In-situ balancing for phase-shifting mask

Description of equivalent WO 03025672 A2

IN-SITU BALANCING FOR PHASE-SHIFTING MASK

BACKGROUND OF THE INVENTION

1. FIELD OF THE INVENTION

[0001] The present invention relates to the field of semiconductor integrated circuit manufacturing, and more specifically, to a phase-shifting mask and a process for fabricating a phase-shifting mask.

2. DISCUSSION OF RELATED ART

[0002] Improvements in photolithography have increased the density and enhanced the performance of semiconductor devices by shrinking integrated circuits (ICs). As described by the Rayleigh criterion, the minimum critical dimension (CD) which can be resolved by a wafer stepper is directly proportional to the wavelength of the illumination source and inversely proportional to the numerical aperture (NA) of the projection lens. However, diffraction tends to degrade the aerial image when the CD becomes smaller than the actinic wavelength. The actinic wavelength is the wavelength of light at which a mask is used in a wafer stepper to selectively expose photoresist coated on a substrate, such as a Silicon wafer. As needed, a resolution enhancement technique (RET), such as a phase-shifting mask (PSM), may be used to achieve a wider process latitude. Unlike a binary mask that only uses Chrome to control the amplitude of Ught transmitted through a quartz substrate, a PSM further modulates the phase of light to take advantage of destructive interference to compensate for the effects of diffraction.

[0003] An alternating PSM (AltPSM) is a type of PSM that is particularly helpful in improving contrast when patterning very small CDs, such as the gate length of a transistor in a device. AltPSM introduces a phase shift of 180 degrees between the Ught transmitted through adjacent clear openings so destructive interference can force the amplitude between the two images to zero. A phase shift of 180 degrees is implemented by creating a difference in the optical path lengths through adjacent openings in an opaque layer, such as Chrome. A subtractive process may be used to etch a trench into the quartz substrate in alternate openings. However, incident Ught may scatter off the sidewalls and bottom corners of the etched trench and cause an imbalance in the aerial image that varies as a function of focus. Such a waveguide effect may be manifested as a CD error and a placement error. [0004] The intensity and phase in the aerial image of an AltPSM may be balanced in various ways. A selective biasing approach enlarges the CD of the etched opening relative to the unetched opening to balance the aerial image. An etchback approach undercuts the edges of the chrome in both openings to balance the aerial image. A dual-trench approach etches a deep trench in the phase-shifted opening and a shaUow trench in the non-phase-shifted opening to balance the aerial image.

[0005] Each approach for balancing the aerial image has drawbacks. The selective biasing approach may be limited to the discrete values available on the design grid unless a gray beam-writing scheme is used. The etchback approach may result in defects, such as chipping or delamination of the overhanging chrome between adjacent openings. The dual-trench approach adds complexity and cost by requiring additional processing.

[0006] Thus, what is needed is a phase-shifting mask (PSM) having in situ balancing of intensity and phase and a method of forming such a PSM. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 (a)-(d) is an illustration of a method of forming a mask blank with a balancing layer according to the present invention.

[0008] Figure 2 (a)-(c) is an illustration of a method of forming an alternating phase-shifting mask with a balancing layer located below the absorber layer and in the non-phase-shifted opening according to the present invention.

[0009] Figure 3 is an illustration of an alternating phase-shifting mask with in situ balancing according to the present invention.

DETAILED DESCRIPTION OF THE PRESENT INVENTION

[0010] In the following description, numerous details, such as specific materials, dimensions, and processes, are set forth in order to provide a thorough understanding of the present invention. However, one skilled in the art will realize that the invention may be practiced without these particular details. In other instances, weU-known semiconductor equipment and processes have not been described in particular detail so as to avoid obscuring the present invention. [0011] The present invention describes an alternating phase-shifting mask

(AltPSM) having in situ balancing of intensity and phase and a method of forming such a phase-shifting mask (PSM). A method of fabricating an AltPSM, according to the present invention, will also be described. [0012] A mask is built from a substrate 1100, such as quartz, that is transparent at the actinic wavelength. The actinic wavelength is the wavelength of light used in a wafer stepper to selectively expose photoresist on a wafer. An embodiment is shown in Figure 1 (a).

[0013] A balancing layer 1200 is formed over the substrate 1100. An embodiment is shown in Figure 1 (b). The thickness of the balancing layer 1200 is typically about 3.0-70.0 run. Direct current (DC) magnetron sputtering may be used to form the balancing layer 1200.

[0014] The balancing layer 1200 is formed from a material that is transmissive and may be capable of phase-shifting. Transmission is usuaUy a function of wavelength and may be measured in. a tool, such as the n&k Analyzer 1280 from n&k Technology, Inc. The material, structure, and thickness of the balancing layer 1200 are chosen so that the transmission through the non-phase- shifted opening 1410 is modified, such as reduced, just enough to match the transmission through the adjacent phase-shifted opening 1420. The modification in transmission may be about 1.5-12.0 percent. This will achieve the goal of matching the intensity of light transmitted through the two adjacent openings. [0015] In addition to having suitable optical properties, the balancing layer

1200 must possess chemical resistance, radiation durability, and compatibiUty with the underlying substrate 1100 and the overlying mask absorber layer 1300. Phase and transmission should not be appreciably affected by the mask fabrication process, the mask inspection or repair process, or the mask cleaning process. In most cases, the balancing layer 1200 should have a low film stress. [0016] The balancing layer 1200 may be formed from an elemental metal, such as Gold, or from suitable compounds, including Fluorides, SiUcides, Oxides, or Nitrides of materials, such as Aluminum, Chromium, Hafnium, Molybdenum, Nickel, Niobium, Tantalum, Titanium, Tungsten, or Zirconium. Examples include Chromium Fluoride (CrO_xF_y), Zirconium SiUcon Oxide (ZrSi_xO_y), Molybdenum SiUcon Oxide (MoSi_xO_y), Aluminum Nitride (ALN_y), or SiUcon Nitride (Si_xN_y). [0017] In some embodiments, one or more of the materials forming the balancing layer 1200 may be non-stoichiometric. For example, Oxygen may be present in smaU quantities or may be absent. In other embodiments, the balancing layer 1200 may be non-homogeneous. In still other embodiments, the balancing layer 1200 may be a multilayer. [0018] An absorber layer 1300 is formed over the balancing layer 1200. The result is a mask blank 1000, with an embodiment being shown in Figure 1 (c) . The absorber layer 1300 is opaque at the actinic wavelength with an optical density (OD) of about 2.5 to 4.0. The absorber layer 1300 has a thickness of about 60.0- 180.0 nm. The absorber layer 1300 may be thinner if it is formed out of a material with a larger extinction coefficient (k). [0019] The absorber layer 1300 may be formed from a metal, such as

Chromium. The absorber layer 1300 may also be formed from a refractory metal, such as Molybdenum, Tungsten, or a related aUoy or compound. Other materials, such as amorphous Carbon or amorphous SiUcon, may also be used. [0020] The absorber layer 1300 may include certain materials to provide desired properties. One example is the inclusion of certain materials in the bulk of the absorber layer 1300 to reduce stress, or prevent pinholes, or minimize edge roughness.

[0021] A graded or multilayer structure may be desirable for the absorber layer 1300. An example is the inclusion of other materials at the upper surface of the absorber layer 1300 to decrease reflectivity below 10% at the actinic wavelength so as to minimize flare, or scattered Ught, when the mask 1020 is used in a wafer stepper. Still another example is the inclusion of some materials at the lower surface of the absorber layer 1300 to improve adhesion. The lower surface of the absorber layer 1300 is located over the balancing layer 1200. In one embodiment, the absorber layer 1300 is Chromium Oxynitride at the upper surface, Chromium in the middle, and Chromium oxide at the lower surface. [0022] A first-level photoresist 1400 is applied over the absorber layer 1300 on the mask blank 1000, with an embodiment being shown in Figure 1 (d). The first-level photoresist 1400 should have high resolution and good CD linearity as weU as good dry etch resistance. The first-level photoresist 1400 may have a thickness of about 160-640 nm. A chemicaUy amplified resist (CAR) may be used if high sensitivity to radiation is desired to increase throughput. The first level photoresist 1400 is usuaUy an e-beam photoresist so an e-beam writer may be used to pattern images in the photoresist. The system configuration may be chosen to achieve finer resolution and higher pattern fidelity. For example, vector scan of an e-beam with an acceleration voltage of 40-50 keV may be preferable over raster scan of an e-beam with an acceleration voltage of 10-20 keV. [0023] Reactive Ion etch (RIE) may be performed in a paraUel plate reactor with high plasma density and low gas pressure. The dry etch chemistry may be based on Chlorine, such as Cl /O₂ or BCL. In some cases, it may be advantageous to add an assist gas, such as H₂ or HC1, since Hydrogen radicals can scavenge excess Chlorine radicals. If appropriate, in-situ descum, such as with Oxygen, may be done to remove residue in the images in the photoresist prior to RIE. [0024] Loading effects in the RIE may affect etch rates, etch uniformity, and etch selectivity. It is desirable to increase etch selectivity so as to minimize erosion of the first-level photoresist 1400. Sidewall passivation can help control the etch profile and the etch bias. HeUum may be added to increase plasma density, reduce DC bias, and increase the selectivity over the first-level photoresist 1400. [0025] The absorber layer 1300 is usually etched without appreciably etching the underlying balancmg layer 1200. An embodiment is shown in Figure 2 (a). The etch is predominantly anisotropic to produce mostly vertical profiles in the sidewall of the openings 1310 and 1320. After removal of the first-level photoresist 1400, the CD of the etched features 1310 and 1320 are measured with a Scanning Electron Microscope (SEM). [0026] The etched features are inspected for defects. Defect inspection may be based on a comparison of two nominally identical patterns printed in different portions of the mask (die-to-die) or based on a comparison of a pattern printed on the mask and the layout data corresponding to the pattern (die-to-database). A focused ion beam (FIB) tool, such as a Micrion-8000EX from the FEI Company, may be used to repair an opaque defect using physical ion sputtering or gas- assisted etch (GAE).

[0027] Further processing is performed to introduce a phase shift of 180 degrees between Ught transmitted through adjacent openings. An additive process (not shown) may be used. In an additive process, a transparent layer, such as spin-on-glass (SOG), is deposited through openings in the absorber layer onto the substrate, such as fused silica or quartz, f oHowed by removal of the transparent layer in alternate openings.

[0028] An additive process is susceptible to optical mismatch of materials in the Ught path and accompanying internal losses at the interfaces so, in many cases, a subtractive process is preferred. After the first-level photoresist 1400 is stripped, a second-level photoresist 1500 is appUed. An embodiment is shown in Figure 2 (b). The second-level photoresist 1500 may have a thickness of about 300- 600 nm. [0029] The second-level photoresist 1500 is usuaUy an optical photoresist which is patterned with a laser writer that uses raster scan with multiple beams of deep ultraviolet (DUV) Ught. Laser written features are susceptible to corner rounding and CD nonUnearity so laser proximity correction is usuaUy incorporated to improve pattern fideUty. Laser writing is typicaUy performed with multiple passes to average out subsystem errors that may otherwise adversely affect stripe butting, placement linearity, edge roughness, and CD uniformity.

[0030] The opening 1310 that wiU be non-phase-shifted is covered by the second-level photoresist 1500. The opening 1320 that wiU be phase-shifted is uncovered by exposing and developing a larger opening 1525 in the second-level photoresist 1500. An embodiment is shown in Figure 2 (b).

