EP1479905A3
Shape memory thin film micro-actuator, and method for producing the same
Abstract
A micro-actuator includes a shape memory thin film (2) having one end (2a) fixed to a substrate (1) and one remaining part (2b) which, at room temperature, is in the martensitic phase and assumes a curly-configuration, whereas at a higher temperature than a threshold value it changes to the austenitic condition, wherein the film is completely stretched upon the substrate.

Term
Term ended
Projected expiry passed 30 April 2024, 2.4 years ago.
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- Filed
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- Projected expiry
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1 sheet
Sheet 1
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| EP1008885A1 | Cites | European Patent Office (EPO) | A | Search report | 1 |
| US2003021004A1 | Cites | United States of America | X | Search report | 1-3 |
| GILL J J ET AL: "Manufacturing issues of thin film NiTi microwrapper", SENSORS AND ACTUATORS A, vol. 93, no. 2, 30 September 2001 (2001-09-30), ELSEVIER SEQUOIA S.A., LAUSANNE, CH, pages 148 - 156, XP004297608, ISSN: 0924-4247 | Non-patent | – | – | Search report | – |
| KAHN H ET AL: "The TiNi shape-memory alloy and its applications for MEMS", JOURNAL OF MICROMECHANICS AND MICROENGINEERING IOP PUBLISHING UK, vol. 8, no. 3, September 1998 (1998-09-01), pages 213 - 221, XP020069201, ISSN: 0960-1317 | Non-patent | – | – | Search report | – |
5 members in 3 offices; this record represents the family
Priority claims5
| Document | Office | Kind | Date |
|---|---|---|---|
| TO20030347 | Italy | A | |
| TO20030347 | Italy | A | |
| TO20030347 | Italy | – | |
| TO20030347 | – | – | – |
| IT2003TO00347 | – | – | – |
Members5
| Document | Office | Kind | |
|---|---|---|---|
| ITTO20030347A1 | Italy | A1 | |
| US2004227427A1 | United States of America | A1 | |
| EP1479905A2 | European Patent Office (EPO) | A2 | |
| US6983594B2 | United States of America | B2 | |
| EP1479905A3This record | European Patent Office (EPO) | A3 |
12 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application refused18R | 18R | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION HAS BEEN REFUSEDSTAA | STAA | |
| Party data changed (applicant data changed or rights of an application transferred)RAP1 | RAP1 | |
| First examination report despatched17Q | 17Q | |
| Designation fees paidAKX | AKX | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1479905
- Publication, DOCDB
- 1479905
- Publication, EPODOC
- EP1479905
- Application
- 4010274
- Application, DOCDB
- 04010274
- Application, EPODOC
- EP20040010274
Titles3
- German
- Formgedächtnis-Dünnschichtaktor und dessen Herstellungsverfahren
- English
- Shape memory thin film micro-actuator, and method for producing the same
- French
- Actionneur à memoire de forme et à couche mince et sa méthode de production
Classification
- CPC, 6
- B81B3/0035
- F05C2251/08
- G02B26/0866
- F03G7/0614
- F03G7/0616
- F03G7/064
- IPC, 3
- F03G7 06
- B81B3 00
- G02B26 08
Designated states2
- Contracting states, 1
- Türkiye
- Extension states, 1
- North Macedonia