EP1479905A3

Shape memory thin film micro-actuator, and method for producing the same

Abstract

A micro-actuator includes a shape memory thin film (2) having one end (2a) fixed to a substrate (1) and one remaining part (2b) which, at room temperature, is in the martensitic phase and assumes a curly-configuration, whereas at a higher temperature than a threshold value it changes to the austenitic condition, wherein the film is completely stretched upon the substrate.

EP1479905A3, drawing sheet 1
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Term ended

Projected expiry passed 30 April 2024, 2.4 years ago.

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