[0031] The larger opening 1525 in the second-level photoresist 1500 is aligned to the etched opening 1320 in the absorber layer 1300. The larger opening 1525 is biased larger than the etched opening 1320 so as to accommodate registration errors, CD errors, and overlay tolerances in photolithography and etch. Thus, the placement of the larger opening 1525 in the second-level photoresist 1500 in relation to the etched opening 1320 is not very critical since the edge of the etched opening 1320 in the absorber layer 1300, and not the edge of the larger opening 1525 in the second-level photoresist 1500, wiU determine the width 1155 of the trench 1125. The width 1155 may be measured top-down in a SEM. [0032] After the second-level photoresist 1500 is exposed and developed,

RIE is performed with chemistry based on Fluorine, such as CHF₃, CF₄/He/O₂, or SF₆/He. The etch may be done in a high-pressure Inductively Coupled Plasma (ICP) system or a Magnetically Enhanced Reactive Ion Etching (MERIE) system. The etch is anisotropic and creates a trench in the etched opening. The depth of the trench corresponds to a phase shift of 180 degrees in the Ught that will be transmitted through the etched opening 1125 relative to the light that wiU be transmitted through the unetched opening 1310. [0033] It may be desirable to use a voting technique to create a phase shift of 180 degrees between adjacent openings. Voting involves performing a process in several smaller steps instead of in one large step so that any spatial or temporal non-uniformity in the process may be smoothed out. In particular, voting significantly improves control of the depth of the trench, and thus the phase shift, by reducmg the impact of any extraneous material that may block the etch. [0034] In one embodiment, a triple-voting technique may be used. In other words, the etch of the quartz substrate 1100 through the opening 1320 is separated into three shorter etches. Each of the shorter etches in the voting technique produces a phase shift, or phase angle, of about 60 degrees. Each of the shorter etches is preceded by appUcation, exposure, and developing of an opening 1525 in a second-level photoresist 1500. The first of the shorter etches will include removal of the balancing layer 1200 in the opening 1320 before etching into the quartz substrate 1100. The second and third of the shorter etches wiU only include etching deeper into the quartz substrate 1100. [0035] The photoresist is stripped after each of the shorter etches so the phase angle and the intensity may be measured. The etch times may be adjusted as needed based on feedback from the measurements. It is desirable for the phase angle to have a range of less than 2.0 degrees and the intensity to have a range of less than 0.2%. The phase angle may be measured on a tool, such as the MPM-248 or the MPM-193 from Lasertech Corp. The intensity may be measured on a tool, such as the MSM100 Aerial Image Measurement System (AIMS) or MSM193 AIMS from Carl Zeiss. The values selected for the numerical aperture (NA) and the partial coherence should be similar to the values on the wafer stepper in which the mask wiU subsequently be used.

[0036] After stripping the second-level photoresist 1500 for the third time (when using a triple-voting technique), a plasma process or a wet process may be used to clean up the substrate 1100 and remove any undesirable film or defect that may be present. A shorter or less aggressive version of a conventional isotropic wet etch may also be used to remove defects. [0037] Figure 2 (c) shows an embodiment of an alternating PSM 1020 having in situ balancing of intensity and phase. The phase-shifted opening 1125 has an etch depth of 1145 in the substrate 1100. Underetching or overetching the substrate 1100 wiU introduce errors in phase angle. Errors in the phase shift, or phase angle, can accumulate and significantly reduce the depth of focus (DOF) of isolated features. However, phase errors usuaUy have a relatively minor effect on the DOF of dense features.

[0038] The etch depth 1145 in the substrate 1100 and the sidewall profile of the etched opening 1125 may be determined by measuring the overaU step height with an Atomic Force Microscope (AFM) and taking into account the thickness of the absorber layer 1300 and the thickness of the balancing layer 1200. Deviation of the sidewall profile from the vertical may also reduce the DOF for isolated features.

[0039] The sidewaU of the trench 1125 should be smooth, with a slope of

85-90 degrees. The bottom surface of the etched trench 1125 should be flat and smooth, but, in some cases, the bottom surface may be concave or convex and rough (not shown). The bottom corners of the trench 1125 may be rounded (not shown). Deviations and non-uniformities in the size and shape of the trench 1125 wiU introduce errors in intensity and phase of the transmitted Ught. [0040] In most cases, the balancing layer 1200 is left intact in the non-phase- shifted opening 1310. However, if necessary, such as when the etch depth 1145 is sUghtly too shaUow or sUghtly too deep, it may be desirable to compensate by adjusting, such as by reducing, the thickness of the balancing layer 1200 in the non-phase-shifted opening 1310 so as to balance the intensity and phase of the light transmitted through the non-phase-shifted opening 1310 relative to the light transmitted through the phase-shifted opening 1125. [0041] Other embodiments include embedding an intermediate layer (not shown) to serve as an etch stop for the etch into the quartz substrate. However, any additional layer may add complexity and affect the aerial image unless it is completely removed prior to completion of fabrication. [0042] Another embodiment of the present invention includes a phase- shifting mask (PSM) having in situ balancing of transmission and phase. Such a mask may be transmissive or reflective. The mask may be used with deep ultraviolet (DUV) light or with extreme ultraviolet (EUV) Ught. [0043] One embodiment of the present invention is a transmissive, alternating phase-shifting mask, as shown in Figure 3. The AltPSM 2020 has a substrate 2100 that is transparent to Ught at the actinic wavelength. The actinic wavelength is the wavelength of Ught used in a wafer stepper to selectively expose photoresist on a wafer.

[0044] Fused siUca, or quartz, is commonly chosen for the substrate 2100 at an actinic wavelength in the range of about 193-436 nanometers (nm). Modified fused silica, such as low-hydroxyl-content fused siUca or fluorine-doped siUca, may be used at short actinic wavelengths, such as about 157 nm. [0045] Alternatively, a crystalline fluoride, such as Calcium Fluoride, may be used at short actinic wavelengths, such as about 126 nm. However, a crystaUine fluoride often possesses characteristic properties, such as birefringence, large coefficients of thermal expansion, and low resistance to chemical etches. Compensation for any undesirable property may be accompUshed with appropriate design of the optics subsystem and the wafer stepper system. [0046] A balancing layer 2200 is disposed over the substrate 2100. The balancing layer 2200 may have a single-layer structure or a multilayer structure. The balancing layer 2200 should be thin, such as about 3.0-70.0 run, to reduce absorption. The balancing layer 2200 is partially transmissive and may be capable of phase-shifting. Transmission is usuaUy a function of wavelength and may be measured in a tool, such as the n&k Analyzer 1280 from n&k Technology, Inc. [0047] In addition to having suitable optical properties, the balancing layer 2200 must possess sufficient chemical resistance, radiation durabiUty, and compatibility with the underlying substrate 2100 and the overlying absorber layer 2300. Phase and transmission should not be appreciably affected by the mask fabrication process, the mask inspection or repair process, or the mask cleaning process. The balancing layer 2200 may include materials, such as Chromium Fluoride (CrO_xF_y), Zirconium SiUcon Oxide (ZrSi_xO_y), or Molybdenum Silicide (MoSi). Other materials include Fluorides, Suicides, and Nitrides of metals, such as Aluminum, Chromium, Hafnium, Molybdenum, Nickel, Niobium, Tantalum, Titanium, Tungsten, or Zirconium. [0048] An absorber layer 2300 is disposed over the balancing layer 2200. The absorber layer 2300 is opaque at the actinic wavelength with an optical density (OD) of about 2.5-4.0. The absorber layer 2300 has a thickness of about 60.0-180.0 nm. The absorber layer 2300 may be thinner if it has a larger extinction coefficient (k). [0049] The absorber layer 2300 may be a metal, such as Chromium. The absorber layer 2300 may also be a refractory metal, such as Molybdenum or

Tungsten, or a related alloy or compound. The absorber layer 2300 may also be a material such as amorphous Carbon or amorphous SiUcon.

[0050] In one embodiment, the absorber layer 2300 is Chromium. A graded structure or a multilayer structure may be desirable. For example, inclusion of Oxygen towards the lower surface of the absorber layer 2300 wiU improve adhesion to the balancing layer 2200 below. Inclusion of Oxygen and Nitrogen towards the upper surface of the balancing layer 2200 can reduce reflectivity below 10% at the actinic wavelength, thus minimizing flare, or scattered Ught, when the mask 2020 is used in a wafer stepper. [0051] The phase-shifted opening 2125 includes a trench in a first portion of the substrate. The trench in the first portion of the substrate has a width 2155 and a depth 2145. The adjacent non-phase-shifted opening 2310 includes the balancing layer 2200 over a second portion of the substrate with a width 2350. There is no trench in the second portion of the substrate in one embodiment. In another embodiment, there is a shaUow trench (not shown) in the second portion of the substrate.

[0052] The phase-shifted opening 2125 and the non-phase-shifted opening

2310 are separated by a narrow strip 2355 of the absorber layer 2300. In some cases, the narrow strip 2355 may be absent (not shown) between the two openings. Phase edge masks may be used, especially when the openings are very smaU.

[0053] The depth 2145 corresponds to a difference in the optical path length of Ught transmitted through the transparent substrate 2100 between the phase- shifted opening 2125 and the non-phase-shifted opening 2310. A phase shift of 180 degrees is desired with a range of less than 2.0 degrees. The depth 2145 has about the same magnitude as the Ulumination wavelength when the transparent substrate 2100 is quartz and the ambient is air. [0054] In a wafer stepper, Numerical Aperture (NA) of the projection lens and partial coherence of the exposure light will determine the diffraction around the absorber layer 2300 at the edges of the trench 2125. A wafer stepper typicaUy has an NA of 0.45 to 0.80 and a partial coherence of 0.30 to 0.90. Consequently, the optimal difference in the optical path length through the transparent substrate 2100 may vary, depending on the trench depth 2145 and the trench width 2155. [0055] The sidewaU of the trench 2125 should be smooth, with a slope of

85-90 degrees. The bottom surface of the etched trench 2125 should be flat and smooth, but, in some cases, the bottom surface may be concave or convex and rough (not shown). The bottom corners of the trench 2125 may be rounded (not shown). Deviations and non-uniformities in the size and shape of the trench 2125 wiU introduce errors in intensity and phase of the transmitted Ught. [0056] In still other embodiments, certain intermediate or embedded layers

(not shown) may be disposed between the absorber layer 2300 and the balancing layer 2200. Intermediate or embedded layers (not shown) may also be disposed between the balancing layer 2200 and the substrate 2100. [0057] Optical Proximity Correction (OPC) may be included in the mask

2020 claimed in the present invention. OPC involves the biasing of CDs to compensate for print bias and etch bias. It is often helpful to iteratively simulate the aerial image resulting from using PSM with OPC. It can also be helpful to combine the mask 2020 claimed in the present invention with Off- Axis fllumination (OAI) to enhance certain types of features and layouts.

[0058] Many embodiments and numerous details have been set forth above in order to provide a thorough understanding of the present invention. One skilled in the art will appreciate that many of the features in one embodiment are equaUy appUcable to other embodiments. One ski led in the art will also appreciate the ability to make various equivalent substitutions for those specific materials, processes, dimensions, concentrations, etc. described herein. It is to be understood that the detailed description of the present invention should be taken as illustrative and not limiting, wherein the scope of the present invention should be determined by the claims that follow.

[0059] Thus, we have described a phase-shifting mask (PSM) having in situ balancing of intensity and phase and a method of forming such a PSM.