SCHRAUD G ET AL: "Substrateless singlemode vertical cavity surface-emitting GaAs/GaAlAs laser diode", ELECTRONICS LETTERS, IEE STEVENAGE, GB LNKD- DOI:10.1049/EL:19940175, vol. 30, no. 3, 3 February 1994 (1994-02-03), pages 238 - 239, XP006000167, ISSN: 0013-5194 | Non-patent | – | Search report |
49 members in 6 offices
Priority claims9
| Document | Office | Kind | Date |
|---|---|---|---|
| 118317 | United States of America | – | |
| 11831702 | United States of America | A | |
| 11831702 | United States of America | A | |
| 0309504 | United States of America | W | |
| 0309504 | United States of America | W | |
| 118317 | – | – | – |
| US20020118317 | – | – | – |
| US2003009504 | – | – | – |
| WO2003US09504 | – | – | – |
Members49
| Document | Office | Kind | |
|---|---|---|---|
| US2003189212A1 | United States of America | A1 | |
| WO03088320A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU2003233447A1 | Australia | A1 | |
| AU2003233447A8 | Australia | A8 | |
| WO03088320A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1502284A2 | European Patent Office (EPO) | A2 | |
| KR20050013989A | Republic of Korea | A | |
| JP2005522875A | Japan | A | |
| US2006094207A1 | United States of America | A1 | |
| US2006097277A1 | United States of America | A1 | |
| US2007018173A1 | United States of America | A1 | |
| US7294521B2 | United States of America | B2 | |
| US2008064132A1 | United States of America | A1 | |
| KR100880631B1 | Republic of Korea | B1 | |
| US2009072264A1 | United States of America | A1 | |
| US7772020B2 | United States of America | B2 | |
| EP1502284A4This record | European Patent Office (EPO) | A4 | |
| JP2011109118A | Japan | A | |
| US8022386B2 | United States of America | B2 | |
| US8106417B2 | United States of America | B2 | |
| US8294172B2 | United States of America | B2 | |
| US8368115B2 | United States of America | B2 | |
| EP2592664A1 | European Patent Office (EPO) | A1 | |
| US2013134465A1 | United States of America | A1 | |
| EP1502284B1 | European Patent Office (EPO) | B1 | |
| EP2648236A1 | European Patent Office (EPO) | A1 | |
| US8564016B2 | United States of America | B2 | |
| US2013299779A1 | United States of America | A1 | |
| US8669587B2 | United States of America | B2 | |
| US2014231822A1 | United States of America | A1 | |
| JP2014168078A | Japan | A | |
| US9000477B2 | United States of America | B2 | |
| JP5723146B2 | Japan | B2 | |
| US2015155438A1 | United States of America | A1 | |
| US9209360B2 | United States of America | B2 | |
| JP5859053B2 | Japan | B2 | |
| US2016072017A1 | United States of America | A1 | |
| US9478709B2 | United States of America | B2 | |
| US2017018682A1 | United States of America | A1 | |
| US9847455B2 | United States of America | B2 | |
| US2018076356A1 | United States of America | A1 | |
| EP2592664B1 | European Patent Office (EPO) | B1 | |
| US10147847B2 | United States of America | B2 | |
| US2019051796A1 | United States of America | A1 | |
| EP2648236B1 | European Patent Office (EPO) | B1 | |
| EP3518296A1 | European Patent Office (EPO) | A1 | |
| US10453998B2 | United States of America | B2 | |
| US2020006598A1 | United States of America | A1 | |
| US10644200B2 | United States of America | B2 |
78 legal events, as 8 offices reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | Office | |
|---|---|---|---|
| Patent expired because of reaching the maximum lifetime of a patentExpiredMK | MK | NL | |
| Expiry of rightR071 | R071 | DE | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Change of applicant/patenteeR081 | R081 | DE | |
| Change of ownershipPD | PD | NL | |
| Fee paymentPLFP | PLFP | FR | |
| Fee paymentPLFP | PLFP | FR | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Fee paymentPLFP | PLFP | FR | |
| Fee paymentPLFP | PLFP | FR | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Patent lapsedLapsedMM4A | MM4A | IE | |
| Gb: european patent ceased through non-payment of renewal feeCeasedGBPC | GBPC | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Patent ceasedCeasedPL | PL | CH | |
| No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097 | R097 | DE | |
| No opposition filedOpposition26N | 26N | EP | |
| No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE | PLBE | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA | STAA | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Change of applicant/patenteeR081 | R081 | DE | |
| Change of applicant/patenteeR081 | R081 | DE | |
| Change of applicant/patenteeR081 | R081 | DE | |
| Deletion acc. to par. 5 (withdrawal of the translation of the ep patent)MK05 | MK05 | AT | |
| Party data changed (patent owner data changed or rights of a patent transferred)RAP2 | RAP2 | EP | |
| Translation filed for an european patent granted for nl, confirming art. 52 par. 1 or 6 of the patents act 1995GrantedT3 | T3 | NL | |
| Assignments of patentsSD | SD | NL | |
| Dpma publication of mentioned ep patent grantGrantedR096 | R096 | DE | |
| European patents granted designating irelandGrantedFG4D | FG4D | IE | |
| European patent takes effect as a national patent in ch/liEP | EP | CH | |
| Reference to at number (ep patent validated in austria)REF | REF | AT | |
| Designated contracting statesAK | AK | EP | |
| European patent grantedGrantedFG4D | FG4D | GB | |
| (expected) grantORIGINAL CODE: 0009210GRAA | GRAA | EP | |
| Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS | GRAS | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP | GRAP | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| First examination report despatched17Q | 17Q | EP | |
| Supplementary search report drawn up and despatchedA4 | A4 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | EP | |
| Party data changed (applicant data changed or rights of an application transferred)RAP1 | RAP1 | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting statesAK | AK | EP | |
| Request for extension of the european patentAX | AX | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP |
Numbers
- Publication
- 1502284
- Publication, DOCDB
- 1502284
- Publication, EPODOC
- EP1502284
- Application
- 3728297
- Application, DOCDB
- 03728297
- Application, EPODOC
- EP20030728297
Titles3
- German
- VERFAHREN ZUR HERSTELLUNG VERTIKALER BAUELEMENTE UNTER VERWENDUNG EINES METALLSTÜTZFILMS
- English
- A METHOD OF FABRICATING VERTICAL DEVICES USING A METAL SUPPORT FILM
- French
- PROCEDE DE FABRICATION DE DISPOSITIFS VERTICAUX AU MOYEN D'UN FILM SUPPORT METALLIQUE
Classification
- CPC, 16
- H10H20/825
- H10H20/01335
- H10H20/01
- H10H20/018
- H10H20/815
- H10H20/835
- H10H20/833
- H10H20/831
- H10H20/841
- H10H20/8581
- H10H20/8585
- H10H20/811
- H10H20/816
- H10H20/853
- H10H20/856
- H10H20/857
- IPC, 5
- H01L33 00
- H01L33 40
- H01L33 46
- H01L33 64
- H01L33 02
Designated states1
- Contracting states, 1
- Türkiye
