EP1397828A4

Electrolytic processing device and substrate processing apparatus

Abstract

This record has no abstract on file.

Term ended

Projected expiry passed 21 February 2022, 4.6 years ago.

Owner: EBARA CORP
Applicants: EBARA CORPORATION
Inventors: KOBATA, Itsuki c/o Ebara Corporation, Tokyo 144-8510, Japan
SHIRAKASHI, Mitsuhiko c/o Ebara Corporation, Tokyo 144-8510, Japan
KUMEKAWA, Masayuki c/o Ebara Corporation, Tokyo 144-8510, Japan
SAITO, Takayuki c/o Ebara Research Co., Ltd., Fujisawa-shi, Kanagawa 251-8502, Japan
and 4 more inventorsShow fewer
TOMA, Yasushi c/o Ebara Research Co., Ltd., Fujisawa-shi, Kanagawa 251-8502, Japan
SUZUKI, Tsukuru c/o Ebara Research Co., Ltd., Fujisawa-shi, Kanagawa 251-8502, Japan
YAMADA, Kaoru c/o Ebara Research Co., Ltd., Fujisawa-shi, Kanagawa 251-8502, Japan
MAKITA, Yuji c/o Ebara Research Co., Ltd., Fujisawa-shi, Kanagawa 251-8502, Japan

59 sheets

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
WO0034995A1	Cites	World Intellectual Property Organization (WIPO)	X	Search report	1-10
EP1029954A1	Cites	European Patent Office (EPO)	–	Search report	–
EP1079003A2	Cites	European Patent Office (EPO)	–	Search report	–
EP1170083A2	Cites	European Patent Office (EPO)	–	Search report	–
EP1179617A1	Cites	European Patent Office (EPO)	–	Search report	–
JP2000144467A	Cites	Japan	–	Search report	–
US3883383A	Cites	United States of America	–	Search report	–
DE4402596A1	Cites	Germany	–	Search report	–
WO0034995A	Cites	World Intellectual Property Organization (WIPO)	–	–	–
See also references of WO 02103771A1	Non-patent	–	–	Search report	–

32 members in 7 offices

This recordMember, by publication datePriority claim

Priority claims
Document	Office	Kind	Date
2001183822	Japan	–	2001-06-18
2001183822	Japan	A	2001-06-18
2001264368	Japan	–	2001-08-31
2001264368	Japan	A	2001-08-31
2001401436	Japan	–	2001-12-28
2001401436	Japan	A	2001-12-28
0201545	Japan	W	2002-02-21

Family members, oldest first
Document	Office	Kind
WO02103771A1	World Intellectual Property Organization (WIPO)	A1	2002-12-27
KR20030031908A	Republic of Korea	A	2003-04-23
JP2003145354A	Japan	A	2003-05-20
US2003132103A1	United States of America	A1	2003-07-17
JP2003205427A	Japan	A	2003-07-22
US2003136668A1	United States of America	A1	2003-07-24
WO03080898A1	World Intellectual Property Organization (WIPO)	A1	2003-10-02
TW200305470A	Taiwan Province of China	A	2003-11-01
JP2003324091A	Japan	A	2003-11-14
CN1463467A	China	A	2003-12-24
EP1397828A1	European Patent Office (EPO)	A1	2004-03-17
TW592858B	Taiwan Province of China	B	2004-06-21
US2004129569A1	United States of America	A1	2004-07-08
KR20040104545A	Republic of Korea	A	2004-12-10
EP1489204A1	European Patent Office (EPO)	A1	2004-12-22
JP2005153142A	Japan	A	2005-06-16
JPWO2003080898A1	Japan	A1	2005-07-28
CN1656257A	China	A	2005-08-17
US7101465B2	United States of America	B2	2006-09-05
JP3833139B2	Japan	B2	2006-10-11
TWI276490B	Taiwan Province of China	B	2007-03-21
EP1397828A4This record	European Patent Office (EPO)	A4	2007-04-11
EP1777736A1	European Patent Office (EPO)	A1	2007-04-25
JP3960803B2	Japan	B2	2007-08-15
JP2007284795A	Japan	A	2007-11-01
EP1489204A4	European Patent Office (EPO)	A4	2008-01-02
JP4043234B2	Japan	B2	2008-02-06
CN101230481A	China	A	2008-07-30
KR100849202B1	Republic of Korea	B1	2008-07-31
CN100449705C	China	C	2009-01-07
CN100507092C	China	C	2009-07-01
US7638030B2	United States of America	B2	2009-12-29

13 legal events, as the office reported them to INPADOC

Point at a mark for the event

Legal events, newest first
	Event	Code
2009-11-11	Application withdrawnWithdrawn18W	18W
2009-10-09	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION HAS BEEN WITHDRAWNSTAA	STAA
2007-04-11	Supplementary search report drawn up and despatchedA4	A4
2007-04-11	Information provided on ipc code assigned before grantRIC1	RIC1
2007-04-11	Information provided on ipc code assigned before grantRIC1	RIC1
2007-04-11	Information provided on ipc code assigned before grantRIC1	RIC1
2007-04-11	Information provided on ipc code assigned before grantRIC1	RIC1
2007-04-11	Information provided on ipc code assigned before grantRIC1	RIC1
2007-04-11	Information provided on ipc code assigned before grantRIC1	RIC1
2006-11-22	Designated contracting states (corrected)RBV	RBV
2004-03-17	Request for examination filed17P	17P
2004-03-17	Designated contracting statesAK	AK
2004-01-30	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI