EP1436670A4

Determination of center of focus by cross-section analysis

Abstract

This record has no abstract on file.

EP1436670A4, drawing sheet 1 — Sheet 1 of 6

Term

Term ended

Projected expiry passed 10 October 2022, 4 years ago.

6 sheets

Sheet 1
Sheet 2
Sheet 3
Sheet 4
Sheet 5
Sheet 6

Every citation, both waysCites: the store holds 2 of 3

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
US4408884A	Cites	United States of America	A	Search report	13-15,44-46
US5963329A	Cites	United States of America	A	Search report	58-60
ALLGAIR J ET AL: "Implementation of spectroscopic critical dimension (SCD<TM>) for gate CD control and stepper characterization", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING SPIE-INT. SOC. OPT. ENG USA, vol. 4344, August 2001 (2001-08-01), pages 462 - 471, XP002398474, ISSN: 0277-786X	Non-patent	–	–	Search report	–
NIU X ET AL: "Specular spectroscopic profilometry for the sub-0.18 [mu]m polySi-gate processes", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING SPIE-INT. SOC. OPT. ENG USA, vol. 3998, 2000, pages 846 - 855, XP002398475, ISSN: 0277-786X	Non-patent	–	–	Search report	–
RAYMOND C J ET AL: "MULTI-PARAMETER CD MEASUREMENTS USING SCATTEROMETRY", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 2725, 11 March 1996 (1996-03-11), pages 698 - 709, XP008017475, ISSN: 0277-786X	Non-patent	–	–	Search report	–
BISHOP K P ET AL: "Use of Scatterometry for Reist Process Control", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 1673, 1992, pages 441 - 452, XP002370011, ISSN: 0277-786X	Non-patent	–	–	Search report	–
HICKMAN K C ET AL: "Use of diffracted light from latent images to improve lithography control", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING USA, vol. 1464, 1991, pages 245 - 257, XP002398476, ISSN: 0277-786X	Non-patent	–	–	Search report	–

13 members in 8 offices

This recordMember, by publication datePriority claim

Priority claims9

Priority claims
Document	Office	Kind	Date
328576P	United States of America	–	2001-10-10
32857601	United States of America	P	2001-10-10
32857601	United States of America	P	2001-10-10
0232394	United States of America	W	2002-10-10
0232394	United States of America	W	2002-10-10
328576P	–	–	–
US20010328576P	–	–	–
US2002032394	–	–	–
WO2002US32394	–	–	–

Members13

Family members, oldest first
Document	Office	Kind
WO03032085A2	World Intellectual Property Organization (WIPO)	A2	2003-04-17
AU2002359255A1	Australia	A1	2003-04-22
WO03032085A3	World Intellectual Property Organization (WIPO)	A3	2003-12-11
EP1436670A2	European Patent Office (EPO)	A2	2004-07-14
IL161274A0	Israel	A0	2004-09-27
US2004223137A1	United States of America	A1	2004-11-11
JP2005505929A	Japan	A	2005-02-24
CN1599886A	China	A	2005-03-23
KR20050035153A	Republic of Korea	A	2005-04-15
US7110099B2	United States of America	B2	2006-09-19
EP1436670A4This record	European Patent Office (EPO)	A4	2006-10-25
CN1303477C	China	C	2007-03-07
IL161274A	Israel	A	2009-06-15

9 legal events, as the office reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code
2007-07-18	Application deemed to be withdrawnWithdrawn18D	18D
2007-06-15	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA	STAA
2006-10-25	Supplementary search report drawn up and despatchedA4	A4
2004-09-22	Information on inventor provided before grant (corrected)RIN1	RIN1
2004-09-22	Information on inventor provided before grant (corrected)RIN1	RIN1
2004-08-11	Request for examination filed17P	17P
2004-07-14	Designated contracting statesAK	AK
2004-07-14	Request for extension of the european patentAX	AX
2004-05-28	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI